Sputtering target assembly and sputtering apparatus using the same

Abstract

A sputtering target assembly includes a backing plate of which both surfaces are evenly formed and a target having one surface that is evenly formed and attached to one surface of the backing plate and the other surface that is formed with different thicknesses according to a location thereof.

1 . A method of manufacturing a liquid crystal display device comprising: 
 forming a thin film transistor array substrate including a thin film layer, the thin film layer being made using a sputtering target assembly including a backing plate having first and second surfaces, the first and second surfaces being level; and    a target having one level surface and attached to the first surface of the backing plate and another surface having a stepped portion, the target having different thickness portions corresponding to the stepped portion.    
     
     
         2 - 17 . (Cancelled)  
     
     
         18 . A liquid crystal display device made by the process of  claim 1.