Substrate support mechanism for semiconductor processing system

Abstract

A supporting mechanism ( 12 A) is used for transferring a target substrate (W) in cooperation with a transfer arm ( 32 ), in a semiconductor processing system. The supporting mechanism includes first and second holding portions ( 38 A to 38 C, 40 A to 40 C) each configured to be moved up and down and transfer a substrate to and from the transfer arm. The first and second holding portions are configured to be moved relative to each other in a vertical direction without spatially interfering with each other, and support substrates at substantially the same horizontal coordinate position. The supporting mechanism further includes first and second drives ( 46, 48 ) configured to move the first and second holding portions up and down, and a controller ( 68 ) configured to control the first and second drives. The controller is arranged to control the first and second drives to alternatively support a substrate by the first and second holding portions.

1 . A supporting mechanism used for transferring a target substrate in cooperation with a transfer arm, in a semiconductor processing system, the supporting mechanism comprising: 
 first and second holding portions each configured to be moved up and down and transfer a substrate to and from the transfer arm, the first and second holding portions being configured to be moved relative to each other in a vertical direction without spatially interfering with each other, and support substrates at substantially the same horizontal coordinate position;    first and second drives configured to move the first and second holding portions up and down; and    a controller configured to control the first and second drives, the controller being arranged to control the first and second drives to alternatively support a substrate by the first and second holding portions.    
   
   
       2 . The supporting mechanism according to  claim 1 , wherein each of the first and second holding portions comprises a plurality of lifter pins having top ends, on which a substrate is placed.  
   
   
       3 . The supporting mechanism according to  claim 1 , wherein each of the first and second holding portions comprises a holder plate having a top face, on which a substrate is placed.  
   
   
       4 . The supporting mechanism according to  claim 1 , wherein one of the first and second holding portions comprises a plurality of lifter pins having top ends, on which a substrate is placed, and the other of the first and second holding portions comprises a holder plate having a top face, on which a substrate is placed.  
   
   
       5 . The supporting mechanism according to  claim 1 , wherein each of the first and second holding portions comprises a lifter pin and a holder plate, the lifter pin and the holder plate respectively having a top end and a top face, on which a substrate is placed.  
   
   
       6 . The supporting mechanism according to  claim 2 , wherein each of the first and second holding portions comprises a base frame, and the plurality of lifter pins stand on the base frame.  
   
   
       7 . The supporting mechanism according to  claim 6 , wherein the base frames of the first and second holding portions are disposed not to overlap with each other in plan view, and comprise extension portions extending toward each other and mutually beyond tips of the extension portions, and one of the lifter pins is supported near each of the tips of the extension portion.  
   
   
       8 . The supporting mechanism according to  claim 6 , wherein the base frames of the first and second holding portions are stacked one above the other, and configured to be moved up and down by respective driving rods.  
   
   
       9 . The supporting mechanism according to  claim 3 , wherein the holder plates comprise extension portions disposed not to overlap with each other in plan view, and extending toward each other and mutually beyond tips of the extension portions.  
   
   
       10 . The supporting mechanism according to  claim 4 , wherein the plurality of lifter pins are disposed around a central axis of the holder plate.  
   
   
       11 . The supporting mechanism according to  claim 10 , wherein the plurality of lifter pins are supported by a base frame disposed below the holder plate, and the holder plate and the base frame are configured to be moved up and down by respective driving rods.  
   
   
       12 . The supporting mechanism according to  claim 8 , wherein the driving rods form a coaxial structure.  
   
   
       13 . The supporting mechanism according to  claim 2 , wherein the plurality of lifter pins are configured to be respectively driven by actuators belonging to the first drive or the second drive, and the number of the actuators is the same as the number of lifter pins.  
   
   
       14 . The supporting mechanism according to  claim 2 , wherein the plurality of lifter pins are substantially disposed on one circle at substantially regular intervals.  
   
   
       15 . The supporting mechanism according to  claim 1 , further comprising a pair of auxiliary holding portions for holding a substrate, disposed at positions sandwiching the first and second holding portions and configured to be moved up and down, wherein a position where the pair of auxiliary holding portions hold a substrate is above a position where the first and second holding portions hold a substrate.  
   
   
       16 . The supporting mechanism according to  claim 1 , wherein the first and second holding portions are disposed in an airtight chamber configured to be vacuum-exhausted, the first and second drives are disposed outside the airtight chamber and connected to the first and second holding portions respectively through driving rods, and portions of the airtight chamber, where the driving rods penetrate, are respectively provided with longitudinally flexible bellows, which maintain an interior of the airtight chamber airtight.  
   
   
       17 . The supporting mechanism according to  claim 1 , wherein the controller controls the first and second drives such that the respective numbers of substrates supported by the first and second holding portions become almost the same.  
   
   
       18 . The supporting mechanism according to  claim 1 , wherein the controller controls the first and second drives such that first-state substrates are respectively supported by the first holding portion, and second-state substrates are respectively supported by the second holding portion.  
   
   
       19 . The supporting mechanism according to  claim 11 , wherein the driving rods form a coaxial structure.