Hermetically sealed container for large-sized precision sheet (semi-) product

Abstract

A relatively light and generally resinous hermetically sealed container is provided for accommodating, supporting and transporting a precision sheet (semi-)product, such as a photomask, safely and in an airtight manner without exerting an inappropriate stress thereto, which precision sheet (semi-)product has such a large planar size that encounters an extreme difficulty in integral resin molding of a half of a container therefor. The container includes a main body and a lid member which are generally symmetrical with each other and respectively have sealing peripheries to be abutted to each other. Each of the main body and the lid member includes a plurality of resin-sheets which are disposed in a plane, abutted to each other at an intermediate joint boundary therebetween and joined with each other at the joint boundary. A reinforcing metal belt member is disposed from outside along the joint boundary and hermetically bolted to the resin sheets.

1 . A hermetically sealed container for a large-sized precision sheet (semi-)product, comprising a main body and a lid member which are generally symmetrical with each other and respectively have sealing peripheries to be abutted to each other, wherein each of the main body and the lid member comprises a plurality of resin sheets which are disposed in a plane, abutted to each other at an intermediate joint boundary therebetween and joined with each other at the joint boundary, and a reinforcing metal belt member is disposed from outside along the joint boundary and hermetically bolted to the resin sheets.  
   
   
       2 . A container according to  claim 1 , wherein each of the plurality of resin sheets comprises an antistatic resin.  
   
   
       3 . A container according to  claim 1 , wherein the main body and the lid member are provided with a pair of holding members for holding the precision sheet (semi-)product.  
   
   
       4 . A container according to  claim 3 , wherein each sealing periphery of the main body and the lid member comprises a side wall and a support member for supporting thereon the holding member for holding the precision sheet (semi-)product, which side wall and support member are composed of a set of resin sheets bonded to the plurality of resin sheets.  
   
   
       5 . A container according to  claim 3 , wherein one of said pair of holding members disposed on the main body and the lid member, respectively, comprises a tapered portion and an abutting side wall having a height smaller than a thickness of the precision sheet (semi-)product, and the other of said pair of holding members has a tapered portion longer than the tapered portion of said one holding member.  
   
   
       6 . A container according to  claim 1 , wherein the main body is provided at its bottom with a securing and supporting structure for securing and supporting the precision sheet (semi-)product in mutually perpendicular X, Y and Z directions (that is, longitudinal, transverse and thickness directions of the precision sheet (semi-)product).  
   
   
       7 . A container according to  claim 6 , wherein said securing and supporting structure comprises at least one pair of a support for supporting the precision sheet (semi-)product placed thereon and a securing holder for applying a pressing force to an edge portion of the precision sheet (semi-)product placed on the support in at least the thickness direction of the precision sheet (semi-)product.  
   
   
       8 . A container according to  claim 7 , wherein the precision sheet (semi-)product and the main body both have a shape of rectangle, along at least one side of which the pair of the support and the securing holder is disposed.  
   
   
       9 . A container according to  claim 7 , wherein said at least one pair of the support and the securing holder includes at least one securing holder capable of applying to the edge portion of the precision sheet (semi-)product a pressing force acting onto a side end of the precision sheet (semi-)product in addition to the pressing force in the thickens direction of the precision sheet (semi-)product.  
   
   
       10 . A container according to  claim 9 , including a securing holder capable of applying to the edge of the precision sheet (semi-)product a pressing force acting onto the side end of the precision sheet (semi-)product in addition to the pressing force in the thickness direction of the precision sheet (semi-)product and disposed along one side of the rectangle, and also a guide support disposed at a position close to a side opposite to said one side so as to support the precision sheet (semi-)product in a manner of receiving the pressing force applied to the side end of the precision sheet (semi-)product.  
   
   
       11 . A container according to  claim 7 , wherein each of said at least one securing holder comprises a leg fixed to a bottom of the main body and a movable part pivotably supported by the leg so as to allow a pivotal movement of the movable part between an upright position for fixedly holding the precision sheet (semi-)product placed on the support by applying a pressing force to the edge portion of the precision sheet (semi-)product in at least the thickness direction and a tumbled and open position for allowing the placement of the precision sheet (semi-)product on the support.  
   
   
       12 . A container according to  claim 1 , wherein an O-ring for hermetic sealing is placed between the sealing peripheries of the main body and the lid member.  
   
   
       13 . A container according to  claim 1 , wherein a backing resin sheet is disposed along the joint boundary between the plurality of resin sheets on a side opposite to the reinforcing metal belt member and bonded to the plurality of resin sheets, thereby forming a hermetically bolted joint structure.  
   
   
       14 . A container according to  claim 1 , wherein the resin sheets are bonded to each other by solution bonding of locally dissolving the resin sheets with a solvent of the resin forming the resin sheets and abutting the locally dissolved parts of the resin sheets to each other.  
   
   
       15 . A container according to  claim 6 , wherein an O-ring for hermetic sealing is placed between the sealing peripheries of the main body and the lid member.  
   
   
       16 . A container according to  claim 6 , wherein a backing resin sheet is disposed along the joint boundary between the plurality of resin sheets on a side opposite to the reinforcing metal belt member and bonded to the plurality of resin sheets, thereby forming a hermetically bolted joint structure.  
   
   
       17 . A container according to  claim 6 , wherein the resin sheets are bonded to each other by solution bonding of locally dissolving the resin sheets with a solvent of the resin forming the resin sheets and abutting the locally dissolved parts of the resin sheets to each other.