Method of cleaning substrate

Abstract

Dirt, particularly of inorganic matter, attached to a substrate, such as a glass substrate for liquid crystal devices, is effectively removed by irradiating the substrate with ultraviolet rays including 184.9 nm and 253.7 nm in an oxygen-containing atmosphere in advance of wet cleaning with pure water. As a result, the wet cleaning time and the amount of pure water can be reduced.

1 - 16 . (canceled)  
   
   
       17 . An apparatus for washing a glass substrate comprising: 
 conveyer means for feeding a glass substrate having thereon a transparent electrode,    ultraviolet exposure means for irradiating the glass substrate fed by the conveyer means with ultraviolet rays,    spray means for spraying pure water onto the glass substrate irradiated with ultraviolet rays and conveyed from the ultraviolet exposure means to wash the glass substrate, and    high-pressure showering means for showering pure water at an elevated pressure onto the glass substrate washed by the spray means to further wash the glass substrate.    
   
   
       18 . An apparatus according to  claim 17 , wherein the spray means sprays the pure water at an elevated temperature.  
   
   
       19 . An apparatus according to  claim 17 , further including air knife means for draining water off the glass substrate following showering by the high-pressure showering means.  
   
   
       20 . A process for producing a liquid crystal device comprising selecting at least one glass substrate having thereon a transparent electrode and washing said substrate using an apparatus according to  claim 17 .  
   
   
       21 . A process for producing a liquid crystal device comprising selecting at least one glass substrate having thereon a transparent electrode and washing said substrate using an apparatus according to  claim 18 .  
   
   
       22 . A process for producing a liquid crystal device comprising selecting at least one glass substrate having thereon a transparent electrode and washing said substrate using an apparatus according to  claim 19.