US2004262781A1PendingUtilityA1

Method for forming an encapsulated device and structure

Assignee: SEMICONDUCTOR COMPONENTS INDPriority: Jun 27, 2003Filed: Jun 27, 2003Published: Dec 30, 2004
Est. expiryJun 27, 2023(expired)· nominal 20-yr term from priority
H10W 90/756H10W 90/736H10W 74/127H10W 74/00H10W 72/07353H10W 72/07352H10W 72/5363H10W 72/951H10W 72/932H10W 72/931H10W 72/884H10W 72/551H10W 72/334H10W 72/321H10W 72/0198H10W 72/075H10W 74/111H10W 70/411H10W 90/811
32
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Claims

Abstract

In one embodiment, an electronic device package ( 1 ) includes a leadframe ( 2 ) with a flag ( 3 ). An electronic chip ( 8 ) is attached to the flag ( 3 ) with a die attach layer ( 9 ). A trench ( 16 ) having curved sidewalls is formed in the flag ( 3 ) in proximity to the electronic chip ( 8 ) and surrounds the periphery of the chip ( 8 ). An encapsulating layer ( 19 ) covers the chip ( 8 ), portions of the flag ( 3 ), and at least a portion of the curved trench ( 16 ). The curved trench ( 16 ) reduces the spread of die attach material across the flag ( 3 ) during chip attachment, which reduces chip and package cracking problems, and improves the adhesion of encapsulating layer ( 19 ). The shape of the curved trench ( 16 ) prevents flow of die attach material into the curved trench ( 16 ), which allows the encapsulating layer ( 19 ) to adhere to the surface of the curved trench ( 16 ).

Claims

exact text as granted — not AI-modified
We claim:  
     
         1 . An electronic device package comprising: 
 a support substrate including a flag, wherein the flag has bonding surface;    a first electronic chip having a first peripheral edge, wherein the electronic chip is attached to a first portion of the bonding surface with a first die attach material;    a first continuous trench formed in the flag in proximity to the first peripheral edge, wherein the first continuous trench includes a curved sidewall surface and an inner edge adjacent to the first peripheral edge; and    an encapsulant covering the first electronic chip and at least a portion of the curved sidewall surface.    
     
     
         2 . The package of  claim 1 , wherein the first continuous trench surrounds the first electronic chip.  
     
     
         3 . The package of  claim 1 , wherein the first continuous trench comprises a continuously rounded cross-sectional shape.  
     
     
         4 . The package of  claim 1 , wherein the first continuous trench has a cross-sectional shape comprising an inverse omega shape.  
     
     
         5 . The package of  claim 1 , wherein the first continuous trench has a rounded corner.  
     
     
         6 . The package of  claim 1 , wherein the first continuous trench has depth in range from about 100 microns to about 330 microns.  
     
     
         7 . The package of  claim 1 , wherein the peripheral edge is substantially aligned with the inner edge of the first continuous trench.  
     
     
         8 . The package of  claim 1 , wherein the first peripheral edge is spaced a distance inside the inner edge of the first continuous trench.  
     
     
         9 . The package of  claim 8 , wherein the distance is less than about 635 microns.  
     
     
         10 . The package of  claim 1 , wherein the first peripheral edge extends over the inner edge of the first continuous trench.  
     
     
         11 . The package of  claim 1 , wherein at least a portion of the first die attach material extends to the inner edge of the first continuous trench, and wherein the first continuous trench is substantially absent die attach material.  
     
     
         12 . The package of  claim 1  further comprising a second trench formed in the flag, wherein the first electronic chip overlies at least a portion of the second trench.  
     
     
         13 . The package of  claim 1 , wherein the die attach material is selected from a group consisting of a eutectic solder, a solder paste, a conductive epoxy, a polyimide film, a metal filled glass, and a pre-form structure.  
     
     
         14 . The package of  claim 1  further comprising: 
 a second electronic chip having a second peripheral edge, wherein the second electronic chip is attached to a second portion of the bonding surface with a second die attach material; and  
 a second continuous trench formed in the flag in proximity to the second peripheral edge and around at least two sides of the second electronic chip, wherein the second continuous trench includes a curved sidewall surface adjacent the second peripheral edge.  
 
     
     
         15 . The package of  claim 14  wherein the first and second continuous trenches have a common portion.  
     
     
         16 . The package of  claim 14  wherein the first and second die attach materials comprise different materials.  
     
     
         17 . The package of  claim 1 , wherein the support substrate further includes a bonding site having a bonding surface, and wherein the package further comprises a bonding device coupling the first electronic chip to the bonding site, wherein the encapsulant covers the bonding device and the bonding surface of the bonding site.  
     
     
         18 . The package of  claim 1 , wherein the first continuous trench comprises an etched trench.  
     
     
         19 . A method for forming an electronic device package comprising the steps of: 
 providing a support substrate comprising a flag and a first trench formed in a bonding surface of the flag, wherein the first trench has a cross-sectional shape including a curved sidewall surface;    attaching a first electronic chip having a first peripheral edge to the bonding surface with a die attach material, wherein the first trench is in proximity to the first peripheral edge, and wherein the curved sidewall surface is adjacent the first peripheral edge; and    covering the first electronic chip and portions of the flag with a protective layer, wherein the protective layer covers at least a portion of the curved sidewall surface.    
     
     
         20 . The method of  claim 19  wherein the step of providing the support substrate includes providing a support substrate having a first trench that surrounds the first peripheral edge.  
     
     
         21 . The method of  claim 19  wherein the step of providing the support substrate includes providing a support substrate having a first trench, wherein the first trench has a continuously rounded cross-sectional shape.  
     
     
         22 . The method of  claim 19  wherein the step of attaching the first electronic chip to the bonding surface comprises the steps of: 
 placing the die attach material on a portion of the bonding surface bounded by the first trench; and  
 placing the first electronic chip on the die attach material, wherein the first trench prevents the die attach material from spreading beyond an inner edge of the first trench to align the first electronic chip on the bonding surface.  
 
     
     
         23 . The method of  claim 19  wherein the step of covering comprises encapsulating the first electronic chip and portion portions of the flag with a plastic encapsulant, wherein the plastic encapsulant extends into the first trench to provide a mold lock.  
     
     
         24 . The method of  claim 19  wherein the step of placing the first electronic chip includes substantially aligning the first peripheral edge with an inner edge of the first trench.  
     
     
         25 . The method of  claim 19  wherein the step of placing the first electronic chip includes placing the first electronic chip wherein the first peripheral edge is spaced a distance inside an inner edge of the first trench.  
     
     
         26 . The method of  claim 25  wherein the step of placing the first electronic chip includes placing the first electronic chip a distance less than about 635 microns from the inner edge of the first trench.  
     
     
         27 . The method of  claim 19  wherein the step of placing the first electronic chip includes placing the first electronic chip wherein the first peripheral edge extends over an inner edge of the first trench.  
     
     
         28 . The method of  claim 19  wherein the step of providing the support substrate includes the steps of: 
 providing a leadframe having the flag with the bonding surface;  
 masking the bonding surface to form a masking layer;  
 selectively removing portions of the masking layer to expose portions of the bonding surface; and  
 etching the first trench into the bonding surface to provide the curved sidewall surface.  
 
     
     
         29 . The method of  claim 28  wherein the etching step includes etching the first trench to provide an inverse omega cross-sectional shape.  
     
     
         30 . The method of  claim 19  wherein the step of providing the support substrate includes providing a support substrate having a second trench formed in the bonding surface, wherein the second trench has a cross-section shape including curved sidewall surfaces.  
     
     
         31 . The method of  claim 30  further comprising the steps of: 
 attaching a second electronic chip having a second peripheral edge to the bonding surface with a second die attach material, wherein the second trench is in proximity to the second peripheral edge; and  
 covering the second electronic chip and at least a portion of the curved sidewall surfaces of the second trench.  
 
     
     
         32 . The method of  claim 30  wherein the step of providing the support substrate includes providing the support substrate wherein the first and second trenches have a common portion.  
     
     
         33 . A leadless electronic structure comprising: 
 a leadframe including a bonding site and a flag having a bonding surface;    a first semiconductor device having a first peripheral edge coupled to the bonding surface with a first chip attach layer, wherein the first semiconductor device includes a bond pad;    a first groove formed in the bonding surface surrounding the first semiconductor device, wherein the first groove comprises a substantially continuously curved inner surface and a first inner edge in proximity to the first peripheral edge, wherein at least a portion of first chip attach layer extends across the bonding surface and terminates at approximately the first inner edge;    a bonding device coupling the bond pad to the bonding site; and    an encapsulating layer covering exposed portions of the flag, the bonding site, and the bonding device, the first semiconductor device, and at least a portion of the substantially continuously curved inner surface.    
     
     
         34 . The structure of  claim 33  further comprising: 
 an electronic device having a second peripheral edge coupled to the bonding surface with a second chip attach layer; and  
 a second groove formed in the bonding surface surrounding the electronic device, wherein the second groove comprises a substantially continuously curved inner surface and a second inner edge in proximity to the second peripheral edge, and wherein at least a portion of the second chip attach layer extends across the bonding surface and terminates at approximately the second inner edge.  
 
     
     
         35 . The structure of  claim 33  wherein the first chip attach layer comprises a conductive solder.  
     
     
         36 . The structure of  claim 33  wherein the first peripheral edge is placed an inner distance from the first inner edge.  
     
     
         37 . The structure of  claim 36  wherein the inner distance is less than about 635 microns.  
     
     
         38 . The structure of  claim 33  wherein the first peripheral edge is substantially aligned with the first inner edge.  
     
     
         39 . The structure of  claim 33  further comprising a shaped trench formed in the bonding surface, wherein the first semiconductor device overlies at least a portion of the shaped trench.  
     
     
         40 . The structure of  claim 39  wherein the shaped trench comprises a cross shape.  
     
     
         41 . The structure of  claim 39  wherein the shaped trench is connected to the first groove.  
     
     
         42 . The structure of  claim 33  wherein the first groove includes a rounded corner.

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