Adjustable gas distribution system

Abstract

The present invention provides a gas distribution apparatus comprising a plurality of outlets and at least one replaceable insert placed in at least one of the outlets. The insert is provided with a passageway adapted to alter the size of the at least one of the outlets and/or the direction of gases exiting the at least one of the outlets. The insert is provided with passageway that may be substantial straight and cylindrical. The passageway may have a first portion with a smaller diameter and a second portion with a larger diameter to selectively alter the size of the outlet passage in the gas distribution apparatus. Alternatively, the insert is provided with a main passageway and plurality of secondary passageways branched and angled from the main passageway. The angle between the main and branch passageways is in the range from about 10 to about 90 degrees. In one embodiment, the angle between the main and branch passageways is about 90 degrees.

1 . A gas distribution apparatus, comprising: 
 a body having a surface facing a processing region,    a plurality of outlet passages formed within the body and extending through the surface for providing gases into the processing region; and    at least one replaceable insert placed in at least one of the outlet passages, said insert is provided with a passageway adapted to alter the size of the at least one of the outlet passages and/or the direction of gases exiting the at least one of the outlet passages into the processing region.    
     
     
         2 . The apparatus of  claim 1  wherein said insert passageway is substantially cylindrical.  
     
     
         3 . The apparatus of  claim 1  wherein the insert passageway comprises a first portion having a smaller diameter and a second portion having a greater diameter.  
     
     
         4 . The apparatus of  claim 1  wherein said insert passageway is coaxial with the passage of the outlet placed with the insert.  
     
     
         5 . The apparatus of  claim 1  wherein the insert passageway comprises a first portion coaxial with the passage of the outlet placed with the insert and a plurality of second portions branched and angled from the first portion for directing the gases into the processing region.  
     
     
         6 . The apparatus of  claim 5  wherein said second portions of the insert passageway are angled from the first portion in the range from about 10 to about 90 degrees.  
     
     
         7 . The apparatus of  claim 5  wherein said second portions of the insert passageway are perpendicular to the first portion.  
     
     
         8 . The apparatus of  claim 5  wherein said second portions of the insert passageway are in parallel to the surface of the unitary body.  
     
     
         9 . The apparatus of  claim 1  wherein said outlet passages are substantially cylindrical.  
     
     
         10 . The apparatus of  claim 9  wherein said outlet passages comprises a first portion having a smaller diameter and a second portion having a greater diameter.  
     
     
         11 . The apparatus of  claim 1  wherein the insert is placed in the outlet passage by press fit.  
     
     
         12 . The apparatus of  claim 1  wherein the outlet passage and insert are provided with threads and the insert is placed in the outlet passage by threading.  
     
     
         13 . The apparatus of  claim 12 , wherein the insert comprises means for engaging installment tools.  
     
     
         14 . A gas distribution apparatus, comprising a plurality of outlets and at least one replaceable insert placed in at least one of the outlets, said insert is provided with a passageway adapted to alter the size of and/or the direction of gases exiting the at least one of the outlets.  
     
     
         15 . The apparatus of  claim 14  wherein the insert passageway is substantially cylindrical.  
     
     
         16 . The apparatus of  claim 14  wherein the insert passageway is coaxial with the outlet placed with the insert.  
     
     
         17 . The apparatus of  claim 15  wherein the insert passageway comprises a first portion having a smaller diameter and a second portion having a greater diameter.  
     
     
         18 . The apparatus of  claim 14  wherein the insert passageway comprises a first portion coaxial with the outlet placed with the insert and a plurality of second portions branched and angled from the first portion.  
     
     
         19 . The apparatus of  claim 18  wherein said second portions of the insert passageway are angled from the first portion in the range from about 10 to about 90 degree.  
     
     
         20 . The apparatus of  claim 18  wherein said second portions of the insert passageway are perpendicular to the first portion.  
     
     
         21 . The apparatus of  claim 14  wherein the insert is placed in the outlet by press fit.  
     
     
         22 . The apparatus of  claim 14  wherein the outlet and insert are provided with threads and the insert is placed in the outlet by screwing.  
     
     
         23 . The apparatus of  claim 22 , wherein the insert is provided with means for engaging installation tools.