Electrolytic solution supply and recovery facility and liquid component replenishment apparatus

Abstract

There is provided an electrolytic solution supply and recovery facility which, in response to an increase in the production amount of an associated electrolytic processing apparatus, can efficiently supply and recover an electrolytic solution while enhancing the productivity and lowering the production cost. An electrolytic solution supply and recovery facility for supplying and recovering an electrolytic solution to and from an electrolytic processing apparatus, includes: a fresh liquid supply section for storing a fresh electrolytic solution, said electrolytic solution having been transferred from a carry-in container that has been carried in from the outside, and for supplying the fresh electrolytic solution to the electrolytic processing apparatus; and a waste liquid recovery section for recovering the electrolytic solution from the electrolytic processing apparatus, storing the electrolytic solution and transferring the electrolytic solution to a carry-out container which is to be carried to the outside.

What is claimed is:  
     
         1 . An electrolytic solution supply and recovery facility for supplying and recovering an electrolytic solution to and from an electrolytic processing apparatus, comprising: 
 a fresh liquid supply section for storing a fresh electrolytic solution, said electrolytic solution having been transferred from a carry-in container that has been carried in from the outside, and for supplying the fresh electrolytic solution to the electrolytic processing apparatus; and    a waste liquid recovery section for recovering the electrolytic solution from the electrolytic processing apparatus, storing the electrolytic solution and transferring the electrolytic solution to a carry-out container which is to be carried to the outside.    
     
     
         2 . The electrolytic solution supply and recovery facility according to  claim 1 , further comprising: 
 a liquid component replenishment apparatus for replenishing the electrolytic solution in the fresh liquid supply section with a predetermined chemical component.    
     
     
         3 . An electrolytic solution supply and recovery facility for supplying and recovering an electrolytic solution to and from a plurality of electrolytic processing apparatuses, comprising: 
 a fresh liquid storage section for storing a fresh electrolytic solution which has been carried in from the outside;    a fresh liquid supply section for storing the fresh electrolytic solution which has been transferred from the fresh liquid storage section and supplying the fresh electrolytic solution to each of the plurality of electrolytic processing apparatuses;    a waste liquid recovery section for recovering the electrolytic solution from each of the plurality of electrolytic processing apparatuses and storing the electrolytic solution; and    a waste liquid storage section for storing the electrolytic solution which has been transferred from the waste liquid recovery section and is to be carried to the outside.    
     
     
         4 . The electrolytic solution supply and recovery facility according to  claim 3 , wherein each of the plurality of electrolytic processing apparatuses is provided with an electrolytic solution analyzer for analyzing the electrolytic solution which has been supplied to the electrolytic processing apparatus, and a liquid component replenishment apparatus for replenishing the electrolytic solution with a chemical component based on the results of analysis by the electrolytic solution analyzer.  
     
     
         5 . The electrolytic solution supply and recovery facility according to  claim 3 , wherein the fresh liquid storage section and the fresh liquid supply section are connected by a line provided with a filter.  
     
     
         6 . The electrolytic solution supply and recovery facility according to  claim 5 , wherein each of the plurality of electrolytic processing apparatuses is provided with an electrolytic solution analyzer for analyzing the electrolytic solution which has been supplied to the electrolytic processing apparatus, and a liquid component replenishment apparatus for replenishing the electrolytic solution with a chemical component based on the results of analysis by the electrolytic solution analyzer.  
     
     
         7 . The electrolytic solution supply and recovery facility according to  claim 3 , wherein the electrolytic solution circulates between the fresh liquid supply section and each of the plurality of electrolytic processing apparatuses.  
     
     
         8 . The electrolytic solution supply and recovery facility according to  claim 7 , wherein each of the plurality of electrolytic processing apparatuses is provided with an electrolytic solution analyzer for analyzing the electrolytic solution which has been supplied to the electrolytic processing apparatus, and a liquid component replenishment apparatus for replenishing the electrolytic solution with a chemical component based on the results of analysis by the electrolytic solution analyzer.  
     
     
         9 . The electrolytic solution supply and recovery facility according to  claim 7 , wherein the fresh liquid storage section and the fresh liquid supply section are connected by a line provided with a filter.  
     
     
         10 . The electrolytic solution supply and recovery facility according to  claim 9 , wherein each of the plurality of electrolytic processing apparatuses is provided with an electrolytic solution analyzer for analyzing the electrolytic solution which has been supplied to the electrolytic processing apparatus, and a liquid component replenishment apparatus for replenishing the electrolytic solution with a chemical component based on the results of analysis by the electrolytic solution analyzer.  
     
     
         11 . A liquid component replenishment apparatus for metering a predetermined chemical component and replenishing an electrolytic solution with the chemical component, comprising: 
 a total amount metering device for metering the total amount of a supplementary chemical component stored in a storage container; and    a dose metering device for metering a dose of the chemical component to be transferred and supplied from the storage container to the electrolytic solution.    
     
     
         12 . The liquid component replenishment apparatus according to  claim 11 , wherein the metering devices employ a gravimetric method.  
     
     
         13 . The liquid component replenishment apparatus according to  claim 11 , wherein the metering devices employ a volumetric method.