Vacuum lamination device and vacuum lamination method

Abstract

A vacuum lamination device for laminating a lamination member includes a base plate having an uneven surface contacting the lamination member for placing the lamination member, a frame member fixed to the base plate and having a discharge port for evacuating a processing space, and a cover member for hermetically sealing the processing space in the lamination process. In a vacuum lamination method, the lamination member is placed on the uneven surface, and the cover member is placed so as to cover the lamination member. Then, a gaseous material in the processing space is evacuated through the discharge port while heating the processing space.

1 . A vacuum lamination device for laminating a lamination member, comprising: 
 a base plate for placing the lamination member having a first uneven portion on a surface thereof contacting the lamination member,    a frame member fixed to the base plate and having a discharge port, and    a cover member disposed above the base plate and the frame member for forming a processing space together therewith and hermetically sealing the processing space, a gaseous material in the processing space being evacuated through the discharge port in a lamination process.    
     
     
         2 . A vacuum lamination device according to  claim 1 , wherein said first uneven portion has an outer periphery located outside an outer periphery of the lamination member.  
     
     
         3 . A vacuum lamination device according to  claim 1 , wherein said first uneven portion has projections and dents, said projections having a height substantially equal to that of the discharge port.  
     
     
         4 . A vacuum lamination device according to  claim 1 , wherein said cover member is formed of a material to push the lamination member against the base plate during the lamination process.  
     
     
         5 . A vacuum lamination device according to  claim 1 , wherein said base plate further includes a second uneven portion on a surface opposite to the surface contacting the lamination member.  
     
     
         6 . A vacuum lamination method comprising: 
 placing a lamination member on an uneven portion of a base plate having a frame member with a discharge port,    placing a cover member on the base plate and the frame member to form a processing space surrounded by the base plate, the frame member and the cover member with the lamination member therein, and    evacuating the processing space through the discharge port while heating the processing space.    
     
     
         7 . A vacuum lamination method according to  claim 6 , wherein the cover member pushes the lamination member against the base plate in evacuating the processing space.  
     
     
         8 . A vacuum lamination method according to  claim 6 , wherein the lamination member is a solar cell module and is placed on the base plate such that a light reception surface of the solar cell module contacts the uneven portion.