Method for assembling carbon nanotubes and microprobe and an apparatus thereof

Abstract

The present invention discloses a method for assembling carbon nanotubes and microprobe, which employs the Electrophoresis or Dielectrophoresis principles to drive the carbon nanotubes self-assembling the microprobe under an electric field. The method comprises the steps of: forming at least one microprobe, the microprobe being covered by a conductive layer; exposing the microprobe to a solution having carbon nanotubes spreading therein, the solution being furnished with an electrode; applying a predetermined voltage between the conductive layer and the electrode, making at least one carbon nanotube to move and attach onto the top of the microprobe.

1 . A method for assembling carbon nanotubes and microprobes, comprising following steps: 
 forming at least one microprobe on an substrate, the microprobe being covered by a conductive layer;    exposing an tip of the microprobe to a solution having carbon nanotubes spreading therein, the solution being furnished with an electrode; and    applying a predetermined voltage between the conductive layer and the electrode, making at least one carbon nanotube to move and attach onto the tip of the microprobe    
     
     
         2 . The method for assembling carbon nanotubes and microprobe of  claim 1 , wherein the surface area of the electrode exposed to the solution is larger than that of the tip of the microprobe.  
     
     
         3 . The method for assembling carbon nanotubes and microprobe of  claim 1  further comprising a step of: providing ultrasonic oscillation to the solution for preventing the carbon nanotubes from gathering together.  
     
     
         4 . The method for assembling carbon nanotubes and microprobe of  claim 1 , further comprising a step of: covering a non-conductive material on the conductive layer and exposing only the potion of the conductive layer covering the tip of the microprobe.  
     
     
         5 . The method for assembling carbon nanotubes and microprobe of  claim 1 , wherein the substrate is made of silicon.  
     
     
         6 . The method for assembling carbon nanotubes and microprobe of  claim 5 , wherein the microprobe is formed on the substrate using semiconductor processing.  
     
     
         7 . The method for assembling carbon nanotubes and microprobe of  claim 6 , wherein the step of forming a microprobe on a substrate comprises following steps: 
 forming a silicon nitride layer and a mask layer successively on the substrate, the mask layer having a plurality of openings disposed at predetermined positions thereof to expose the portion of the silicon nitride layer defined by the plural openings;    etching away the portion of the silicon nitride layer defined by the plural openings, and removing the mask layer;    applying anisotropic etching on the silicon nitride to form at least one silicon nitride microprobe on the substrate;    forming a conductive layer on the substrate covering at least the tip of the microprobe; and    forming a non-conductive layer covering a predetermined area of the conductive except for the portion of the conductive layer covering the tip of the microprobe.    
     
     
         8 . The method for assembling carbon nanotubes and microprobe of  claim 7 , wherein the non-conductive layer is a photoresist.  
     
     
         9 . The method for assembling carbon nanotubes and microprobe of  claim 1 , wherein the solution includes an anionic surfactant capable of attaching a layer of negative charges onto the surface of the carbon nanotubes, and the conductive layer is connected to the positive of a predefined power supply.  
     
     
         10 . The method for assembling carbon nanotubes and microprobe as claimed in  claim 1 , wherein the solution is isopropyl alcohol.  
     
     
         11 . A structure assembling carbon nanotubes and microprobes, comprising: 
 a substrate having at least a microprobe formed thereon;    a conductive layer covering at least a tip of the microprobe; and    at least one carbon nanotube attaching on the tip of the microprobe and parallel to the extending direction of the microprobe.    
     
     
         12 . The structure assembling carbon nanotubes and microprobes of  claim 11 , wherein the substrate is made of silicon.  
     
     
         13 . The structure assembling carbon nanotubes and microprobes of  claim 11 , wherein the microprobe is made of silicon nitrite.  
     
     
         14 . The structure assembling carbon nanotubes and microprobes of  claim 11 , wherein a non-conductive material covers a predetermined area of the conductive layer except for the portion of the conductive layer covering the tip of the microprobe.  
     
     
         15 . The structure assembling carbon nanotubes and microprobes of  claim 14 , wherein the non-conductive material is a photoresist.  
     
     
         16 . The structure assembling carbon nanotubes and microprobes of  claim 11 , wherein the carbon nanotube is attached on the tip of the microprobe by Van der Waal's force.  
     
     
         17 . An apparatus for assembling carbon nanotubes and microprobes, comprising: 
 a solution, containing a plurality of carbon nanotubes dispersed and suspended therein;    an electrode, disposed in the solution;    at least one microprobe, disposed in the solution and at least the tip of the microprobe being covered by a conductive layer; and    a direct current power source, connecting the conductive layer and the electrode, capable of applying a predetermined voltage to drive the carbon nanotubes suspended in the solution to move toward the conductive layer covering the tip of the microprobe and attach onto the same.    
     
     
         18 . The apparatus for assembling carbon nanotubes and microprobes of  claim 17 , wherein the microprobe is formed on a substrate, and the conductive layer covers the surface of the substrate and the microprobe, and a non-conductive layer further covers the conductive layer except for the portion of the conductive layer covering the tip of the microprobe.  
     
     
         19 . The apparatus for assembling carbon nanotubes and microprobes of  claim 17  further comprising an ultrasonic device for providing ultrasonic oscillation to the solution so as to prevent the carbon nanotubes from gathering together.  
     
     
         20 . The apparatus for assembling carbon nanotubes and microprobes of  claim 17 , wherein the solution includes an anionic surfactant capable of attaching a layer of negative charges onto the surface of the carbon nanotubes, and the conductive layer is connected to the positive of a predefined power supply.  
     
     
         21 . The apparatus for assembling carbon nanotubes and microprobes of  claim 17 , wherein the solution is isopropyl alcohol.