Magnetic thin film, magnetic component that uses this magnetic thin film, manufacturing methods for the same, and a power conversion device

Abstract

On top of a silicon substrate, a polyimide film with a thickness of 10 μm is formed. On top of this, a magnetic thin film that is a polyimide film containing Fe fine particles and that has a thickness of 20 μm is formed. On top of this magnetic thin film, a patterned Ti/Au film and a Ti/Au connection conductor are formed. On top of this, a polyimide film with a thickness of 10 μm, and a Cu coil with a height 35 μm, width 90 μm, space 25 μm, and a polyimide layer that fills the spaces in the Cu coil are formed. On top of this, via a polyimide film with a thickness of 10 μm, a magnetic thin film that is a polyimide film containing Fe particles and that has a thickness of 20 μm is formed. This thin film inductor has a small alternating current resistance. The present invention provides a magnetic thin film that is well suited for mass production, can be manufactured easily, can be made into a thick film, has soft magnetic qualities, and is inexpensive. The present invention also provides a magnetic component that uses this magnetic thin film, manufacturing methods for these, and a power conversion device.

1 . A magnetic thin film, comprising: 
 a resin having magnetic fine particles dispersed therein.    
   
   
       2 . A magnetic thin film as described in  claim 1 , wherein: 
 said magnetic fine particles contain at least one metal element selected from a group consisting of Fe, Ni, Co, Mn, and Cr.    
   
   
       3 . A magnetic thin film as described in  claim 1 , wherein: 
 said resin is a non-photosensitive resin or a photosensitive resin.    
   
   
       4 . A magnetic thin film as described in  claim 1 , wherein: 
 said resin is an organic magnetic polymer.    
   
   
       5 . A magnetic thin film as described in  claim 4 , wherein: 
 said organic magnetic polymer is a cross conjugated polycarbene or a conjugated polymer that has a main chain of polyacetylene and polydiacetylene.    
   
   
       6 . A magnetic thin film, wherein: 
 said thin film is constructed from magnetic fine particles, and said fine particles are aggregated so that said fine particles are in contact with each other.    
   
   
       7 . A magnetic thin film as described in  claim 1 , wherein: 
 said fine particle comprises a magnetic particle and an insulating film that surrounds the perimeter of said magnetic particle.    
   
   
       8 - 11 . (canceled)  
   
   
       12 . A magnetic component, comprising: 
 a first magnetic thin film and a second magnetic thin film being magnetic thin films described in  claim 1;     said first magnetic thin film being formed on top of a semiconductor substrate via an insulating film;    a thin film conductor being formed in a spiral shape on top of said first magnetic thin film;    a second resin that fills spaces in said spiral thin film conductor;    said second magnetic thin film being formed on top of said thin film conductor and said second resin.    
   
   
       13 . A magnetic component as described in  claim 12 , wherein: 
 said second resin is a magnetic thin film as described in  claim 1 .    
   
   
       14 . A magnetic component, comprising: 
 a third magnetic thin film and a fourth magnetic thin film being magnetic thin films described in  claim 6;     said third magnetic thin film being formed on top of a semiconductor substrate via an insulating film;    a thin film conductor being formed in a spiral shape on top of said third magnetic thin film;    said third magnetic thin film being formed in spaces in said spiral thin film conductor;    said fourth magnetic thin film being formed on top of said thin film conductor and said third magnetic thin film.    
   
   
       15 - 17 . (canceled)  
   
   
       18 . A magnetic component, comprising: 
 a first magnetic thin film and a second magnetic thin film being magnetic thin films described in  claim 1;     said first magnetic thin film being formed on top of an insulating substrate via an insulating film;    a thin film conductor being formed in a spiral shape on top of said first magnetic thin film;    a second resin filling spaces in said spiral-shaped thin film conductor;    said second magnetic thin film being formed on top of said thin film conductor and said second resin.    
   
   
       19 . A magnetic component as described in  claim 18 , wherein: 
 said second resin is a magnetic thin film as described in  claim 1 .    
   
   
       20 . A magnetic component, comprising: 
 a third magnetic thin film and a fourth magnetic thin film being magnetic thin films described in  claim 6;     said third magnetic thin film being formed on top of an insulating substrate via an insulating film;    a thin film conductor being formed in a spiral shape on top of said third magnetic thin film;    said third magnetic thin film being formed in spaces in said spiral-shaped thin film conductor;    said fourth magnetic thin film being formed on top of said thin film conductor and said third magnetic thin film.    
   
   
       21 . A magnetic component as described in  claim 12 , wherein: 
 said magnetic component is a transformer.    
   
   
       22 . A magnetic component as described in  claim 12 , wherein: 
 said magnetic component is a power conversion device.    
   
   
       23 . A lead wire, wherein: 
 said lead wire is covered with a magnetic thin film described in  claim 1 .    
   
   
       24 . A magnetic component, comprising: 
 a lead wire as described in  claim 23  being used as a coil.    
   
   
       25 . A current sensor, comprising: 
 a magnetic sensor being provided on a lead wire described in  claim 23 .    
   
   
       26 . A magnetic component as described in  claim 12 , comprising: 
 an insulating film being between said first magnetic thin film and said thin film conductor and said second resin and between said thin film conductor and said second resin and said second magnetic thin film.    
   
   
       27 . A magnetic component as described in  claim 12 , wherein: 
 said thin film conductor and said second resin is formed as two layers via an insulating film.    
   
   
       28 . A power conversion device, comprising: 
 a magnetic component, comprising:    a magnetic thin film as described in  claim 1  being formed on top of a semiconductor integrated circuit substrate via an insulating film;    a thin film conductor being formed in a spiral shape on top of said magnetic thin film;    a second resin being filled in spaces in said spiral-shaped thin film conductor;    said magnetic component being mounted on top of a wiring substrate;    said magnetic component being resin sealed by a resin in which magnetic fine particles are dispersed.    
   
   
       29 . A power conversion device, comprising: 
 a magnetic component, comprising:    a magnetic thin film as described in  claim 1  being formed on top of a semiconductor integrated circuit substrate via an insulating film;    a thin film conductor being formed in a spiral shape on top of said magnetic film;    a second resin being filled in spaces in said spiral-shaped thin film conductor;    said magnetic component being mounted onto a lead frame;    a lead terminal being connected to said magnetic component by a metal thin wire;    said lead terminal and said lead frame and said magnetic component are resin sealed by a resin in which magnetic fine particles are dispersed.    
   
   
       30 . A power conversion device as described in  claim 28 , wherein: 
 said thin film conductor and said second resin are formed in two layers via an insulating film.    
   
   
       31 . A power conversion device as described in  claim 28 , wherein: 
 an insulating film is formed on top of said thin film conductor and said second resin.