US2005000805A1PendingUtilityA1

Sputtering device

41
Priority: Jun 18, 2003Filed: Jun 10, 2004Published: Jan 6, 2005
Est. expiryJun 18, 2023(expired)· nominal 20-yr term from priority
Inventors:Nobuyuki Takahashi
H01J 37/3441H01J 37/3435H01J 37/3408
41
PatentIndex Score
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Claims

Abstract

The invention is, for the purpose of putting on or taking off a target and an earth shield easily without spoiling a vacuum condition, to provide a sputtering device comprising at least a vacuum container, a substrate holder installing in said vacuum container, a substrate set on said substrate holder, a target using opposite to said substrate and a sputtering electrode, wherein: said sputtering electrode is constituted of: an electrode base portion having a first screw portion formed on an outer circumferential surface thereof; an electrode body portion having a second screw portion engaging with said first screw portion and having a third screw portion; a back plate portion having: a fourth screw portion engaging with said third screw portion and installing said target; and an earth shield portion provided around said electrode base portion, said electrode body portion and said back plate portion at a specific space.

Claims

exact text as granted — not AI-modified
1 . A sputtering device comprising at least a vacuum container, a substrate holder installing in said vacuum container, a substrate set on said substrate holder, a target using opposite to said substrate and a sputtering electrode, wherein: 
 said sputtering electrode is constituted of:    an electrode base portion having a first screw portion formed on an outer circumferential surface thereof;    an electrode body portion having a second screw portion engaging with said first screw portion and having a third screw portion;    a back plate portion having a fourth screw portion engaging with said third screw portion and installing said target; and    an earth shield portion provided around said electrode base portion, said electrode body portion and said back plate portion at a specific space.    
   
   
       2 . A sputtering device according to  claim 1 , wherein: 
 magnets are arranged between said electrode body portion and said electrode portion.    
   
   
       3 . A sputtering device according to  claim 1 , wherein: 
 cooling water is supplied between said back plate portion and said electrode body portion.    
   
   
       4 . A sputtering device according to  claim 1 , wherein: 
 said first screw portion is an outer spiral; and    said second screw portion is an inner spiral.    
   
   
       5 . A sputtering device according to  claim 1 , wherein: 
 said third screw portion is formed in a circular groove portion concaving in an axial direction from an end surface of said electrode body portion; and    said fourth screw portion is formed on a circular wall portion projecting in an axial direction from said back plate portion.    
   
   
       6 . A sputtering device according to  claim 1 , wherein: 
 said earth shield portion is secured by engaging a fifth screw portion formed on said vacuum container or a projecting portion of said vacuum container with a sixth screw portion formed on an inner circumferential end portion thereof.    
   
   
       7 . A sputtering device according to  claim 2 , wherein: 
 cooling water is supplied between said back plate portion and said electrode body portion.    
   
   
       8 . A sputtering device according to  claim 2 , wherein: 
 said first screw portion is an outer spiral; and    said second screw portion is an inner spiral.    
   
   
       9 . A sputtering device according to  claim 2 , wherein: 
 said third screw portion is formed in a circular groove portion concaving in an axial direction from an end surface of said electrode body portion; and    said fourth screw portion is formed on a circular wall portion projecting in an axial direction from said back plate portion.    
   
   
       10 . A sputtering device according to  claim 2 , wherein: 
 said earth shield portion is secured by engaging a fifth screw portion formed on said vacuum container or a projecting portion of said vacuum container with a sixth screw portion formed on an inner circumferential end portion thereof.    
   
   
       11 . A sputtering device according to  claim 3 , wherein: 
 said first screw portion is an outer spiral; and    said second screw portion is an inner spiral.    
   
   
       12 . A sputtering device according to  claim 3 , wherein: 
 said third screw portion is formed in a circular groove portion concaving in an axial direction from an end surface of said electrode body portion; and    said fourth screw portion is formed on a circular wall portion projecting in an axial direction from said back plate portion.    
   
   
       13 . A sputtering device according to  claim 3 , wherein: 
 said earth shield portion is secured by engaging a fifth screw portion formed on said vacuum container or a projecting portion of said vacuum container with a sixth screw portion formed on an inner circumferential end portion thereof.    
   
   
       14 . A sputtering device according to  claim 4 , wherein: 
 said third screw portion is formed in a circular groove portion concaving in an axial direction from an end surface of said electrode body portion; and    said fourth screw portion is formed on a circular wall portion projecting in an axial direction from said back plate portion.    
   
   
       15 . A sputtering device according to  claim 4 , wherein: 
 said earth shield portion is secured by engaging a fifth screw portion formed on said vacuum container or a projecting portion of said vacuum container with a sixth screw portion formed on an inner circumferential end portion thereof.    
   
   
       16 . A sputtering device according to  claim 5 , wherein: 
 said earth shield portion is secured by engaging a fifth screw portion formed on said vacuum container or a projecting portion of said vacuum container with a sixth screw portion formed on an inner circumferential end portion thereof.    
   
   
       17 . A sputtering device according to  claim 7 , wherein: 
 said first screw portion is an outer spiral; and    said second screw portion is an inner spiral.    
   
   
       18 . A sputtering device according to  claim 17 , wherein: 
 said third screw portion is formed in a circular groove portion concaving in an axial direction from an end surface of said electrode body portion; and    said fourth screw portion is formed on a circular wall portion projecting in an axial direction from said back plate portion.    
   
   
       19 . A sputtering device according to  claim 18 , wherein: 
 said earth shield portion is secured by engaging a fifth screw portion formed on said vacuum container or a projecting portion of said vacuum container with a sixth screw portion formed on an inner circumferential end portion thereof.    
   
   
       20 . A sputtering device according to  claim 14 , wherein: 
 said earth shield portion is secured by engaging a fifth screw portion formed on said vacuum container or a projecting portion of said vacuum container with a sixth screw portion formed on an inner circumferential end portion thereof.    
   
   
       21 . A sputtering device according to  claim 20 , wherein: 
 magnets are arranged between said electrode body portion and said electrode portion.    
   
   
       22 . A sputtering device according to  claim 20 , wherein: 
 cooling water is supplied between said back plate portion and said electrode body portion.

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