Mask for vacuum deposition and organic EL display panel manufactured by using the same

Abstract

A mask for vacuum deposition that is held by a mask frame is provided. The mask comprises a mask body for deposition; a guide member fixed to at least one side of the mask body for deposition; and tension applying means that, when the guide member is held by the mask frame, applies a predetermined tension to the mask body for deposition via the guide member.

1 - 11 . (canceled)  
     
     
         12 . An organic EL display panel manufactured by the use of a mask for vacuum deposition that comprises: 
 a mask body for deposition;    a guide member fixed to at least one side of the mask body for deposition; and    tension applying means that, when the guide member is held by the mask frame, applies a predetermined tension to the mask body for deposition via the guide member.    
     
     
         13 . An organic EL display panel as claimed in  claim 12 , wherein the mask body for deposition has a mask pattern in which apertures are arranged in a predetermined pattern and has the guide member fixed to at least one side in the direction perpendicular to the direction of length of the aperture.  
     
     
         14 . An organic EL display panel as claimed in  claim 13 , wherein the guide members are fixed to the two sides of the mask body for deposition that are opposed to each other.  
     
     
         15 . An organic EL display panel as claimed in  claim 12 , wherein the guide members are fixed to the four sides of the mask body for deposition.  
     
     
         16 . An organic EL display panel as claimed in  claim 12 , wherein the tension applying means includes a screw hole formed in the side wall of the guides member and a screw which is screwed into the screw hole whose tip portion is made to abut against the side wall of the mask frame.  
     
     
         17 . An organic EL display panel as claimed in  claim 16 , wherein a spring member is provided between the mask frame and the guide member.  
     
     
         18 . An organic EL display panel as claimed in  claim 17 , wherein the spring member is a compression spring.  
     
     
         19 . An organic EL display panel as claimed in  claim 17 , wherein the spring member is a leaf spring.  
     
     
         20 . An organic EL display panel as claimed in  claim 12 , wherein the tension applying means includes a through hole formed in the side wall of the guide member, a screw which is passed through the through hole whose tip portion is screwed into a screw hole made in the side wall of the mask frame, and a spring member provided between the mask frame and the guide member.  
     
     
         21 . An organic EL display panel as claimed in  claim 20 , wherein the spring member is a compression spring.  
     
     
         22 . An organic EL display panel as claimed in  claim 20 , wherein the spring member is a leaf spring.