US2005016565A1PendingUtilityA1

Cleaning masks

41
Priority: Jul 24, 2003Filed: Oct 28, 2003Published: Jan 27, 2005
Est. expiryJul 24, 2023(expired)· nominal 20-yr term from priority
Inventors:Samantha TanJianqi Wang
H10P 72/0416H10P 50/00C23F 1/44B08B 3/044C23G 1/02B08B 3/102C23G 3/00
41
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Claims

Abstract

A method and apparatus for cleaning masks is described. In one embodiment, the invention is a method of cleaning a mask. The method includes placing the mask in a cleaning solution. The method also includes agitating the cleaning solution at a predetermined agitation level for a predetermined period of time.

Claims

exact text as granted — not AI-modified
1 . A method of cleaning a molybdenum mask having a series of metals deposited thereon, comprising: 
 placing the molybdenum mask in a cleaning solution including hydrochloric acid; and    removing the molybdenum mask from the cleaning solution after a predetermined period of time.    
   
   
       2 . The method of  claim 1 , further comprising: 
 agitating the cleaning solution at a predetermined agitation level for a predetermined period of time.    
   
   
       3 . The method of  claim 2 , further comprising: 
 putting the molybdenum mask in a container; and wherein    placing the molybdenum mask in the cleaning solution includes placing the container in the cleaning solution.    
   
   
       4 . The method of  claim 3 , further comprising: 
 closing the container.    
   
   
       5 . The method of  claim 4 , wherein: 
 the cleaning solution is contained within a first vessel;    the first vessel is contained within a second vessel; and    the second vessel further contains an aqueous solution surrounding the first vessel.    
   
   
       6 . The method of  claim 5 , further comprising: 
 covering the first vessel with a lid.    
   
   
       7 . The method of  claim 6 , further comprising: 
 drying the mask with nitrogen.    
   
   
       8 . The method of  claim 7 , further comprising: 
 washing the mask with de-ionized water.    
   
   
       9 . The method of  claim 8 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 5 percent.    
   
   
       10 . The method of  claim 9 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 15 percent.    
   
   
       11 . The method of  claim 10 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 25 percent and no more than 50 percent.    
   
   
       12 . The method of  claim 11 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of about 37 percent.    
   
   
       13 . The method of  claim 8 , wherein: 
 the predetermined period of time is at least 5 minutes and no more than 300 minutes.    
   
   
       14 . The method of  claim 13 , wherein: 
 the predetermined period of time is at least 10 minutes and no more than 100 minutes.    
   
   
       15 . The method of  claim 14 , wherein: 
 the predetermined period of time is at least 15 minutes and no more than 40 minutes.    
   
   
       16 . The method of  claim 15 , wherein: 
 the predetermined period of time is at least 25 minutes and no more than 30 minutes.    
   
   
       17 . The method of  claim 8 , wherein: 
 the agitation level is quantified in terms of agitation frequency.    
   
   
       18 . The method of  claim 17 , wherein: 
 the agitation frequency is between 18 kHz and 2 MHz.    
   
   
       19 . The method of  claim 18 , wherein: 
 the agitation frequency is between 20 kHz and 1 MHz.    
   
   
       20 . The method of  claim 19 , wherein: 
 the agitation frequency is between 20 kHz and 100 kHz.    
   
   
       21 . The method of  claim 20 , wherein: 
 the agitation frequency is between 25 kHz and 50 kHz.    
   
   
       22 . The method of  claim 8 , wherein: 
 the agitation level is quantified in terms of agitation power.    
   
   
       23 . The method of  claim 22 , wherein: 
 the agitation power is between 1 W/gal and 100 W/gal.    
   
   
       24 . The method of  claim 23 , wherein: 
 the agitation power is between 2 W/gal and 50 W/gal.    
   
   
       25 . The method of  claim 24 , wherein: 
 the agitation power is between 5 W/gal and 40 W/gal.    
   
   
       26 . The method of  claim 25 , wherein: 
 the agitation power is between 10 W/gal and 30 W/gal.    
   
   
       27 . The method of  claim 26 , wherein: 
 the agitation power is between 20 W/gal and 30 W/gal.    
   
   
       28 . The method of  claim 27 , wherein: 
 the agitation power is about 25 W/gal.    
   
   
       29 . The method of  claim 1 , wherein: 
 the predetermined period of time is at least 5 hours and no more than 48 hours.    
   
   
       30 . The method of  claim 1 , wherein: 
 the molybdenum mask has a set of through holes.    
   
   
       31 . The method of  claim 1 , wherein: 
 the series of metals includes chrome, copper, gold and a lead/tin mixture.    
   
   
       32 . A method of cleaning a mask, comprising: 
 placing the mask in a cleaning solution; and    agitating the cleaning solution at a predetermined agitation level for a predetermined period of time.    
   
   
       33 . The method of  claim 32 , further comprising: 
 putting the mask in a container; and wherein    placing the mask in the cleaning solution includes placing the container in the cleaning solution.    
   
   
       34 . The method of  claim 33 , further comprising: 
 closing the container.    
   
   
       35 . The method of  claim 34 , further comprising: 
 receiving the mask.    
   
   
       36 . The method of  claim 32 , wherein: 
 the mask is a molybdenum mask.    
   
   
       37 . The method of  claim 32 , wherein: 
 the cleaning solution is a hydrochloric acid solution.    
   
   
       38 . The method of  claim 37 , wherein: 
 the cleaning solution is contained within a first vessel;    the first vessel is contained within a second vessel; and    the second vessel further contains an aqueous solution surrounding the first vessel.    
   
   
       39 . The method of  claim 38 , further comprising: 
 covering the first vessel with a lid.    
   
   
       40 . The method of  claim 37 , further comprising: 
 drying the mask with nitrogen.    
   
   
       41 . The method of  claim 40 , further comprising: 
 washing the mask with de-ionized water.    
   
   
       42 . The method of  claim 37 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 5 percent.    
   
   
       43 . The method of  claim 42 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 15 percent.    
   
   
       44 . The method of  claim 43 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 25 percent and no more than 50 percent.    
   
   
       45 . The method of  claim 44 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of about 37 percent.    
   
   
       46 . The method of  claim 37 , wherein: 
 the predetermined period of time is at least 5 minutes and no more than 300 minutes.    
   
   
       47 . The method of  claim 46 , wherein: 
 the predetermined period of time is at least 10 minutes and no more than 100 minutes.    
   
   
       48 . The method of  claim 47 , wherein: 
 the predetermined period of time is at least 15 minutes and no more than 40 minutes.    
   
   
       49 . The method of  claim 48 , wherein: 
 the predetermined period of time is at least 25 minutes and no more than 30 minutes.    
   
   
       50 . The method of  claim 46 , wherein: 
 the predetermined period of time is at least 10 minutes and no more than 100 minutes.    
   
   
       51 . The method of  claim 37 , wherein: 
 the agitation level is quantified in terms of agitation frequency.    
   
   
       52 . The method of  claim 51 , wherein: 
 the agitation frequency is between 18 kHz and 2 MHz.    
   
   
       53 . The method of  claim 52 , wherein: 
 the agitation frequency is between 20 kHz and 1 MHz.    
   
   
       54 . The method of  claim 53 , wherein: 
 the agitation frequency is between 20 kHz and 100 kHz.    
   
   
       55 . The method of  claim 54 , wherein: 
 the agitation frequency is between 25 kHz and 50 kHz.    
   
   
       56 . The method of  claim 55 , wherein: 
 the agitation frequency is between 25 kHz and 40 kHz.    
   
   
       57 . The method of  claim 37 , wherein: 
 the agitation level is quantified in terms of agitation power.    
   
   
       58 . The method of  claim 57 , wherein: 
 the agitation power is between 1 W/gal and 100 W/gal.    
   
   
       59 . The method of  claim 58 , wherein: 
 the agitation power is between 2 W/gal and 50 W/gal.    
   
   
       60 . The method of  claim 59 , wherein: 
 the agitation power is between 5 W/gal and 40 W/gal.    
   
   
       61 . The method of  claim 60 , wherein: 
 the agitation power is between 10 W/gal and 30 W/gal.    
   
   
       62 . The method of  claim 61 , wherein: 
 the agitation power is between 20 W/gal and 30 W/gal.    
   
   
       63 . The method of  claim 57 , wherein: 
 the agitation power is about 25 W/gal.    
   
   
       64 . The method of  claim 37 , wherein: 
 the container is made of Teflon®.    
   
   
       65 . The method of  claim 37 , wherein: 
 the container is made of a material essentially inert with respect to hydrochloric acid.    
   
   
       66 . The method of  claim 37 , wherein: 
 the container is made of high-density polyethylene.    
   
   
       67 . The method of  claim 37 , wherein: 
 the method is performed within an environment having a temperature between 20° C. and 70° C.    
   
   
       68 . The method of  claim 67 , wherein: 
 the method is performed within an environment having a temperature between 20° C. and 50° C.    
   
   
       69 . The method of  claim 68 , wherein: 
 the method is performed within an environment having a temperature between 25° C. and 40° C.    
   
   
       70 . The method of  claim 68 , wherein: 
 the method is performed within an environment having a temperature of about 25° C.    
   
   
       71 . The method of  claim 68 , wherein: 
 the method is performed within an environment having a temperature of about 30° C.    
   
   
       72 . The method of  claim 68 , wherein: 
 the method is performed within an environment having a temperature of about 40° C.    
   
   
       73 . A method of cleaning a mask, comprising: 
 putting the mask in a container;    placing the container in a cleaning solution; and wherein the cleaning solution is contained within a first vessel;    the first vessel is contained within a second vessel; and    the second vessel further contains an aqueous solution surrounding the first vessel.    
   
   
       74 . The method of  claim 73 , further comprising: 
 closing the container.    
   
   
       75 . The method of  claim 74 , further comprising: 
 covering the first vessel with a lid.    
   
   
       76 . The method of  claim 75 , further comprising: 
 washing the mask with de-ionized water.    
   
   
       77 . The method of  claim 76 , further comprising: 
 drying the mask with nitrogen.    
   
   
       78 . The method of  claim 77 , further comprising: 
 receiving the mask.    
   
   
       79 . The method of  claim 73 , wherein: 
 the cleaning solution is a hydrochloric acid solution.    
   
   
       80 . The method of  claim 79 , wherein: 
 the mask is a molybdenum mask.    
   
   
       81 . The method of  claim 75 , further comprising: 
 agitating the cleaning solution.    
   
   
       82 . An apparatus for cleaning masks, comprising: 
 a first vessel having an open top;    a second vessel having an open top, the second vessel containing the first vessel; and    an agitator within the second vessel.    
   
   
       83 . The apparatus of  claim 82 , further comprising: 
 an aqueous solution within the second vessel; and    a cleaning solution within the first vessel.    
   
   
       84 . The apparatus of  claim 83 , further comprising: 
 a lid sized to cover the open top of the first vessel.    
   
   
       85 . The apparatus of  claim 83 , further comprising: 
 a relatively inert container sized to hold a plurality of masks and sized to fit within the first vessel.    
   
   
       86 . The apparatus of  claim 85 , wherein: 
 the container has a clamshell form.    
   
   
       87 . The apparatus of  claim 85 , wherein: 
 the container has a container vessel with an open top and a container lid sized to cover the open top of the container vessel.    
   
   
       88 . The apparatus of  claim 83 , wherein: 
 the cleaning solution is an acid.    
   
   
       89 . The apparatus of  claim 88 , wherein: 
 the cleaning solution is hydrochloric acid.    
   
   
       90 . The apparatus of  claim 83 , wherein: 
 the cleaning solution is a base.    
   
   
       91 . The apparatus of  claim 90 , wherein: 
 the cleaning solution is sodium hydroxide.    
   
   
       92 . An apparatus for cleaning masks, comprising: 
 a first means for cleaning the masks;    a second means for holding the masks;    a third means for agitating the first means and the second means;    a fourth means for containing the first means;    a fifth means for surrounding the fourth means; and    a sixth means for holding the fifth means and the third means.    
   
   
       93 . A method of cleaning a molybdenum mask having a series of metals deposited thereon, comprising: 
 placing the molybdenum mask in a cleaning solution; and    removing the molybdenum mask from the cleaning solution after a predetermined period of time.    
   
   
       94 . The method of  claim 93 , further comprising: 
 agitating the cleaning solution at a predetermined agitation level for a predetermined period of time.    
   
   
       95 . The method of  claim 94 , further comprising: 
 putting the molybdenum mask in a container; and wherein    placing the molybdenum mask in the cleaning solution includes placing the container in the cleaning solution.    
   
   
       96 . The method of  claim 95 , further comprising: 
 closing the container.    
   
   
       97 . The method of  claim 96 , further comprising: 
 receiving the mask.    
   
   
       98 . The method of  claim 93 , wherein: 
 the cleaning solution is a hydrochloric acid solution.    
   
   
       99 . The method of  claim 98 , wherein: 
 the cleaning solution is contained within a first vessel;    the first vessel is contained within a second vessel; and    the second vessel further contains an aqueous solution surrounding the first vessel.    
   
   
       100 . The method of  claim 99 , further comprising: 
 covering the first vessel with a lid.    
   
   
       101 . The method of  claim 100 , further comprising: 
 drying the mask with nitrogen.    
   
   
       102 . The method of  claim 101 , further comprising: 
 washing the mask with de-ionized water.    
   
   
       103 . The method of  claim 98 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 5 percent.    
   
   
       104 . The method of  claim 93 , wherein: 
 the series of metals includes chrome, copper, gold and a lead/tin mixture.    
   
   
       105 . A method of cleaning a molybdenum mask having a series of metals including chrome, copper, gold and a lead/tin mixture deposited thereon, comprising: 
 placing the molybdenum mask in a cleaning solution; and    removing the molybdenum mask from the cleaning solution after a predetermined period of time.    
   
   
       106 . The method of  claim 105 , further comprising: 
 agitating the cleaning solution at a predetermined agitation level for a predetermined period of time.    
   
   
       107 . The method of  claim 106 , further comprising: 
 putting the molybdenum mask in a container; and wherein placing the molybdenum mask in the cleaning solution includes placing the container in the cleaning solution.    
   
   
       108 . The method of  claim 107 , further comprising: 
 receiving the mask.    
   
   
       109 . The method of  claim 105 , wherein: 
 the cleaning solution is a hydrochloric acid solution.    
   
   
       110 . The method of  claim 109 , wherein: 
 the cleaning solution is contained within a first vessel;    the first vessel is contained within a second vessel; and    the second vessel further contains an aqueous solution surrounding the first vessel.    
   
   
       111 . The method of  claim 110 , further comprising: 
 covering the first vessel with a lid.    
   
   
       112 . The method of  claim 111 , further comprising: 
 drying the mask with nitrogen.    
   
   
       113 . The method of  claim 112 , further comprising: 
 washing the mask with de-ionized water.    
   
   
       114 . The method of  claim 105 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 5 percent.    
   
   
       115 . The method of  claim 113 , wherein: 
 the cleaning solution is a hydrochloric acid solution having an acid concentration of at least 5 percent.

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