Cleaning apparatus

Abstract

A cleaning apparatus cleans an object to be cleaned by ejecting a cleaning agent from a nozzle. The cleaning apparatus includes a gas ejecting device for ejecting heated gas to a surface of the object to be cleaned. The gas ejecting device is configured to move to a position above the object to be cleaned when cleaning is performed, and retract from the object to be cleaned when cleaning is not performed. An ejection quantity of the heated gas is controlled when cleaning is performed and when cleaning is not performed.

1 . A cleaning apparatus for cleaning an object with a cleaning agent, comprising: 
 gas ejecting means for ejecting heated gas to a surface of the object, said ejecting means moving to a position above the object when cleaning is performed and retracting from the position above the object when cleaning is not performed, and    means for controlling a quantity of the heated gas when cleaning is performed and is not performed, said controlling means being connected to the gas ejecting means.    
   
   
       2 . A cleaning apparatus according to  claim 1 , wherein said gas ejecting means has a plurality of jet holes, and ejects the heated gas with a predetermined temperature through the plurality of the jet holes.  
   
   
       3 . A cleaning apparatus according to  claim 1 , further comprising a supporting member for supporting one end of the gas ejecting means to be disposed at a position with a predetermined distance from the surface of the object so that the heated gas is ejected toward the surface of the object.  
   
   
       4 . A cleaning apparatus according to  claim 2 , wherein said jet holes of the gas ejecting means are arranged with a predetermined angle relative to the surface of the object.  
   
   
       5 . A cleaning apparatus according to  claim 2 , wherein said jet holes are arranged with at least two directions including a direction perpendicular to the surface of the object and an inner circumferential direction or an outer circumferential direction of the object.  
   
   
       6 . A cleaning apparatus according to  claim 1 , further comprising a filter for cleaning the heated gas.  
   
   
       7 . A cleaning apparatus according to  claim 3 , further comprising a heater for heating the heated gas, a filter for cleaning the heated gas and an environmental chamber for retaining the heater, the filter and the supporting member.  
   
   
       8 . A cleaning apparatus according to  claim 7 , wherein at least one of said supporting member and said filter includes a temperature control mechanism.  
   
   
       9 . A cleaning apparatus according to  claim 3 , wherein said gas ejecting means includes at least two portions supported by the supporting member to be disposed above the surface of the object with a center of the object therebetween.  
   
   
       10 . A cleaning apparatus according to  claim 9 , further comprising one gas source for supplying the heated gas into the at least two portions.  
   
   
       11 . A cleaning apparatus according to  claim 9 , further comprising solvent ejecting means disposed between the two portions, said solvent ejecting means being driven together with the gas ejecting means.  
   
   
       12 . A cleaning apparatus according to  claim 11 , wherein said solvent ejecting means includes temperature control means for maintaining solvent at a temperature equal to or higher than a dew point thereof.  
   
   
       13 . A cleaning apparatus according to  claim 11 , wherein said solvent ejecting means includes a nozzle having a gas jetting hole at an outer circumference thereof for ejecting gas.  
   
   
       14 . A cleaning apparatus according to  claim 11 , wherein said solvent ejecting means has a rod shape and a wedge-shaped surface inclined in a longitudinal direction thereof to face the surface of the object.