Frequency compensated oscillator design for process tolerances

Abstract

A continuous or distributed resonator geometry is defined such that the fabrication process used to form a spring mechanism also forms an effective mass of the resonator structure. Proportional design of the spring mechanism and/or mass element geometries in relation to the fabrication process allows for compensation of process-tolerance-induced fabrication variances. As a result, a resonator having increased frequency accuracy is achieved.

1 - 26 . (canceled).  
   
   
       27 . A resonator comprising: 
 a spring-mass mechanism, having an effective mechanical stiffness and an effective mechanical mass defined by a geometry;    wherein the geometry and the effective mass of the spring-mass mechanism are simultaneously defined by application of a fabrication process to a constituent material; and    wherein the geometry is defined such that application of the fabrication process to the constituent material results in little change to a ratio defined by a change in the effective mechanical stiffness and a change in the effective mechanical mass.    
   
   
       28 . The resonator of  claim 27  wherein the geometry of the spring-mass mechanism comprises one or more voids formed in the length of the spring-mass mechanism.  
   
   
       29 . The resonator of  claim 27  wherein the geometry of the spring-mass mechanism comprises an outer edge having a plurality of indentations, the plurality of indentations having the effect of increasing a surface area of the outer edge exposed to the fabrication process.  
   
   
       30 . The resonator of  claim 27  wherein the spring-mass mechanism includes at least one mass structure that is formed integral to the spring-mass mechanism.  
   
   
       31 . The resonator of  claim 30  wherein at least one of the mass structure comprises one or more voids formed in a body of the at least one mass structure.  
   
   
       32 . The resonator of  claim 30  wherein at least one of the mass structure comprises an outer edge having a plurality of indentations, the plurality of indentations having the effect of increasing a surface area of the outer edge exposed to the fabrication process.  
   
   
       33 . The resonator of  claim 32  wherein the at least one of the mass structure further comprises one or more voids formed respectively in a body of the at least one of the mass structure.  
   
   
       34 . The resonator of  claim 27  wherein the spring-mass mechanism includes a plurality of mass structures that are formed integral to the spring-mass mechanism.  
   
   
       35 . The resonator of  claim 34  wherein each of the plurality of mass structures includes one or more voids formed in a body of the mass structure.  
   
   
       36 . The resonator of  claim 34  wherein each of the plurality of mass structures includes an outer edge having a plurality of indentations, wherein the plurality of indentations having the effect of increasing a surface area of the outer edge exposed to the fabrication process.  
   
   
       37 . The resonator of  claim 36  wherein each of the plurality of mass structures further includes one or more voids formed in a body of the mass structure.  
   
   
       38 . The resonator of  claim 27  wherein the spring-mass mechanism includes a plurality of spring structures that are formed integral to the spring-mass mechanism.  
   
   
       39 . The resonator of  claim 38  wherein each of the plurality of spring structures includes one or more voids formed in a body of the spring structure.  
   
   
       40 . The resonator of  claim 38  wherein each of the plurality of spring structures includes an outer edge having a plurality of indentations, and wherein the plurality of indentations having the effect of increasing a surface area of the outer edge exposed to the fabrication process.