Method of producing micro component

Abstract

To produce a micro component, a resin base ( 1 ) capable of being dissolved by a solvent is formed, physical external force is allowed to act on the resin base ( 1 ) to form a concave ( 3 ) and after a metal is filled into the concave ( 3 ), an excessive metal is removed by grinding and the resin base ( 1 ) is dissolved by the solvent. Consequently, the necessity for lithography apparatuses such as a stepper and an etching apparatus can be eliminated, economy can be improved and production of components having complicated shapes that the lithographic technology cannot easily produce can also be produced.

1 . A production method of a micro component comprising the steps of: 
 a resin base forming step of forming a resin base capable of being dissolved by use of a solvent;    a concave forming step of allowing physical external force to act on said resin base and forming a concave having a shape corresponding to a shape of a micro component to be produced;    a metal filling step of filling a metal into said concave;    a metal removing step of grinding and removing an excessive metal; and    a base dissolving step of dissolving said resin base by use of a solvent.    
     
     
         2 . A production method of a micro component according to  claim 1 , wherein said physical external force includes any of a laser beam, an ultrasonic wave, a cutting blade and a grinding wheel.  
     
     
         3 . A production method of a micro component according to  claim 1 , wherein said metal filling step scatters a metal in said concave by sputtering and then fills said concave by electroplating.  
     
     
         4 . A production method of a micro component according to  claim 1 , wherein said micro component is a component constituting a micro machine or a molding flask used for producing said component.  
     
     
         5 . A production method of a micro component according to  claim 1 , wherein said metal is nickel, said resin is an ABS resin and said solvent is acetone.  
     
     
         6 . A production method of a micro component according to  claim 2 , wherein said metal is nickel, said resin is an ABS resin and said solvent is acetone.  
     
     
         7 . A production method of a micro component according to  claim 3 , wherein said metal is nickel, said resin is an ABS resin and said solvent is acetone.  
     
     
         8 . A production method of a micro component according to  claim 4 , wherein said metal is nickel, said resin is an ABS resin and said solvent is acetone.