Spiral terminal and method of manufacturing the same

Abstract

Provided is a minute spiral terminal for attaining electrical continuity with an electrode of electronic equipment or inspection equipment. The spiral terminal includes a columnar spiral spring and a protrusion protruding outward at the center of the spiral of the spiral spring. The protrusion has a contact surface to be in contact with the electrode, and the shape of the contact surface is a part of a spherical surface or a part of paraboloid of revolution.

1 . A minute spiral terminal for attaining electrical continuity with an electrode of electronic equipment or inspection equipment, 
 the spiral terminal comprising a columnar spiral spring and a protrusion protruding outward at the center of the spiral of the spiral spring,    the protrusion having a contact surface to be in contact with the electrode,    the shape of the contact surface being a part of a spherical surface or a part of paraboloid of revolution.    
   
   
       2 . A spiral terminal according to  claim 1 , wherein the outer peripheral part of the columnar spiral spring has a hollow ring structure.  
   
   
       3 . A spiral terminal according to  claim 1 , wherein the spiral terminal is made of nickel or nickel alloy.  
   
   
       4 . A spiral terminal according to  claim 1 , wherein the spiral terminal further comprises a coating layer consisting of a precious metal or alloy of a precious metal.  
   
   
       5 . A method of manufacturing a spiral terminal set forth in  claim 1 , wherein the method comprises the steps of: 
 forming a resist structure by X-ray lithography;    forming a layer consisting of metallic material in the resist structure by means of electroforming so as to form a columnar spiral spring;    forming a resist structure on the spiral spring by lithography; and    forming a layer consisting of metallic material in the resist structure by electroforming in order to form a protrusion protruding outward.    
   
   
       6 . A method of manufacturing a spiral terminal set forth in  claim 1 , wherein the method comprises the steps of 
 forming a resist structure by a metal mold;    forming a layer consisting of metallic material in the resist structure by means of electroforming so as to form a columnar spiral spring;    forming a resist structure on the spiral spring by lithography; and    forming a layer consisting of metallic material in the resist structure by electroforming in order to form a protrusion protruding outward.    
   
   
       7 . A socket equipped with the spiral terminals defined in  claim 1 , wherein the socket is used for the inspection of semiconductors of land grid array arrangement.  
   
   
       8 . Inspection equipment having a socket defined in  claim 7 .  
   
   
       9 . A method of inspecting a semiconductor, the method using a socket defined in  claim 7 .  
   
   
       10 . A connector having spiral terminals defined in  claim 1 , wherein the connector is connected with a land electrode.  
   
   
       11 . Electronic equipment having a connector set forth in  claim 10.