Acid generator and thin film composition containing the same

Abstract

The present invention relates to the compounds generating strong acids (described hereafter as “acid generators”) decomposed by heat and the composition of thin film containing the same. Provided are the compounds represented by the structure of formula I and the composition containing the compounds. wherein X is alkyl or aryl group and R is hydrogen atom, hydroxy, alkoxy or alkyl group. The abovementioned acid generators of the present invention generate acid by heat at relatively low temperatures, preventing the change in the ratio of the composition due to evaporation of some components in the composition. Accordingly, it has the advantageous effect that the ratio of components in the composition is controlled and the preparation of the thin film with the wanted properties is simplified.

1 . A composition of a thin film comprising the compound represented by the structure of the formula I  
       
         
           
           
               
               
           
         
         wherein X is alkyl or aryl group and R is hydrogen atom, hydroxy group, alkoxy group or alkyl group; cross linking agent, resin, additives and solvents.  
       
     
     
         2 . (canceled)  
     
     
         3 . (canceled)  
     
     
         4 . The composition of the thin film as set forth in  claim 1 , wherein the resin is selected more than one from the group of polyhydroxystyrene, polystyrene and polyacrylate.  
     
     
         5 . The composition of the thin film comprising the compounds of  claim 1 , cross linking agent, additives and solvents.  
     
     
         6 . The composition of the thin film as set forth in  claim 1  or  claim 5 , wherein the cross linking agents is the polymer represented by the structure of formula II.  
       
         
           
           
               
               
           
         
         wherein R1 and R2 both are alkyl group and m/(m+n) is in the range of 0.3 to 0.8.  
       
     
     
         7 . The composition of the thin film as set forth in  claim 1  or  claim 5 , wherein the cross linking agent is the polymer represented by the structure of formula III.  
       
         
           
           
               
               
           
         
         wherein R3 and R4 are all hydrogen atoms or alkyl groups, R5 is hydrogen atom, alkoxy group, hydroxyalkyl epoxyalkyl group, alkoxyalkyl group or hydroxy group and m′/(m′+n′) is in the range of 0.2 to 1.0.  
       
     
     
         8 . The composition of the thin film as set forth in  claim 1  or  claim 5 , wherein the cross linking agent is the polymer represented by the structure of formula IV.  
       
         
           
           
               
               
           
         
         wherein R6 and R8 are hydrogen atom or methyl group, R7 is hydrogen atom, alkoxy group, hydroxyalkyl epoxyalkyl group, alkoxyalkyl or hydroxy group group, R9 and R10 are alkyl groups and m″/(m″+n″) is in the range of 0.2 to 1.0.