Method for manufacturing a light guide plate mold

Abstract

A method for manufacturing a light guide plate mold includes the steps of: forming a photo-resist film ( 210 ) on a substrate ( 200 ); disposing a gray level mask ( 220 ) having a predetermined pattern over the substrate, illuminating the photo-resist film through the gray level mask by illuminating rays; developing the photo-resist film to form a photo-resist pattern ( 211 ) on the substrate; etching simultaneously the substrate and the photo-resist pattern to form a stamper ( 201 ); coating a metal-plating layer ( 230 ) over the stamper; electroforming the stamper coated with the metal-plating layer to form a master stamper ( 240 ); and stripping the metal-plating layer from the master stamper to attain the light guide plate mold. The method is highly precise and simple.

1 . A method for manufacturing a light guide plate mold, comprising the steps of: 
 forming a photo-resist film on a substrate;    disposing a gray level mask having a predetermined pattern over the substrate, and illuminating the photo-resist film through the gray level mask;    developing the photo-resist film to form a photo-resist pattern on the substrate;    etching simultaneously the substrate and the photo-resist pattern to form a stamper;    coating a metal-plating layer over the stamper; and    electroforming the stamper coated with the metal-plating layer to form a master stamper; and    stripping the metal-plating layer from the master stamper to attain the light guide plate mold.    
     
     
         2 . The method according to  claim 1 , wherein the photo-resist pattern formed by the developing step comprises a plurality of V-shaped grooves.  
     
     
         3 . The method according to  claim 1 , wherein the illumination is by yellow rays.  
     
     
         4 . The method according to  claim 1 , wherein the illumination is by ultraviolet rays.  
     
     
         5 . The method according to  claim 1 , wherein the stamper formed by the etching step has a plurality of V-shaped grooves thereon.  
     
     
         6 . The method according to  claim 1 , wherein the step of etching comprises dry-etching.  
     
     
         7 . The method according to  claim 6 , wherein the dry-etching is plasma dry-etching.  
     
     
         8 . The method according to  claim 1 , further comprising the step of forming a thin film layer before forming the photo-resist film on the substrate.  
     
     
         9 . The method according to  claim 1 , wherein the photo-resist film is formed by a spin-coating process.  
     
     
         10 . The method according to  claim 1 , wherein the photo-resist film is formed by a dip-coating process.  
     
     
         11 . The method according to  claim 1 , wherein the photo-resist film is formed by a roll-coating process.  
     
     
         12 . The method according to  claim 1 , wherein the photo-resist film is formed by a spray-coating process.  
     
     
         13 . The method according to  claim 1 , wherein the photo-resist film is formed by an extrusion slot-coating process.  
     
     
         14 . The method according to  claim 1 , wherein the photo-resist film comprises positive photo-resist material.  
     
     
         15 . The method according to  claim 1 , wherein the photo-resist film comprises negative photo-resist material.  
     
     
         16 . A method for manufacturing a light guide plate mold, comprising the steps of: 
 forming a photo-resist film on a substrate;    disposing a gray level mask having a predetermined pattern over the substrate, and illuminating the photo-resist film through the gray level mask;    developing the photo-resist film to form a photo-resist pattern on the substrate;    etching the substrate to form a stamper having a first set of densely arranged V-shaped slots in an upper face thereof;    coating a metal-plating layer over the stamper; and    electroforming the stamper coated with the metal-plating layer to form a master stamper; and    stripping the metal-plating layer from the master stamper to attain the light guide plate mold; wherein    said master stamper defines a second set of densely arranged V-shaped slots in an upper face thereof corresponding to the first set of densely arranged V-shaped slots.