Patterned magnetic recording medium and method of manufacturing the same

Abstract

Provided are a patterned magnetic recording medium which has an extremely planarized surface and a method of manufacturing the same. The medium includes a patterned magnetic layer including a plurality of magnetic columns that are arranged with a predetermined pitch therebetween; a substrate that supports the patterned magnetic layer; and a boundary layer, which is filled in gaps between the magnetic columns of the patterned magnetic layer. Thus, an air bearing due to stable airflow is created over the magnetic layer, and magnetic recording/reproduction are easily achieved at ultrahigh density.

1 . A patterned magnetic recording medium comprising: 
 a patterned magnetic layer including a plurality of magnetic columns that are arranged with a predetermined pitch;    a substrate, which supports the patterned magnetic layer; and    a boundary layer, which is filled in gaps between the magnetic columns of the patterned magnetic layer.    
     
     
         2 . The medium of  claim 1 , further comprising a buffer layer disposed between the patterned magnetic layer and the substrate.  
     
     
         3 . The medium of  claim 2 , further comprising a soft magnetic under layer disposed between the buffer layer and the substrate.  
     
     
         4 . The medium of  claim 1 , wherein the magnetic columns are formed of a tetracyanoethanide (TCNE)-based material.  
     
     
         5 . The medium of  claim 1 , wherein the boundary layer is formed of one of silicon oxide (SiO 2 ) and silicon oxynitride (Si 3 N 4 ).  
     
     
         6 . A method of manufacturing a patterned magnetic recording medium, the method comprising: 
 preparing a substrate;    forming a boundary layer on the substrate, the boundary layer having wells that are arranged with a predetermined pitch;    filling the wells with a magnetic material layer by coating the magnetic material layer on the boundary layer; and    planarizing the boundary layer and a magnetic layer including magnetic columns filled in the wells of the boundary layer.    
     
     
         7 . The method of  claim 6 , wherein the preparing of the substrate comprises forming a soft magnetic under layer and a buffer layer on the substrate.  
     
     
         8 . The method of  claim 6 , wherein the forming of the boundary layer comprises: 
 coating a nonmagnetic material on the substrate to a predetermined thickness; and    forming a boundary layer having wells by patterning the nonmagnetic material in a predetermined pattern.    
     
     
         9 . The method of  claim 6 , wherein the coating of the magnetic material layer comprises annealing the coated magnetic material layer at a predetermined temperature.  
     
     
         10 . The method of  claim 7 , wherein the coating of the magnetic material layer comprises annealing the coated magnetic material layer at a predetermined temperature.  
     
     
         11 . The method of  claim 8 , wherein the coating of the magnetic material layer comprises annealing the coated magnetic material layer at a predetermined temperature.  
     
     
         12 . The method of  claim 6 , wherein the planarizing of the barrier layer and the magnetic layer is performed using plasma etching.  
     
     
         13 . The method of  claim 6 , wherein the boundary layer is formed of one of silicon oxide (SiO 2 ) and silicon oxynitride (Si 3 N 4 ), which are dielectric materials.  
     
     
         14 . The method of  claim 8 , wherein the boundary layer is formed of one of silicon oxide (SiO 2 ) and silicon oxynitride (Si 3 N 4 ), which are dielectric materials.  
     
     
         15 . The method of  claim 8 , wherein the boundary layer is formed using one selected from the group consisting of chemical vapor deposition, plasma-enhanced chemical vapor deposition, and physical vapor deposition.  
     
     
         16 . The method of  claim 6 , wherein the magnetic material layer is formed of tetracyanoethanide (TCNE)-based magnetic polymer.  
     
     
         17 . The method of  claim 16 , wherein the magnetic material layer is formed using one of spin coating and chemical vapor deposition.  
     
     
         18 . The method of  claim 17 , further comprising annealing the magnetic material layer at a temperature ranging from 100 to 300° C. to allow the magnetic material layer to reflow.