Specimen cooling system of focused ion beam apparatus

Abstract

Provided is a specimen cooling system of a focused ion beam apparatus. The specimen cooling system includes: a reaction chamber; a stage which is installed in the reaction chamber; a specimen holder which is installed over the stage and on which a specimen is placed; a heat transmission part which is attached to the specimen holder and extends from the interior of the reaction chamber to the outside so as to transmit heat, which is generated in the specimen during a process, outside the reaction chamber; and a heat sink which is connected to an end of the heat transmission part that extends from the interior of the reaction chamber to the outside and which absorbs the heat transmitted by the heat transmission part.

1 . A specimen cooling system of a focused ion beam apparatus, comprising: 
 a reaction chamber;    a stage which is installed in the reaction chamber;    a specimen holder which is installed on the stage and on which a specimen is placed;    a heat transmission part which is attached to the specimen holder and extends from the interior of the reaction chamber to the outside so as to transmit heat, which is generated in the specimen during a process, outside the reaction chamber; and    a heat sink which is connected to an end of the heat transmission part that extends from the interior of the reaction chamber to the outside and which absorbs the heat transmitted by the heat transmission part.    
   
   
       2 . The specimen cooling system of  claim 1 , wherein a trench is formed in a surface of the specimen holder so that the specimen can be placed on the specimen holder.  
   
   
       3 . The specimen cooling system of  claim 1 , wherein the specimen holder is formed of at least one of Cu, Fe, Au, and Ag.  
   
   
       4 . The specimen cooling system of  claim 1 , further comprising a specimen placing part between the stage and the specimen holder.  
   
   
       5 . The specimen cooling system of  claim 4 , wherein the specimen placing part is made of a stainless material.  
   
   
       6 . The specimen cooling system of  claim 1 , wherein the reaction chamber comprises a cooling port which is provided at a portion of the reaction chamber through which the heat transmission part penetrates.  
   
   
       7 . The specimen cooling system of  claim 6 , wherein the cooling port is formed of at least one of Cu, Fe, Au, and Ag.  
   
   
       8 . The specimen cooling system of  claim 1 , wherein the heat transmission part comprises a portion which is formed in the shape of a wire and is attached to the specimen holder and a portion which is formed in the shape of a bar to extend from the interior of the reaction chamber to the outside through the cooling port.  
   
   
       9 . The specimen cooling system of  claim 1 , wherein the shape of the heat transmission part is one of a wire, a bar, and a tube.  
   
   
       10 . The specimen cooling system of  claim 1 , wherein the heat transmission part is formed of at least one of Cu, Fe, Au, and Ag.  
   
   
       11 . The specimen cooling system of  claim 1 , wherein the heat sink is a cooling vessel comprising a cooling medium.  
   
   
       12 . The specimen cooling system of  claim 11 , wherein the heat transmission part extends into the interior of the cooling vessel so that an end of the heat transmission part dips into the cooling medium.  
   
   
       13 . The specimen cooling system of  claim 12 , wherein the cooling medium is one of liquid nitrogen and liquid helium.  
   
   
       14 . The specimen cooling system of  claim 12 , wherein the cooling vessel is a Dewar vessel.  
   
   
       15 . The specimen cooling system of  claim 1 , wherein the heat sink is a peltier element.