Defect reduction using pad conditioner cleaning

Abstract

A device for cleaning a pad conditioner that comprises a cleaning agent supply for providing a cleaning agent for cleaning a pad conditioner including a conditioning surface, a pad including an abrasive surface, and a pump rotating the pad with respect to the pad conditioner for rubbing the abrasive surface of the pad against the conditioning surface of the pad conditioner.

1 . A device for cleaning a pad conditioner comprising: 
 a cleaning agent supply for providing a cleaning agent for cleaning a pad conditioner including a conditioning surface;    a pad including an abrasive surface; and    a pump rotating the pad with respect to the pad conditioner for rubbing the abrasive surface of the pad against the conditioning surface of the pad conditioner.    
     
     
         2 . The device of  claim 1 , the pad further comprising a sponge.  
     
     
         3 . The device of  claim 1 , the pad further comprising a disc shape.  
     
     
         4 . The device of  claim 1 , the pad further comprising a square shape.  
     
     
         5 . The device of  claim 1  further comprising a container for holding the pad conditioner and the pad.  
     
     
         6 . The device of  claim 1 , the pump rotating at approximately 60 revolutions per minute (rpm).  
     
     
         7 . The device of  claim 1 , the cleaning agent further comprising deionized water.  
     
     
         8 . A device for cleaning a pad conditioner comprising: 
 an overflow tank for holding a pad conditioner having a conditioning surface provided with a plurality of grits;    a cleaning agent supply for providing a cleaning agent to the overflow tank;    a pad held in the overflow tank including an abrasive surface for contact with the conditioning surface of the pad conditioner; and    a pump rotating the pad with respect to the pad conditioner for rubbing the abrasive surface of the pad against the conditioning surface of the pad conditioner.    
     
     
         9 . The device of  claim 8  wherein an abrasive action of the pad results in removal of foreign materials remaining between the plurality of grits of the pad conditioner.  
     
     
         10 . The device of  claim 8 , the cleaning agent further comprising deionized water.  
     
     
         11 . The device of  claim 8 , the abrasive surface further comprising a sponge surface.  
     
     
         12 . The device of  claim 8  wherein the cleaning agent is pumped to overflow the overflow tank in preventing stagnation of the cleaning agent.  
     
     
         13 . A method for cleaning a pad conditioner comprising the steps of: 
 providing a cleaning agent for cleaning a pad conditioner;    reconditioning a polishing surface of a polishing pad using the pad conditioner; and    rubbing a pad including an abrasive surface against a conditioning surface of the pad conditioner.    
     
     
         14 . The method of  claim 13  further comprising the step of rotating the pad with respect to the pad conditioner using a pump such that the abrasive surface of the pad rubs against the conditioning surface of the pad conditioner and removes foreign materials remaining between a plurality of grits of the pad conditioner.  
     
     
         15 . The method of  claim 13  wherein an abrasive action against the conditioning surface of the pad conditioner is provided by a sponge in the pad.  
     
     
         16 . The method of  claim 13  wherein the pad is in a disc shape.  
     
     
         17 . The method of  claim 13  wherein the pad is in a square shape.  
     
     
         18 . The method of  claim 13  wherein the pad conditioner is cleaned using deionized water.