Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these

Abstract

A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.

1 . (canceled)  
     
     
         2 . A cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.  
     
     
         3 . A cleaning sheet which comprises a base material and a porous layer formed as a cleaning layer on one side of the base material.  
     
     
         4 . A cleaning sheet which comprises a base material, a porous layer formed as a cleaning layer on one side of the base material, and an adhesive layer formed on the other side of the base material.  
     
     
         5 . The cleaning sheet according to any one of  claims 2  to  4 , wherein the porous layer has substantially no tackiness.  
     
     
         6 . The cleaning sheet according to any one of  claims 2  to  4 , wherein the porous layer is a porous film comprising ultrahigh-molecular weight polyethylene.  
     
     
         7 . A transfer member having a cleaning function, which comprises a transfer member and the cleaning sheet according to  claim 2  or  4 , provided thereto through the adhesive layer.  
     
     
         8 . A transfer member having a cleaning function, according to  claim 7 , wherein the cleaning sheet has a smaller shape that the transfer member and does not protrude from the edges of the transfer member.  
     
     
         9 . The transfer member having a cleaning function according to  claim 8 , wherein the porous layer has substantially no tackiness.  
     
     
         10 . The transfer member having a cleaning function according to  claim 8 , wherein the porous layer is a porous film comprising ultrahigh-molecular weight polyethylene.  
     
     
         11 . The transfer member having a cleaning function according to  claim 8 , wherein the porous layer contains a heat-resistant polymeric resin.  
     
     
         12 . A transfer member having a cleaning function, which comprises a transfer member and the cleaning sheet according to  claim 2  provided thereto through the adhesive layer.  
     
     
         13  The transfer member having a cleaning function according to  claim 12 , wherein the cleaning sheet has a smaller shape than the transfer member and does not protrude from the edges of the transfer member.  
     
     
         14 . A method of cleaning a substrate-processing apparatus, which comprises conveying the cleaning sheet according to  claim 1  into contact with a part to be cleaned.  
     
     
         15 . A substrate-processing apparatus, cleaned by the method according to  claim 14.