Production method for sintered metal-ceramic layered compact and production method for thermal stress relief pad

Abstract

The present invention provides a production method for a sintered metal-ceramic layered compact, comprising steps of: filling and layering a metal powder and a ceramic powder, or filling and layering a metal powder, a mixed powder of a metal powder and a ceramic powder, and a ceramic powder; forming a green compact of the layered powders by compacting the layered powders; and sintering a layer including the metal of the green compact at a temperature of lower than a melting point of the metal by heating by irradiation of microwaves in a non-oxidizing atmosphere.

1 . A production method for a sintered metal-ceramic layered compact, comprising steps of: 
 filling and layering a metal powder and a ceramic powder, or    filling and layering a metal powder, a mixed powder of a metal powder and a ceramic powder, and a ceramic powder;    forming a green compact of the layered powders by compacting the layered powders; and    sintering a layer including the metal of the green compact at a temperature of lower than a melting point of the metal by heating by irradiation of microwaves in a non-oxidizing atmosphere.    
     
     
         2 . The production method for a sintered metal-ceramic layered compact according to  claim 1 , 
 wherein the production method uses a microwave heating furnace provided with a cooling device, and    a side of the metal layer of the compact is contacted to the cooling device of the microwave heating furnace in the step of sintering the green compact.    
     
     
         3 . The production method for a sintered metal-ceramic layered compact according to  claim 1 , 
 wherein the metal is selected from a group consisting of copper, aluminum, silver, and nickel, or a mixture thereof, and    the ceramic is alumina or aluminum nitride.    
     
     
         4 . The production method for a sintered metal-ceramic layered compact according to  claim 1 , 
 wherein the ceramic powder includes at least one low melting point powder selected from a group consisting of boric acid, anhydrous borax, sodium triboric acid, sodium pentaboric acid, and soda-lime glass, and    the low melting point powder is mixed in a ratio of not more than 50 mass % in the ceramic powder.    
     
     
         5 . The production method for a sintered metal-ceramic layered compact according to  claim 1 , 
 wherein the ceramic powder includes at least one binder selected from a group consisting of methyl cellulose (MC), polyvinyl alcohol (PVA), ammonium alginic acid, carboxymethyl cellulose (CMC), hydroxyethyl cellulose (HEC), and polyvinyl pyrrolidone (PVP), and    the binder is mixed in a ratio of not more than 1 mass % in the ceramic powder.    
     
     
         6 . The production method for a sintered metal-ceramic layered compact according to  claim 5 , 
 wherein the mixed powder of the ceramic powder and the binder is granulated to have a particle diameter of not more than 150 μm.    
     
     
         7 . The production method for a sintered metal-ceramic layered compact according to  claim 1 , 
 wherein the mixed powder of the metal powder and the ceramic powder has two or more mixed powders which have different compositions from each other, wherein    the metal is mixed in a volume not less than that of the ceramic powder in the mixed powder disposed on the side of the metal layer, and    the ceramic powder is mixed in a volume not less than that of the metal powder in the mixed powder disposed on the side of the ceramic layer.    
     
     
         8 . A production method for a sintered metal-ceramic layered compact, comprising steps of: 
 filling and layering a metal powder and a ceramic powder, or    filling and layering a metal powder, a mixed powder of a metal powder and a ceramic powder, and a ceramic powder;    forming a green compact of the layered powders by compacting the layered powders;    presintering a layer including the metal of the compact at a temperature lower than a melting point of the metal by heating by irradiation of microwaves in a non-oxidizing atmosphere; and    resintering the presintered compact at a temperature lower than a melting point of the metal in a non-oxidizing atmosphere.    
     
     
         9 . The production method for a sintered metal-ceramic layered compact according to  claim 8 , 
 wherein the production method uses a microwave heating furnace provided with a cooling device, and    a side of the metal layer of the compact is contacted to the cooling device of the microwave heating furnace in the step of sintering the compact.    
     
     
         10 . The production method for a sintered metal-ceramic layered compact according to  claim 8 , 
 wherein the metal is selected from a group consisting of copper, aluminum, silver, and nickel, or a mixture thereof, and    the ceramic is alumina or aluminum nitride.    
     
     
         11 . The production method for a sintered metal-ceramic layered compact according to  claim 8 , 
 wherein the ceramic powder includes at least one low melting point powder selected from a group consisting of boric acid, anhydrous borax, sodium triboric acid, sodium pentaboric acid, and soda-lime glass, and    the low melting point powder is mixed in a ratio of not more than 50 mass % in the ceramic powder.    
     
     
         12 . The production method for a sintered metal-ceramic layered compact according to  claim 8 , 
 wherein the ceramic powder includes at least one binder selected from a group consisting of methyl cellulose (MC), polyvinyl alcohol (PVA), ammonium alginic acid, carboxymethyl cellulose (CMC), hydroxyethyl cellulose (HEC), and polyvinyl pyrrolidone (PVP), and    the binder is mixed in a ratio of not more than 1 mass % in the ceramic powder.    
     
     
         13 . The production method for a sintered metal-ceramic layered compact according to  claim 12 , 
 wherein the mixed powder of the ceramic powder and the binder is granulated to have a particle diameter of not more than 150 μm.    
     
     
         14 . The production method for a sintered metal-ceramic layered compact according to  claim 8 , 
 wherein the mixed powder of the metal powder and the ceramic powder has two or more mixed powders which have different compositions from each other, wherein    the metal is mixed in a volume not less than that of the ceramic powder in the mixed powder disposed on the side of the metal layer, and    the ceramic powder is mixed in a volume not less than that of the metal powder in the mixed powder disposed on the side of the ceramic layer.    
     
     
         15 . A production method for a sintered metal-ceramic layered compact, comprising steps of: 
 filling and layering a metal powder and a ceramic powder, or    filling and layering a metal powder, a mixed powder of a metal powder and a ceramic powder, and a ceramic powder;    forming a green compact of the layered powders by compacting the layered powders; and    sintering the compact at a temperature lower than a melting point of the metal in a non-oxidizing atmosphere.    
     
     
         16 . The production method for a sintered metal-ceramic layered compact according to  claim 15 , 
 wherein the metal is selected from a group consisting of copper, aluminum, silver, and nickel, or a mixture thereof, and    the ceramic is alumina or aluminum nitride.    
     
     
         17 . The production method for a sintered metal-ceramic layered compact according to  claim 15 , 
 wherein the ceramic powder includes at least one low melting point powder selected from a group consisting of boric acid, anhydrous borax, sodium triboric acid, sodium pentaboric acid, and soda-lime glass, and    the low melting point powder is mixed in a ratio of not more than 50 mass % in the ceramic powder.    
     
     
         18 . The production method for a sintered metal-ceramic layered compact according to  claim 15 , 
 wherein the ceramic powder includes at least one binder selected from a group consisting of methyl cellulose (MC), polyvinyl alcohol (PVA), ammonium alginic acid, carboxymethyl cellulose (CMC), hydroxyethyl cellulose (EC), and polyvinyl pyrrolidone (PVP), and    the binder is mixed in a ratio of not more than 1 mass % in the ceramic powder.    
     
     
         19 . The production method for a sintered metal-ceramic layered compact according to  claim 18 , 
 wherein the mixed powder of the ceramic powder and the binder is granulated to have a particle diameter of not more than 150 μm.    
     
     
         20 . The production method for a sintered metal-ceramic layered compact according to  claim 15 , 
 wherein the mixed powder of the metal powder and the ceramic powder has two or more mixed powders which have different compositions from each other, wherein    the metal is mixed in a volume not less than that of the ceramic powder in the mixed powder disposed on the side of the metal layer, and    the ceramic powder is mixed in a volume not less than that of the metal powder in the mixed powder disposed on the side of the ceramic layer.    
     
     
         21 . A production method for a thermal stress relief pad for thermoelectric conversion elements, comprising steps of: 
 filling and layering an electrical insulating powder ( 30 C) and a mixed powder ( 30 B) of a metal powder and an electrical insulating powder in turn in a cavity of a die, and forming a green compact ( 31 ) of the layered powders by compacting the layered powders, or    filling and layering an electrical insulating powder ( 30 C), a mixed powder ( 30 B) of a metal powder and an electrical insulating powder, and a metal powder ( 30 A) in turn in a cavity of a die, and forming a green compact ( 32 ) of the layered powders by compacting the layered powders; and    contacting an electrical insulating layer, which is made of the electrical insulating powder ( 30 C) in either the green compact ( 31 ) or the green compact ( 32 ), to a surface of an electrical insulating layer of the electrical insulating powder ( 30 C) in either the green compact ( 31 ) or the green compact ( 32 ); or    filling a mixed powder ( 30 B) of a metal powder and a ceramic powder in a cavity of a die, and forming a green compact ( 33 ) by compacting the powder, and contacting an electrical insulating layer, which is made of the electrical insulating powder ( 30 C) in either the green compact ( 31 ) or the green compact ( 32 ), to a surface of the green compact ( 33 ), or    filling and layering a metal powder ( 30 A) and a mixed powder ( 30 B) of a metal powder and an electrical insulating powder in turn in a cavity of a die, and forming a green compact ( 34 ) of the layered powders by compacting the layered powders, and contacting an electrical insulating layer, which is made of the electrical insulating powder ( 30 C) in either the green compact ( 31 ) or the green compact ( 32 ), to a surface of the green compact ( 34 ); and    sintering the green compacts, which are in the above contacting state to each other, at a temperature lower than a melting point of the included metal in a non-oxidizing atmosphere.    
     
     
         22 . The production method for a thermal stress relief pad for thermoelectric conversion elements, according to  claim 21 , 
 wherein the electrical insulating powder is a mixed powder ( 30 C 1 ), a mixed powder ( 30 C 2 ), or a glass frit powder ( 30 C 3 ),    wherein the mixed powder ( 30 C 1 ) is composed of one of an alumina powder and an aluminum nitride powder, and one low melting point electrical insulating powder selected from a group consisting of boric acid, sodium boric acid, and soda-lime glass, the low melting point electrical insulating powder being mixed in a ratio of not more than 50 mass %,    the mixed powder ( 30 C 2 ) is composed of one of an alumina powder and an aluminum nitride powder and a glass frit which is mixed in a ratio of not less than 0.1 mass %, and    the metal powder ( 30 A) is selected from a group consisting copper, aluminum, silver, and nickel, or a mixture thereof.    
     
     
         23 . A production method for a thermal stress relief pad for thermoelectric conversion elements, comprising steps of: 
 filling and layering a mixed powder ( 30 B) of a metal powder and an electrical insulating powder, an electrical insulating powder ( 30 C), and a mixed powder ( 30 B) of a metal powder and an electrical insulating powder in turn in a cavity of a die, or    filling and layering a metal powder ( 30 A), a mixed powder ( 30 B) of a metal powder and an electrical insulating powder, an electrical insulating powder ( 30 C), a mixed powder ( 30 B) of a metal powder and an electrical insulating powder, and a metal powder ( 30 A) in turn in a cavity of a die;    forming a green compact of the layered powders by compacting the layered powders;    sintering the green compact at a temperature lower than a melting point of the included metal powder in a non-oxidizing atmosphere; and    removing a side surface portion of the sintered compact by cutting or by polishing.    
     
     
         24 . The production method for a thermal stress relief pad for thermoelectric conversion elements, according to  claim 23 , 
 wherein the electrical insulating powder is a mixed powder ( 30 C 1 ), a mixed powder ( 30 C 2 ), or a glass frit powder ( 30 C 3 ),    wherein the mixed powder ( 30 C 1 ) is composed of one of an alumina powder and an aluminum nitride powder, and one low melting point electrical insulating powder selected from a group consisting of boric acid, sodium boric acid, and soda-lime glass, one low melting point electrical insulating powder being mixed in a ratio of not more than 50 mass %,    the mixed powder ( 30 C 2 ) is composed of one of an alumina powder and an aluminum nitride powder and a glass frit which is mixed in a ratio of not less than 0.1 mass %, and    the metal powder ( 30 A) is selected from a group consisting copper, aluminum, silver, and nickel, or a mixture thereof.    
     
     
         25 . A production method for a thermal stress relief pad for thermoelectric conversion elements, comprising steps of: 
 filling and layering an electrical insulating material powder ( 40 A) for an electrical insulating layer and a mixed powder ( 40 B) of a metal powder and an electrical insulating material powder in a die, or    filling and layering an electrical insulating material powder ( 40 A) for an electrical insulating layer, a mixed powder ( 40 B) of a metal powder and an electrical insulating material powder, and a metal powder ( 40 C) in a die;    forming a green compact of the layered powders by compacting the layered powders; and    sintering the green compact at a temperature lower than a melting point of the included metal powder in a non-oxidizing atmosphere,    wherein the metal powder is selected from a group consisting of copper, aluminum, silver and nickel, or a mixture thereof,    the electrical insulating material powder ( 40 A) is selected from a group consisting of a glass frit ( 40 A 1 ) and a mixed powder ( 40 A 2 ) of a ceramic powder and a glass frit, the ceramic powder being composed of alumina or aluminum nitride,    the electrical insulating material powder ( 40 A) included in the mixed powder ( 40 B) is selected from a group consisting of a ceramic powder, the glass frit ( 40 A 1 ), and a mixed powder ( 40 A 2 ) of a ceramic powder and a glass frit, the ceramic powder being composed of alumina or aluminum nitride.    
     
     
         26 . The production method for a thermal stress relief pad for thermoelectric conversion elements according to  claim 25 , 
 wherein the electrical insulating material powder ( 40 A) is a mixed powder ( 40 A 2 ) of the ceramic powder and the glass frit, and    the glass frit is mixed in a ratio of not less than 0.1 mass % in the mixed powder ( 40 A 2 ).    
     
     
         27 . The production method for a thermal stress relief pad for thermoelectric conversion elements according to  claim 25 , 
 wherein the mixed powder ( 40 B), the electrical insulating material powder ( 40 A) and the mixed powder ( 40 B) are layered in turn in the die in the step of filling and layering powders, or    the metal powder ( 40 C), the mixed powder ( 40 B), the electrical insulating material powder ( 40 A), the mixed powder ( 40 B), and the metal powder ( 40 C) are layered in turn in the die in the step of filling and layering the powders, and    the layered compact of the powders are integrally compacted in the step of compacting.    
     
     
         28 . The production method for a thermal stress relief pad for thermoelectric conversion elements according to  claim 25 , 
 wherein the mixed powder ( 40 B) and the electrical insulating material powder ( 40 A) are layered in turn in the die in the step of filling and layering powders, or    the metal powder ( 40 C), the mixed powder ( 40 B) and the electrical insulating material powder ( 40 A) are layered in turn in the die in the step of filling and layering powders,    the layered compact of the powders are integrally compacted in the step of compacting, whereby two green compacts are obtained, and    the green compacts are sintered in a state in which surfaces of layers of the electrical insulating material powder ( 40 A) are contacted to each other in the sintering step, thereby being connected.    
     
     
         29 . The production method for a thermal stress relief pad for thermoelectric conversion elements according to  claim 25 , wherein 
 the electrical insulating material powder ( 40 A) includes at least one binder selected from a group consisting of methyl cellulose (MC), polyvinyl alcohol (PVA), ammonium alginic acid, carboxymethyl cellulose (CMC), hydroxyethyl cellulose (HEC), and polyvinyl pyrrolidone (PVP),    wherein the binding agent is mixed in a ratio of not more than 1 mass %.    
     
     
         30 . The production method for a thermal stress relief pad for thermoelectric conversion elements according to  claim 25 , wherein 
 the binder is mixed into the electrical insulating material powder ( 40 A) in a middle portion layer in a thickness direction, and    the mixed powder is granulated so as to have a particle diameter of not more than 150 μm.    
     
     
         31 . The production method for a thermal stress relief pad for thermoelectric conversion elements according to  claim 25 , 
 wherein the mixed powder ( 40 B) has two or more mixed powders which have different composition from each other,    wherein the metal powder ( 40 C) is mixed in a volume not less than that of the electrical insulating material powder ( 40 A) on the side of the metal layer formed on an end face, and    the electrical insulating material powder ( 40 A) is mixed in a volume more than that of the metal powder ( 40 C) in a electrical insulating layer formed at a middle portion in a thickness direction.    
     
     
         32 . A production method for a thermal stress relief pad for thermoelectric conversion elements, comprising steps of: 
 filling a mixed powder ( 40 B) of a metal powder and an electrical insulating material powder in a die, or    filling and layering a mixed powder ( 40 B) of a metal powder and an electrical insulating material powder, and a metal powder ( 40 C) in turn in a die;    forming a green compact of the layered powders by compacting the layered powders, whereby two green compacts of the layered powders are obtained;    coating an electrical insulating material powder ( 40 A) on a surface of a layer of the mixed powder ( 40 B) of one of the green compacts; and    connecting the green compacts via the electrical insulating material powder ( 40 A) by sintering.    
     
     
         33 . The production method for a thermal stress relief pad for thermoelectric conversion elements, according to  claim 32 , 
 wherein the electrical insulating material powder ( 40 A) coated on a surface of a layer of the mixed powder ( 40 B) is dispersed in a liquid so as to be made into slurry.    
     
     
         34 . The production method for a thermal stress relief pad for thermoelectric conversion elements according to  claim 32 , 
 wherein the mixed powder ( 40 B) has two or more mixed powders which have different composition from each other,    wherein the metal powder ( 40 C) is mixed in a volume not less than that of the electrical insulating material powder ( 40 A) on the side of the metal layer formed on an end face, and    the electrical insulating material powder ( 40 A) is mixed in a volume more than that of the metal powder ( 40 C) in an electrical insulating layer formed at a middle portion in a thickness direction.