Ultrasonic-wave washing unit, ultrasonic-wave washing apparatus, ultrasonic-wave washing method, method of manufacturing a semiconductor device, and method of manufacturing a liquid crystal display

Abstract

An ultrasonic-wave washing unit comprising an ultrasonic-wave vibrating plate to which an ultrasonic-wave vibrator is fixed by adhesive bonding, an ultrasonic-wave transmission plate opposed to the vibrating plate, a liquid supply means which supplies a liquid to a space defined between the vibrating plate and the transmission plate, and a liquid discharge means for discharging the liquid from the space.

1 - 6 . (canceled)  
     
     
         7 . An ultrasonic-wave washing method comprising: 
 moving an ultrasonic-wave washing unit relatively to a to-be-washed surface of a to-be-washed object held by means of a retaining means, the washing unit having a diffusion means, which has one surface to which an ultrasonic-wave vibrator is fixed and the other surface opposed to the to-be-washed object and diffuses ultrasonic vibration from the ultrasonic-wave vibrator, and a cooling means which cools the diffusion means, thereby bringing the other surface of the diffusion means to a given distance from the to-be-washed surface;    a step of supplying a detergent to the to-be-washed surface, thereby filling the gap between the to-be-washed surface and the other surface of the diffusion means with the detergent; and    a step of driving the ultrasonic-wave vibrator to diffuse and propagate the ultrasonic vibration propagated through the diffusion means to the to-be-washed surface, thereby washing the to-be-washed surface.    
     
     
         8 . An ultrasonic-wave washing method according to  claim 7 , wherein the ultrasonic-wave vibrator is driven so as not to resonate the to-be-washed object.  
     
     
         9 . An ultrasonic-wave washing method according to  claim 7 , wherein the ultrasonic-wave vibrator is repeatedly driven in an on-off manner with every given interval.  
     
     
         10 . An ultrasonic-wave washing method according to  claim 7 , wherein the ultrasonic-wave vibrator is driven so as continuously to generate a plurality of types of ultrasonic waves with different phases or amplitudes in a manner such that the ultrasonic waves are changed by stages.  
     
     
         11 . An ultrasonic-wave washing method according to  claim 7 , wherein the ultrasonic-wave vibrator is driven so as continuously to generate a plurality of types of ultrasonic waves with wavelengths different from an integral multiple or submultiple of an original wavelength in a manner such that the ultrasonic waves are changed by stages.  
     
     
         12 - 15 . (canceled)  
     
     
         16 . An ultrasonic-wave washing method comprising: 
 a positioning step of moving an ultrasonic-wave washing unit relatively to a to-be-washed surface of a to-be-washed object, the washing unit having a diffusion means which has one surface to which an ultrasonic-wave vibrator is fixed and the other surface opposed to the to-be-washed object and diffuses ultrasonic vibration from the ultrasonic-wave vibrator, thereby bringing the other surface of the diffusion means to a given distance from the to-be-washed surface;    a detergent supply step of supplying a detergent to the to-be-washed surface, thereby filling the gap between the to-be-washed surface and the other surface of the diffusion means with the detergent;    a washing step of driving the ultrasonic-wave vibrator to diffuse and propagate the ultrasonic vibration propagated through the diffusion means to the to-be-washed surface, thereby washing the to-be-washed surface; and    a measuring step of measuring a relative distance between the other surface of the diffusion means and the to-be-washed surface,    the positioning step having a control step of maintaining a given distance between the diffusion means and the to-be-washed surface in accordance with the relative distance measured in the measuring step.