Strip loaded waveguide integrated with electronics components

Abstract

A strip loaded waveguide comprises a slab and a strip, wherein the strip is separated from the slab. Nevertheless, a guiding region is provided for propagating an optical mode and this guiding region extends both within the strip and the slab. A layer of material having an index of refraction lower than that of the strip and the slab may be disposed between and separate the strip and the slab. In one embodiment, the slab comprises a crystalline silicon, the strip comprises polysilicon or crystalline silicon, and the layer of material therebetween comprises silicon dioxide. Such waveguides may be formed on the same substrate with transistors. These waveguides may also be electrically biased to alter the index of refraction and/or absorption of the waveguide.

1 . An integrated optical/electronic apparatus comprising: 
 a strip loaded waveguide comprising: 
 a slab portion having a first refractive index (n 1 ),  
 a strip portion having a second refractive index (n 2 ), and  
 a transition layer between the slab portion and the strip portion;  
   a transistor comprising first and second portions and a dielectric layer therebetween, said second portion comprising semiconductor, the dielectric layer of the transistor and the transition layer of the waveguide being of the same material; and    a substrate which supports both the transistor and the waveguide.