Magnetic control oscillation-scanning sputter

Abstract

A magnetic control oscillation-scanning sputter includes a sputtering target, a base and an elongated magnet. The sputtering target has a surface with a target located thereon corresponding to the base. The target being sputtered is deposited on the base. The elongated magnet is located on the rear side of the sputtering target and moved reciprocately to control the deposition of the target. The elongated magnet has two ends each which is coupled with a magnetic erasing means for reducing excessive magnetic field intensity at the two ends to avoid affecting the sputter quality.

1 - 19 . (Canceled)  
   
   
       20 . A method of depositing a metal film in a chamber, comprising the steps of: 
 a) providing a sputtering target having a front side with a target located thereon;    b) providing a base corresponding to the sputtering target for depositing the target being sputtered;    c) locating an elongated magnet on a rear side of the sputtering target being moved reciprocately to control deposition of the target on the surface of the base; and    d) arranging a magnetic erasing device at two ends of the elongated magnet for reducing the magnetic filed intensity at the two ends thereof.    
   
   
       21 . The method of  claim 20 , wherein the chamber is vacuumized by a vacuum pump.  
   
   
       22 . The method of  claim 20 , further comprising plasma ions with positive charges being introduced during sputtering processes.  
   
   
       23 . The method of  claim 22 , wherein the plasma ions are argon ions with a concentration greater than 95%.  
   
   
       24 . The method of  claim 20 , wherein the magnetic erasing device is made of a magnetic material selected from the group consisting of iron, cobalt and nickel.  
   
   
       25 . The method of  claim 20 , wherein the magnetic erasing device is formed to a double hook or a dog bone structure.  
   
   
       26 . A thin film transistor having a metal film in accordance with the process of  claim 20 .  
   
   
       27 . A liquid crystal display having a metal film in accordance with the process of  claim 20.