Cascaded inert gas purging system

Abstract

The present invention is a system for protecting, for example, electronic, mechanical, or other components from contamination in a processing environment and includes a distribution manifold, a pressurized fluid in fluid communication with the manifold, and a plurality of apparatuses, such as sensors, which are connected to the manifold by respective conduits throughwhich the pressurized fluid flows to maintain a positive pressure at each of the apparatuses to prevent the processing environment from contacting the plurality of apparatus.

1 - 11 . (canceled)  
   
   
       12 . A method for protecting a data component from contamination in a processing environment, comprising: 
 enclosing the data component in an enclosure;    supplying pressurized fluid to said enclosure;    maintaining a positive pressure of said pressurized fluid; and    venting said pressurized fluid as necessary to maintain the positive pressure selected to exceed a pressure at the processing environment, thereby preventing the data component from being exposed to the processing environment.    
   
   
       13 . The method according to  claim 12 , wherein said pressurized fluid is a gas selected from the group consisting of nitrogen, compressed air, superdried compressed air, instrumentation air, and mixtures thereof.  
   
   
       14 . The method according to  claim 12 , further comprising sensing a pressure existing within said enclosure.  
   
   
       15 . The method according to  claim 12 , further comprising maintaining a constant positive pressure in said enclosure.  
   
   
       16 . The method according to  claim 12 , further comprising filtering the pressurized fluid of contaminates.  
   
   
       17 - 18 . (canceled)  
   
   
       19 . A method for protecting a data component from an external environment, comprising: 
 providing a fluid with a first pressure at the data component;    enclosing the fluid at the data component;    maintaining the first pressure of the fluid at the data component for providing a fluid wall at the data component;    separating the data component from the external environment with the fluid wall; and    venting the first pressure of the fluid to maintain the fluid wall at a select pressures thereby preventing the data component from being exposed to the external environment.