Thermal processing system with cross flow injection system with rotatable injectors

Abstract

An apparatus is provided for thermally processing substrates held in a carrier. The apparatus includes an injection system which provides for selectable injection of gases to the process chamber. The injection system comprises one or more elongated injection tubes having a plurality of injection ports or orifices distributed in the tubes for directing flow of reactant and other gases across the surface of each substrate. The elongated injection tubes are rotatable about an axis in 360 degrees.

1 . A thermal process apparatus suitable for processing a plurality of substrates supported in a carrier, the apparatus comprising a cross-flow injection system for directing flow of reactant and other gases across the surface of each substrate, said cross-flow injection system comprising one or more elongated tubes each of which is rotatable about an axis and provided with a plurality of injection ports.  
   
   
       2 . The apparatus of  claim 1  wherein said plurality of injection ports are formed in a line and longitudinally distributed in the one or more elongated tubes.  
   
   
       3 . The apparatus of  claim 1  wherein said one or more elongated tubes are rotatable about an axis in 360 degrees.  
   
   
       4 . The apparatus of  claim 1  further comprising a cross-flow liner enclosing the carrier, wherein said cross-flow injection system is disposed between the liner and the carrier and rotatable in 360 degrees.  
   
   
       5 . The apparatus of  claim 4  wherein the one or more elongated tubes are rotated to orient the plurality of injection ports to face the liner such that gases exiting the injection ports impinge the liner prior to crossing the surface of each substrate.  
   
   
       6 . The apparatus of  claim 4  wherein the one or more elongated tubes are rotated to orient the plurality of injection ports to face each other such that gases exiting the injection ports impinge each other prior to crossing the substrate.  
   
   
       7 . The apparatus of  claim 4  wherein the one or more elongated tubes are rotated to orient the plurality of injection ports to face the center of each substrate.  
   
   
       8 . The apparatus of  claim 4  wherein the cross-flow liner comprises a cylinder having a close end and an open end, said cylinder is provided with a longitudinal bulging section, and said cross-flow injection system is accommodated in the bulging section.  
   
   
       9 . The apparatus of  claim 8  wherein said cross-flow injection system comprises one or more elongated tubes accommodated in the bulging section.  
   
   
       10 . The apparatus of  claim 9  wherein the open end is provided with two openings for receiving the elongated tubes.  
   
   
       11 . The apparatus of  claim 10  wherein the openings are provided with notches for orienting the injection ports to a predetermined direction.  
   
   
       12 . An apparatus for thermally processing a plurality of substrates held in a carrier, the apparatus comprising: 
 a process chamber providing a process region for the substrates;    a cross-flow liner enclosing the substrates held in the carrier; and    a cross-flow injection system disposed between the carrier and the cross-flow liner to direct flow of one or more gases across the surface of each substrate, said cross-flow injection system comprising one or more elongated tubes each of which is rotatable about an axis and provided with a plurality of injection ports.    
   
   
       13 . The apparatus of  claim 12  wherein said process chamber is sized to process 1 to 100 substrate.  
   
   
       14 . The apparatus of  claim 12  wherein said cross-flow injection system comprises a first and a second elongated injection tube each of which is provided with a plurality of injection ports formed in a line and longitudinally distributed in the tube, wherein each elongated injection tube is rotatable about an axis in 360 degrees.  
   
   
       15 . The apparatus of  claim 14  wherein said cross-flow liner comprises a cylinder having a close end and an open end, said cylinder is provided with a longitudinal bulging section to accommodate said first and second elongated injection tubes.  
   
   
       16 . The apparatus of  claim 15  wherein said close end is provided with openings to receive the first and second elongated injection tubes.  
   
   
       17 . The apparatus of  claim 16  wherein said openings are provided with notches and each injection tube is provided with an index pin to be locked in a notch so that the injection ports in the first and second elongated injection tubes are oriented to a predetermined direction.  
   
   
       18 . The apparatus of  claim 12  wherein the cross-flow liner is patterned and sized so that the liner is conformal to the carrier and has an inner diameter that is about 104 to 110 percent of a diameter of the substrates.  
   
   
       19 . The apparatus of  claim 18  wherein the cross-flow liner is provided with a plurality of slots cooperating with the plurality of the injection ports for exhausting gases.