Detection of gas phase materials

Abstract

Sensors and methods of monitoring for the presence of gas phase materials by detecting the formation of films based on the gas phase material are disclosed. Advantageously, some gas phase materials preferentially deposit on specific surfaces. As a result, selective detection of those gas phase materials can be obtained by detecting films deposited on those detection surfaces. Examples of gas phase materials that may be detected include RuO 4 , IrO 4 and RhO 4 .

1 - 42 . (canceled)  
     
     
         43 . A method of detecting a gas phase material comprising: 
 providing a sensor comprising: 
 a first electrode and a second electrode;  
 a detection surface extending between the first electrode and the second electrode, wherein the gas phase material is operable to form an electrically conductive film on the detection surface; and  
 a detector operatively connected to the first electrode and the second electrode, the detector capable of sensing the electrically conductive film on the detection surface by detecting a change in conductivity between the first electrode and the second electrode; and  
   positioning the sensor outside of a reaction chamber.    
     
     
         44 . The method of  claim 43 , further comprising selecting the detection surface to enhance formation of the electrically conductive film thereon.  
     
     
         45 . The method of  claim 43 , further comprising selecting the detection surface to retard formation of the electrically conductive film thereon.  
     
     
         46 . The method of  claim 43 , wherein the detection surface comprises polypropylene.  
     
     
         47 . The method of  claim 43 , further comprising selecting a property of the detection surface to achieve a desired sensitivity of the detector, the property selected from the group consisting of detection surface length, detection surface material, detection surface morphology, and detection surface shape.  
     
     
         48 . The method of  claim 43 , wherein the gas phase material comprises ruthenium.  
     
     
         49 . The method of  claim 48 , wherein the gas phase material comprises ruthenium tetraoxide.  
     
     
         50 . A method of detecting a gas phase material comprising: 
 providing a sensor comprising: 
 a first electrode and a second electrode;  
 a detection surface extending between the first electrode and the second electrode, wherein an electrically conductive film comprising ruthenium is operable to deposit on the detection surface when the detection surface is exposed to the gas phase material; and  
 a detector operatively connected to the first electrode and the second electrode;  
   heating the detection surface above ambient temperature; and    operating the sensor outside of a reaction chamber.    
     
     
         51 . The method of  claim 50 , further comprising selecting the detection surface to enhance formation of the electrically conductive film thereon.  
     
     
         52 . The method of  claim 51 , wherein selecting the detection surface comprises selecting a detection surface material comprising polypropylene.  
     
     
         53 . The method of  claim 50 , wherein beating the detection surface comprises heating the detection surface up to about 100° C. or less.  
     
     
         54 . The method of  claim 50 , further comprising selecting a property of the detection surface to achieve a desired sensitivity of the detector, the property selected from the group consisting of detection surface length, detection surface material, detection surface morphology, and detection surface shape.  
     
     
         55 . A deposition apparatus comprising: 
 a reaction chamber; and    a sensor located outside of the reaction chamber, the sensor comprising: 
 a first electrode and a second electrode;  
 a detection surface extending between the first electrode and the second electrode, wherein the detection surface comprises a material on which an electrically conductive film deposits when exposed to a gas phase material; and  
 a detector operable to measure electrical conductivity between the first electrode and the second electrode.  
   
     
     
         56 . The apparatus of  claim 55 , further comprising a heating apparatus operatively coupled to the detection surface.  
     
     
         57 . The apparatus of  claim 57  wherein the detection surface comprises a polymer.  
     
     
         58 . The apparatus of  claim 57 , wherein the detection surface comprises polypropylene.  
     
     
         59 . The apparatus of  claim 55 , wherein the detection surface comprises glass.  
     
     
         60 . The apparatus of  claim 55 , wherein the gas phase material comprises ruthenium.  
     
     
         61 . The apparatus of  claim 60 , wherein the gas phase material comprises ruthenium tetraoxide.  
     
     
         62 . The apparatus of  claim 55 , wherein the detector comprises an electrical circuit capable of detecting a change in electrical conductivity between the first electrode and the second electrode.  
     
     
         63 . A method of detecting a gas phase material comprising: 
 providing a sensor comprising: 
 a first electrode and a second electrode;  
 a detection surface extending between the first electrode and the second electrode, wherein the detection surface comprises a material upon which the gas phase material will preferentially deposit to form an electrically conductive film; and  
 a detector connected to the first electrode and the second electrode, the detector capable of sensing the electrically conductive film on the detection surface by detecting a change in conductivity between the first electrode and the second electrode; and  
   positioning the sensor outside of a reaction chamber.    
     
     
         64 . The apparatus of  claim 63 , wherein the detection surface comprises a polymer.  
     
     
         65 . The apparatus of  claim 64 , wherein the detection surface comprises polypropylene.  
     
     
         66 . The apparatus of  claim 63 , wherein the detection surface comprises glass.  
     
     
         67 . A detector located external to a reaction chamber that is configured to have a reaction gas therein, wherein the detector comprises a plurality of electrodes proximate a structure defining an environment in which the presence of the reaction gas will be electrically detectable by a voltage differential between the plurality of electrodes.