Sensor signal transmission from processing system

Abstract

A processing system includes a plurality of chamber walls that define a sealed environment. A sensor is positioned in the sealed environment. In one embodiment, a power source, such as a photoelectric cell, is positioned within the environment. In another embodiment, a wireless transmission device is positioned within the sealed environment. Methods for monitoring the conditions within the sealed environment are also disclosed.

1 .- 17 . (canceled)  
   
   
       18 . A method for monitoring conditions within a substantially sealed environment of a processing system, comprising: 
 providing a sensor and a wireless transmission device inside the sealed environment;    collecting information from the sensor; and    transmitting the information from the sensor with the wireless transmission device to a device located outside of the sealed environment.    
   
   
       19 . The method as in  claim 18 , wherein collecting information from the sensor comprises detecting a presence of a substrate on an end effector.  
   
   
       20 . The method as in  claim 18 , wherein collecting information from the sensor comprises measuring a temperature within the sealed environment.  
   
   
       21 . The method as in  claim 18 , wherein collecting information from the sensor comprises measuring a gas composition within the sealed environment.  
   
   
       22 . The method as in  claim 18 , further comprising providing a photoelectric cell and providing power to the sensor from the photoelectric cell.  
   
   
       23 . A substrate processing system for processing a substrate, the processing system comprising: 
 a plurality of chamber walls, which define a substantially sealed environment;    a sensor positioned in the sealed environment; and    a wireless transmission device that is positioned within the sealed environment and is configured to transmit information outside of the sealed environment.    
   
   
       24 . The system as in  claim 23 , wherein the wireless transmission device is an RF transmitter.  
   
   
       25 . The system as in  claim 23 , wherein the wireless transmission device is an infrared transmitter and the chamber walls include a portion configured for the passage of infrared light.  
   
   
       26 . The system as in  claim 23 , wherein a power source is also positioned in the sealed environment, the power source comprising a photoelectric cell.  
   
   
       27 . The system as in  claim 26 , wherein the wireless transmission device is powered by the power source.  
   
   
       28 . A method for monitoring conditions within a substantially sealed environment of a processing system, comprising: 
 providing a sensor and a photoelectric cell inside the sealed environment;    collecting information from the sensor; and    providing power to the sensor from the photoelectric cell.    
   
   
       29 . The method as in  claim 28 , wherein collecting information from the sensor comprises detecting a presence of a substrate on an end effector.  
   
   
       30 . The method as in  claim 28 , wherein collecting information from the sensor comprises measuring a temperature within the sealed environment.  
   
   
       31 . The method as in  claim 28 , wherein collecting information from the sensor comprises measuring a gas composition within the sealed environment.  
   
   
       32 . A substrate processing system for processing a substrate, the processing system comprising: 
 a plurality of chamber walls, which define a substantially sealed environment;    a substrate detection apparatus positioned in the sealed environment; the substrate detection apparatus comprising a first receiving member that is coupled to the end effector such that the first receiving member moves with the end effector, a light detector that is operatively coupled to the first receiving member and is configured to detect an amount light received by the first receiving member; a first transmitting member that is coupled to the end effector such that the first transmitting member moves with the end effector, a light source that is operatively coupled to the first transmitting member and is configured to transmit an amount light through the first transmitting member; and    a power source that is also positioned in the sealed environment, the power source comprising a photoelectric cell.