Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus

Abstract

A decomposition apparatus is provided that includes an excimer lamp emitting UV light for decomposing an organic compound and a decomposition container provided with the excimer lamp for decomposing the organic compound in a liquid or a gas. In the decomposition apparatus, since the UV light irradiated from the excimer lamp is emitted to the liquid or the gas, the organic compound in the liquid or the gas can be decomposed easily by the simple decomposition apparatus and method. The decomposition apparatus and method are effective to decompose the organic compound, such as dioxin (polychlorinated dibenzo-para-dioxin), PCB (polychiorinated biphenyl), trichloroethylene or the like, polluting the air or water to purify the environment.

1 . A decomposition apparatus for decomposing an organic compound fluid such as a gas of an organic compound, a liquid thereof, a gas containing an organic compound, and a liquid containing an organic compound, which comprises: 
 an excimer lamp emitting UV light for decomposing said organic compound, and    a decomposition container provided with an excimer lamp for decomposing said organic compound in said organic compound fluid.    
   
   
       2 . A decomposition apparatus as claimed in  claim 1 , wherein two or more decomposition containers each having said excimer lamp are jointed for flowing said fluid in one container to the other container in order.  
   
   
       3 . A decomposition apparatus as claimed in  claim 1 , wherein said container is equipped with a flow rate buffering material for slowing down a flow rate of said fluid.  
   
   
       4 . A decomposition apparatus as claimed in  claim 1 , wherein said decomposition container is equipped with a contact part between said fluid and a catalyst gas for promoting decomposition of the organic compound.  
   
   
       5 . A decomposition apparatus as claimed in  claim 1 , wherein an organic compound to be decomposed selected from fan, dioxin (polychlorinated dibenzo-para-dioxin), PCB (polychlorinated biphenyl), trichloroethylene, tetrachloroethylene, dichloromethane, tetrachloromethane, 1,2-dichloroethane, 1,1-dichloroethane, cis-1,2-dichloroethane, 1,1,1-trichloroethane, 1,3-dichloropropene and a mixture thereof.  
   
   
       6 . A decomposition apparatus as claimed in  claim 1 , wherein said excimer lamp comprises: 
 a discharging vessel made of a dielectric material with excellent permeability of UV light,    an inner tube equipped on the inside of the discharging vessel, a protect tube equipped on the outside of the discharging vessel,    an outer electrode equipped in the position between the protect tube and the discharging vessel,    an inner electrode equipped on the inside of the inner tube,    a filling gas filled up in said discharging vessel, and    a power supply for applying a voltage between said outer electrode and said inner electrode.    
   
   
       7 . A decomposition apparatus as claimed in  claim 6 , wherein said excimer lamp comprises: 
 said power supply applying a high frequency voltage from 1 to 20 MHz to a metal container and the inner electrode.    
   
   
       8 . A decomposition apparatus as claimed in  claim 1 , wherein a wave length of UV light is of 222 nm or below.  
   
   
       9 . A decomposition apparatus of an organic compound fluid such as a gas of an organic compound, a liquid thereof, a gas containing an organic compound and a liquid containing an organic compound, which comprises: 
 an excimer emission body equipped with an inner electrode,    a metal container equipped to the outside of said excimer emission body for filling up at least one selected from a liquid of an organic compound and a liquid containing organic compound a power supply for applying a high frequency voltage between the inner electrode and the metal container, and    a UV light irradiated from said excimer emission body to said liquid in said metal container allows to generate OH radical and 0 radical in the liquid, and    the radical cutting some bond of the organic compound so that the organic compound in the liquid is decomposed easily.    
   
   
       10 . A decomposition apparatus as claimed in  claim 9 , wherein said excimer emission body comprises: 
 a discharging vessel made of a dielectric material with excellent permeability of UV light,    an inner tube equipped on the inside of said discharging vessel, an inner electrode equipped on the inside of said inner tube, and a filling gas filled up in said discharging vessel.    
   
   
       11 . A decomposition apparatus as claimed in  claim 9 , wherein said excimer lamp comprises: 
 said power supply applying a high frequency voltage from 1 to 20 MHz to the metal container and the inner electrode.    
   
   
       12 . A decomposition apparatus as claimed in  claim 9 , wherein an organic compound is selected from flon, dioxin (polychlorinated dibenzo-para-dioxin), PCB (polychlorinated biphenyl), trichloroethylene, tetrachloroethylene, dichloromethane, tetrachloromethane, 1,2-dichloroethane, 1,1-dichloroethane, cis-1,2-dichloroethane, 1,1,1-trichloroethane, 1,3-dichloropropene and a mixture thereof.  
   
   
       13 . A decomposition apparatus as claimed in  claim 9 , wherein a wave length of UV light is of 222 nm or below.  
   
   
       14 - 24 . (canceled)