Accelerometer with folded beams

Abstract

Disclosed is an accelerometer for measuring seismic data. The accelerometer includes a proof mass that is resiliently coupled to a support structure by folded beams, S-shaped balanced beams, straight beams, and/or folded beams with resonance damping. The support structure further includes travel stops for limiting transverse motion of the proof mass.

1 - 43 . (canceled)  
     
     
         44 . A method of preventing crack propagation in a micro-machined structure including a webbing artifact, comprising: 
 providing one or more holes within the webbing artifact.    
     
     
         45 . A method of minimizing backside etching of elements within a micro-machined structure, comprising: 
 providing one or more etch-buffers adjacent to the elements.    
     
     
         46 . A method of improving the dimensional uniformity of elements within a micro-machined structure, comprising: 
 providing one or more etch-buffers adjacent to the elements.    
     
     
         47 . A method of protecting a mass supported within a support structure by one or more springs, comprising: 
 providing one or more soft-contact bumpers for preventing impacts between the mass and the support structure.    
     
     
         48 - 56 . (canceled)