Prognostic health monitoring of fluidic systems using MEMS technology

Abstract

The present invention is directed to a filter module that may incorporate sensors to measure various characteristics of fluid flow and filtration. The sensors may be MEMS and may measure the temperature, flow rate, pressure, etc. of the fluid. One or more MEMS sensors may be included in a sensor package which, in turn, may be included in a sensor component. The latter, which may also include a processor, conductor pins, etc. for data communication, may be coupled to a sensor port in such a way as to allow contact between the sensor(s) and the fluid. Sensor measurements may be used to determine the occurrence of harmful events, such as cavitation or particle breakthrough, or to predict the remaining service life of a filter element.

1 . A filter module for filtering a fluid, said filter module comprising: 
 a filter element, said filter element having an inlet side, an outlet side, and a membrane separating said inlet side from said outlet side;    an end cap coupled to an end of said filter element; and    a sensor component coupled to said end cap, said sensor component having a micro-electro-mechanical systems (MEMS) sensor package,    wherein said MEMS sensor package includes a MEMS sensor and is configured to measure at least one of a fluid flow characteristic and a filtration characteristic and to communicate measurement data to at least one of a processor and a data processing device.    
   
   
       2 . The filter module of  claim 1 , wherein said measurement data is communicated wirelessly.  
   
   
       3 . The filter module of  claim 1 , wherein said measurement data is communicated in real time.  
   
   
       4 . The filter module of  claim 1 , wherein said processor is an internal processor disposed within said sensor component.  
   
   
       5 . The filter module of  claim 4 , wherein said sensor is configured to take a measurement upon receiving a signal from said internal processor.  
   
   
       6 . The filter module of  claim 1 , wherein said data processing device is external to the sensor component.  
   
   
       7 . The filter module of  claim 6 , wherein said measurement data is communicated to the data processing device wirelessly.  
   
   
       8 . The filter module of  claim 6 , wherein said measurement data is communicated to the data processing device in real time.  
   
   
       9 . The filter module of  claim 6 , wherein said processor is internal to the sensor component, and said measurement data is communicated from the MEMS sensor package to the internal processor, and from the internal processor to the data processing device.  
   
   
       10 . The filter module of  claim 9 , wherein data is communicated from the internal processor to the data processing device wirelessly.  
   
   
       11 . The filter module of  claim 9 , wherein data is communicated from the internal processor to the data processing device in real time.  
   
   
       12 . The filter module of  claim 1 , wherein said MEMS sensor package is configured to measure differential pressure.  
   
   
       13 . The filter module of  claim 1 , wherein said MEMS sensor package includes at least one member selected from the group consisting of a temperature sensor, a pressure sensor, a flow rate sensor, a differential pressure sensor, and a pH level sensor.  
   
   
       14 . The filter module of  claim 1 , wherein said sensor component is removably coupled to the filter end cap.  
   
   
       15 . The filter module of  claim 1 , wherein said MEMS sensor package includes redundant sensors.  
   
   
       16 . The filter module of  claim 1 , wherein said MEMS sensor package has a first surface that is in communication with a first location within the fluid flow and a second surface that is in communication with a second location within the fluid flow.  
   
   
       17 . The filter module of  claim 16 , wherein said first surface is in communication with the fluid outside said filter element and said second surface is in communication with the fluid inside said filter element.  
   
   
       18 . The filter module of  claim 16 , wherein the MEMS sensor package includes a first sensor on its first surface and a second sensor on its second surface.  
   
   
       19 . The filter module of  claim 18 , wherein said first and second sensors are pressure sensors.  
   
   
       20 . The filter module of  claim 19 , wherein said at least one of a processor and a data processing device is configured to calculate a differential pressure across said filter element membrane based on measurements from said first and second pressure sensors.