Pressure control apparatus and method of establishing a desired level or pressure within at least one processing chamber

Abstract

A desired level of pressure is established in at least one chamber that forms part of a closed atmosphere, such as in a semiconductor device processing facility. A pressure control system includes at least one space increase/decrease device that has a partition which is movable to increase and/or decrease the volume of free space within the chamber(s), a pressure sensor for detecting the pressure within the chamber(s), and a controller for controlling the movement of the partition based on the detected pressure. A chamber is provided with positive or negative pressure to increase or decrease the pressure therein while the pressure in the chamber is monitored. As soon as the pressure within the chamber equals a predetermined pressure, the providing of the positive or negative pressure is stopped. The partition is moved to vary the effective volume of free space in the chamber(s) to change the pressure in the chamber from the predetermined pressure to the desired pressure.

1 - 21 . (cancelled)  
   
   
       22 . A method of establishing a desired level of pressure in a chamber, the method comprising: 
 monitoring the pressure within the chamber;    providing the chamber with positive or negative pressure to increase or decrease the pressure within the chamber, while continuing to monitor the pressure;    determining whether the pressure within the chamber equals a predetermined level of pressure while the pressure in the chamber is being increased or decreased;    as soon as the pressure within the chamber equals the predetermined pressure, stopping said providing of positive or negative pressure, whereby the pressure in the chamber becomes static; and    once the pressure in the chamber has become static, varying the effective volume of free space in the chamber by an amount that changes the pressure in the chamber from the predetermined pressure to the desired pressure.    
   
   
       23 . The method as claimed in  claim 22 , wherein said varying comprises moving a partition, that is exposed to and delimits the interior of the chamber, relative to fixed sidewalls of the chamber.  
   
   
       24 . The method as claimed in  claim 23 , and further comprising moving the partition in a direction that reduces the volume of free space within the chamber during said increasing or decreasing of the pressure within the chamber so as to decrease the amount of time necessary to produce the predetermined level of pressure in the chamber.  
   
   
       25 . A method of controlling the pressure in a plurality of chambers connected to one another such that the interiors of the chambers can be placed in open communication with one another, the method comprising: 
 monitoring the pressure within the chambers;    providing one of the chambers with positive or negative pressure to increase or decrease the pressure within that chamber, while continuing to monitor the pressure within the chambers;    determining whether the pressure within said one of the chambers equals a predetermined level of pressure while the pressure in that chamber is being increased or decreased;    as soon as the pressure within the chamber equals the predetermined pressure, stopping said providing of positive or negative pressure; and    balancing the levels of pressure within the chambers, said balancing comprising increasing the volume of the free space in one of the chambers while decreasing the volume of free space in the other of the chambers.    
   
   
       26 . The method as claimed in  claim 25 , and further comprising providing at least one passageway that extends between the chambers, and a respective partition disposed in each said passageway, each said partition being exposed to and delimiting the interiors of both of the chambers and being supported so as to be movable relative to fixed sidewalls of the chambers, and wherein said balancing the levels of pressure within the chambers comprises moving each said partition relative to the fixed walls.  
   
   
       27 . The method as claimed in  claim 26 , wherein said predetermined level of pressure is within a range that allows the movement of each said partition to effect the total changes in volumes necessary to achieve the balance in the levels of pressure in the chambers.  
   
   
       28 . The method as claimed in  claim 26 , wherein said balancing the levels of pressure within the chambers further comprises supplying purge gas into one of the chambers.  
   
   
       29 . The method as claimed in  claim 26 , and further comprising fixing each said partition in place during said providing of positive or negative pressure, releasing said partition once said providing of positive or negative pressure has been stopped, and subsequently fixing each said partition in place once the levels of pressure within the chambers have become equal.  
   
   
       30 . The method as claimed in  claim 26 , wherein said monitoring the pressure within the chambers comprises monitoring the load on each said partition.