Device for treating objects by plasma deposition

Abstract

A device for treating objects by plasma deposition, comprising: a sealed treatment chamber ( 1 ), at a reduced pressure, provided on one of its walls ( 4 ) with a passage ( 2 ) that can be closed off, said passage ( 2 ) allowing objects for treatment ( 3 ) to be conveyed into and out of the treatment chamber ( 1 ), a transfer space ( 5 ) which can be placed, via said passage ( 2 ), in communication with the treatment chamber ( 1 ) so that objects for treatment ( 3 ) are introduced into the transfer space ( 5 ) prior to being introduced into the treatment chamber ( 1 ), the device being characterized in that the transfer space ( 5 ): is delimited by discontinuous walls ( 6,7 ), is able to move relative to the treatment chamber ( 1 ) so as to be able to negotiate the passage ( 2 ) of the treatment chamber ( 1 ).

1 . A device for treating objects by plasma deposition, comprising: 
 a sealed treatment chamber ( 1 ), at a reduced pressure, provided on one of its walls ( 4 ) with a passage ( 2 ) that can be closed off, said passage ( 2 ) allowing objects for treatment ( 3 ) to be conveyed into and out of the treatment chamber ( 1 ),    a transfer space ( 5 ) which can be placed, via said passage ( 2 ), in communication with the treatment chamber ( 1 ) so that objects for treatment ( 3 ) are introduced into the transfer space ( 5 ) prior to being introduced into the treatment chamber ( 1 ),    the device being characterized in that the transfer space ( 5 ):    is delimited by discontinuous walls ( 6 , 7 ),    is able to move relative to the treatment chamber ( 1 ) so as to be able to negotiate the passage ( 2 ) of the treatment chamber ( 1 ).    
   
   
       2 . The device as claimed in the preceding claim, characterized in that at least part of the walls ( 6 , 7 ) delimiting the transfer space ( 5 ) is designed to close off the passage ( 2 ) of the treatment chamber ( 1 ).  
   
   
       3 . The device as claimed in the preceding claim, characterized in that the passage ( 2 ) of the treatment chamber ( 1 ) is extended outside the treatment chamber ( 1 ) so that the extension ( 8 ) allows the transfer space ( 5 ) to be converted into a lock chamber when this transfer space ( 5 ) moves inside the extension ( 8 ).  
   
   
       4 . The device as claimed in the preceding claim, characterized in that the walls ( 6 ,  7 ) delimiting the transfer space ( 5 ) are fixed together, the entity being secured independently of one another to a drive system ( 9 ).  
   
   
       5 . The device as claimed in any one of  claims 1  to  3 , characterized in that the walls ( 6 ,  7 ) delimiting the transfer space ( 5 ) are secured to a sliding frame ( 10 ).  
   
   
       6 . The device as claimed in any one of the preceding claims in which the treatment chamber ( 1 ) is fixed and the transfer space ( 5 ) can move.  
   
   
       7 . The device as claimed in any one of the preceding claims in which the treatment chamber ( 1 ) can move and the transfer space ( 5 ) is fixed.  
   
   
       8 . A method of using the device as claimed in any one of the preceding claims, characterized by the following steps: 
 depositing one or more objects for treatment ( 3 ) on one of the discontinuous walls ( 6 ,  7 ) delimiting the transfer space ( 5 ),    relative moving of said walls ( 6 , 7 ) and of the transfer space ( 5 ) toward the treatment chamber ( 1 ),    possibly setting up a vacuum when the objects are in said lock chamber,    relative moving of said walls ( 6 ,  7 ) and of the transfer space ( 5 ) inside the treatment chamber ( 1 ),    treating the object or objects ( 3 ),    relative moving of said walls ( 6 ,  7 ) and of the transfer space ( 5 ) toward the outside of the treatment chamber ( 1 ),    removing the object or objects ( 3 ) from the transfer space ( 5 ).