Probe card

Abstract

A probe card of this invention includes a contactor, printed wiring board, interposer, connecting member, and reinforcing member. The interposer is arranged between the contactor and printed wiring board to bring the contactor and printed wiring board into contact with each other flexibly and electrically. The connecting member integrates the contactor, printed wiring board, and interposer. The reinforcing member reinforces the printed wiring board integrated through the connecting member.

1 . A probe card for testing electrical characteristics of an object to be tested, the probe card comprising: 
 a contactor;    a circuit board;    an intermediate member which is arranged between the contactor and circuit board and comes into contact with the contactor and circuit board flexibly and electrically; and    a connecting member which integrates the contactor and circuit board.    
   
   
       2 . A probe card according to  claim 1 , wherein the intermediate member has a board and a plurality of elastically deformable contacts arranged at least on a circuit board side of the board.  
   
   
       3 . A probe card according to  claim 2 , further comprising a reinforcing member which reinforces the circuit board.  
   
   
       4 . A probe card according to  claim 2 , wherein the connecting member integrates the contactor, circuit board, and reinforcing member.  
   
   
       5 . A probe card according to  claim 4 , further comprising an elastic member arranged at least either between the contactor and circuit board or between the circuit board and reinforcing member.  
   
   
       6 . A probe card according to  claim 5 , wherein the intermediate member is attached to the elastic member arranged between the contactor and circuit board.  
   
   
       7 . A probe card according to  claim 2 , wherein the intermediate member is made of conductive rubber.  
   
   
       8 . A probe card according to  claim 6 , wherein the contactor has a ceramic board and a plurality of probes formed on an object-to-be-tested side of the ceramic board.  
   
   
       9 . A probe card according to  claim 1 , comprising, as the intermediate member, a plurality of elastically deformable contacts which are provided on the contactor and come into electrical contact with the circuit board.  
   
   
       10 . A probe card according to  claim 9 , further comprising a reinforcing member which reinforces the circuit board.