Reduction of electric-field-induced damage in field-sensitive articles

Abstract

A continuously electrically-conductive container ( 104 ) contains an electrically-insulating support ( 110 ) for holding an electric-field-sensitive article ( 112 ), such as a reticle, so that the article is shielded from external electric fields and is not in electrical contact with a conductive container wall ( 106 ). A SMIF pod ( 302, 510 ) comprises an electrically conductive container for holding an electric-field-sensitive article. A system ( 502 ) has boundary walls ( 504 ) that form a chamber ( 506 ) for a controlled environment. The system includes a load port ( 508 ) for receiving a SMIF pod and an end effector ( 522 ) made of insulating material for moving a field-sensitive article ( 516 ) within the chamber to and from the SMIF pod. An ionizer ( 542 ) neutralizes electric charges on the field-sensitive article.

1 . An apparatus for holding a field-sensitive article comprising: 
 a conductive container having an electrically-conductive container wall said container wall defining an enclosure; and    an electrically-insulating support located within said enclosure, said electrically-insulating support configured for supporting a field-sensitive article within said enclosure without electrically contacting said electrically-conductive container wall;    there being no significant source of microwave energy within said enclosure.    
   
   
       2 . An apparatus as in  claim 1  wherein said electrically-conductive container wall comprises substantially only conductive material.  
   
   
       3 . An apparatus as in  claim 1  wherein said electrically-conductive container wall comprises substantially only metal.  
   
   
       4 . An apparatus as in  claim 1  wherein said electrically-conductive container wall comprises substantially stainless steel.  
   
   
       5 . An apparatus as in  claim 1  wherein said electrically-insulating support comprises substantially only insulative material.  
   
   
       6 . An apparatus as in  claim 1  wherein said electrically-insulating support comprises ceramic material.  
   
   
       7 . An apparatus as in  claim 1  wherein said electrically-insulating support comprises polymer plastic.  
   
   
       8 . An apparatus as in  claim 1  wherein a controlled electrical potential is connected to said conductive container.  
   
   
       9 . An apparatus as in  claim 1  wherein an electrical connector connects said conductive container to a controlled electrical potential.  
   
   
       10 . An apparatus as in  claim 9  wherein said electrical connector comprises one from a group consisting of an electrical conductor and a static dissipative material.  
   
   
       11 . An apparatus as in  claim 1  wherein said conductive container comprises a portion of a SMIF pod.  
   
   
       12 . An apparatus as in  claim 11  wherein said electrically-insulating support is configured for supporting a reticle.  
   
   
       13 . An apparatus as in  claim 11  wherein an ionizer is located external to said enclosure for neutralizing an electric charge.  
   
   
       14 . An apparatus as in  claim 11  wherein a portion of said electrically-conductive container wall is substantially transparent.  
   
   
       15 . A system for handling a field-sensitive article, said system having boundary walls, a chamber defined by said boundary walls, a load port for holding and operating a SMIF pod, a SMIF pod, and an effector for moving an article within said chamber to or from an open SMIF pod, wherein: 
 said SMIF pod a conductive container and an electrically-insulating support located within said conductive container, said electrically-insulating support configured for supporting a field-sensitive article without electrical contact to said conductive container; and    said effector being an electrically-insulating effector configured for moving a field-sensitive article.    
   
   
       16 . A system as in  claim 15  wherein said electrically-insulating chamber-internal support is configured for supporting a field-sensitive article within said chamber without electrical contact to said boundary walls.  
   
   
       17 . A system as in  claim 16  wherein said electrically-insulating chamber-internal support comprises substantially only insulative material.  
   
   
       18 . A system as in  claim 15  having an internal panel located within said chamber wherein said internal panel is an electrically-insulating internal panel.  
   
   
       19 . A system as in  claim 18  wherein said electrically-insulating internal panel comprises substantially only insulative material.  
   
   
       20 . A system as in  claim 15  wherein said boundary walls are substantially electrically conductive.  
   
   
       21 . A system as in  claim 15  wherein said boundary walls comprise substantially only electrically conductive material.  
   
   
       22 . A system as in  claim 15  wherein said boundary walls comprise static dissipative material.  
   
   
       23 . A system as in  claim 15  wherein said boundary walls are connected to a controlled electrical potential.  
   
   
       24 . A system as in  claim 15  wherein said electrically-insulating support is configured for supporting a reticle and said effector is configured for moving a reticle.  
   
   
       25 . A system as in  claim 15  wherein an ionizer is located within said chamber for neutralizing an electric charge.  
   
   
       26 . A system as in  claim 15  wherein a portion of said boundary walls is substantially transparent.  
   
   
       27 . A system for handling a field-sensitive article, said system having boundary walls, a chamber defined by said boundary walls, and a container within said chamber for holding a field-sensitive article, wherein: 
 said container comprises an electrically-conductive container wall, said container wall defining an enclosure;    an electrically-insulating support located within said enclosure, said electrically-insulating support configured for supporting a field-sensitive article within said enclosure without electrically contacting said electrically-conductive container wall; and    an ionizer for providing charge-neutralizing ions in said chamber.    
   
   
       28 . An electrically-insulating support for a reticle, said support having an insulating member wherein there is no conducting or static dissipative material close enough to said reticule to cause a concentration of electrical field lines sufficient to cause field-induced damage.  
   
   
       29 . An electrically-insulating support as in  claim 28  wherein there is no conducting or static dissipative material within 2 microns of said reticule.  
   
   
       30 . An electrically-insulating support as in  claim 28  wherein there is no conducting or static dissipative material within 2 mm of said reticule.  
   
   
       31 . An electrically-insulating support as in  claim 28  wherein there is no conducting or static dissipative material within 10 mm of said reticule.  
   
   
       32 . A method of avoiding field-induced damage of a field-sensitive article by holding said field-sensitive article with an electrically-insulating support located within an enclosure defined by an electrically-conductive container wall of a conductive container so that said field-sensitive article does not electrically contact said electrically-conductive container wall and is not exposed to any significant source of microwave radiation.  
   
   
       33 . A method as in  claim 32  of: 
 locating said conductive container in a chamber having a controlled environment;    generating ions in said controlled environment in said chamber; and    opening said conductive container in said controlled environment.    
   
   
       34 . A method as in  claim 32  of: 
 locating said conductive container in a chamber having a controlled environment;    opening said conductive container in said controlled environment; and    moving said field-sensitive article out of said conductive container into said controlled environment using an electrically-insulating effector.    
   
   
       35 . A method of protecting a field-sensitive reticule from electric-field induced damage, by keeping all conductive or static dissipative material far enough away from said reticule to prevent a concentration of electrical field lines sufficient to cause field-induced damage to said reticle.  
   
   
       36 . A method as in  claim 35  wherein said protecting is keeping said conducting or static dissipative material at least 2 microns away from said reticule.  
   
   
       37 . A method as in  claim 35  wherein said protecting is keeping said conducting or static dissipative material at least 2 mm away from said reticule.  
   
   
       38 . A method as in  claim 35  wherein said protecting is keeping said conducting or static dissipative material at least 10 mm away from said reticule.