US2005118529A1PendingUtilityA1

Photoimageable composition

40
Assignee: SANDIA NAT LABPriority: Apr 17, 2002Filed: Dec 6, 2004Published: Jun 2, 2005
Est. expiryApr 17, 2022(expired)· nominal 20-yr term from priority
Inventors:Paul DentingerKaren KrafcikKelby Simison
G03F 7/40G03F 7/0046G03F 7/0045Y10S430/126Y10S430/115C07C 381/12G03F 7/038
40
PatentIndex Score
0
Cited by
0
References
0
Claims

Abstract

The use of photoacid generators including an alkoxyphenylphenyliodonium salt and/or bis(t-butylphenyl)iodonium salt in a photoimageable composition helps improve resolution. Suitable photoimageable compositions includes: (a) a multifunctional polymeric epoxy resin that is dissolved in an organic solvent wherein the epoxy resin comprises oligomers of bisphenyl A that is quantitatively protected by glycidyl ether and wherein the oligomers have an average functionality that ranges from about 3 to 12; and a photoacid generator comprising an alkoxyphenylphenyliodonium salt and/or bis(t-butylphenyl)iodonium salt. Preferred alkoxyphenylphenyliodonium salts include 4-octyloxyphenyl phenyliodonium hexafluoroantimonate and 4-methoxyphenyl phenyliodonium hexafluoroantimonate. The photoimageable composition is particularly suited for producing high aspect ration microstructure.

Claims

exact text as granted — not AI-modified
1 . A photoimageable composition comprising: 
 (a) a multifunctional polymeric epoxy resin that is dissolved in an organic solvent wherein the epoxy resin comprises oligomers of bisphenyl A that are quantitatively protected by glycidyl ether and wherein the oligomers have an average functionality that ranges from about 3 to 12; and    (b) a photoactive compound comprising an alkoxyphenylphenyliodonium salt, a bis(t-butylphenyl) iodonium salt, or both.    
     
     
         2 . The photoimageable composition of  claim 1  wherein the photoactive compound is an alkoxyphenylphenyliodonium salt.  
     
     
         3 . The photoimageable composition of  claim 1  wherein the photoactive compound is selected from the group consisting of 4-octyloxyphenyl phenyliodonium hexafluoroantimonate (OPI HFA), 4-methoxyphenyl phenyliodonium hexafluoroantimonate (MPI HFA), methide salts thereof, and mixtures thereof.  
     
     
         4 . The photoimageable composition of  claim 1  wherein the photoactive compound is OPI HFA.  
     
     
         5 . The photoimageable composition of  claim 1  wherein the photoactive compound is MPI HFA.  
     
     
         6 . The photoimageable composition of  claim 1  wherein the photoactive compound is bis(t-butylphenyl)iodonium hexafluoroantimonate or methide salts thereof.  
     
     
         7 . The photoimageable composition of  claim 1  wherein the multifunctional polymeric epoxy resin comprises a bisphenhol A novolac glycidyl ether.  
     
     
         8 . The photoimageable composition of  claim 1  wherein the amount photoactive compound present is about 1 to 12 parts by weight based on 100 parts by weight of the resin.  
     
     
         9 . The photoimageable composition of  claim 1  wherein the oligomers have an average functionality of about 8.  
     
     
         10 . The photoimageable composition of  claim 2  wherein the multifunctional polymeric epoxy resin comprises a bisphenyl A novolac glycidyl ether.  
     
     
         11 . The photoimageable composition of  claim 3  wherein the multifunctional polymeric epoxy resin comprises a bisphenyl A novolac glycidyl ether.  
     
     
         12 . The photoimageable composition of  claim 4  wherein the multifunctional polymeric epoxy resin comprises a bisphenyl A novolac glycidyl ether.  
     
     
         13 . The photoimageable composition of  claim 5  wherein the multifunctional polymeric epoxy resin comprises a bisphenyl A novolac glycidyl ether.  
     
     
         14 . The photoimageable composition of  claim 6  wherein the multifunctional polymeric epoxy resin comprises a bisphenyl A novolac glycidyl ether.  
     
     
         15 . The photoimageable composition of  claim 2  wherein the amount photoactive compound present is about 1 to 12 parts by weight based on 100 parts by weight of the resin.  
     
     
         16 . The photoimageable composition of  claim 3  wherein the amount photoactive compound present is about 1 to 12 parts by weight based on 100 parts by weight of the resin.  
     
     
         17 . The photoimageable composition of  claim 4  wherein the amount photoactive compound present is about 1 to 12 parts by weight based on 100 parts by weight of the resin.  
     
     
         18 . The photoimageable composition of  claim 5  wherein the amount photoactive compound present is about 1 to 12 parts by weight based on 100 parts by weight of the resin.  
     
     
         19 . The photoimageable composition of  claim 6  wherein the amount photoactive compound present is about 1 to 12 parts by weight based on 100 parts by weight of the resin.  
     
     
         20 . The photoimageable composition of  claim 7  wherein the amount photoactive compound present is about 1 to 12 parts by weight based on 100 parts by weight of the resin.  
     
     
         21 . The photoimageable composition of  claim 2  wherein the oligomers have an average functionality of about 8.  
     
     
         22 . The photoimageable composition of  claim 3  wherein the oligomers have an average functionality of about 8.  
     
     
         23 . The photoimageable composition of  claim 4  wherein the oligomers have an average functionality of about 8.  
     
     
         24 . The photoimageable composition of  claim 5  wherein the oligomers have an average functionality of about 8.  
     
     
         25 . The photoimageable composition of  claim 6  wherein the oligomers have an average functionality of about 8.  
     
     
         26 . The photoimageable composition of  claim 7  wherein the oligomers have an average functionality of about 8.  
     
     
         27 . The photoimageable composition of  claim 8  wherein the oligomers have an average functionality of about 8.

Join the waitlist — get patent alerts

Track US2005118529A1 — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.