Semiconductor device and manufacturing method thereof

Abstract

A method of manufacturing a semiconductor device using a wiring substrate is provided which can facilitate the handling of the wiring substrate. The method includes the steps of forming a peelable resin layer on a silicon substrate, forming the wiring substrate on the peelable resin layer, mounting semiconductor chips on the wiring substrate, forming semiconductor devices by sealing the plurality of semiconductor chips by a sealing resin, individualizing the semiconductor devices by dicing the semiconductor devices from the sealing resin side but leaving the silicon substrate, peeling each of the individualized semiconductor devices from the silicon substrate between the silicon substrate and the peelable resin layer, and exposing terminals on the wiring substrate by forming openings through the peelable resin layer or by removing the peelable resin layer.

1 - 4 . (Canceled)  
     
     
         5 . A method of manufacturing the semiconductor device using a wiring substrate, comprising the steps of: 
 a) forming a peelable resin layer on a silicon substrate, said peelable resin layer having a lower adhesiveness to said silicon substrate and being easily peelable from said silicon substrate;    b) forming the wiring substrate on said peelable resin layer;    c) mounting a plurality of semiconductor chips on said wiring substrate;    d) forming semiconductor devices by sealing said plurality of semiconductor chips by a sealing resin;    e) thinning said silicon substrate by a grinding process;    f) peeling said semiconductor devices from said silicon substrate with said peelable resin layer being attached to said thinned silicon substrate such that said silicon substrate and said peelable resin layer are separated;    g) individualizing said semiconductor devices by dicing said semiconductor devices; and    h) exposing terminals provided on said wiring substrate by forming openings through said peelable resin layer or by removing said peelable resin layer.    
     
     
         6 . A method of manufacturing the semiconductor device using a wiring substrate, comprising the steps of: 
 a) forming a peelable resin layer on a silicon substrate, said peelable resin layer having a lower adhesiveness to the wiring substrate and being easily peelable from the wiring substrate;    b) forming the wiring substrate on said peelable resin layer;    c) mounting a plurality of semiconductor chips on said wiring substrate;    d) forming semiconductor devices by sealing said plurality of semiconductor chips by a sealing resin;    e) thinning said silicon substrate by a grinding process;    f) peeling said semiconductor devices from said silicon substrate with said peelable resin layer being attached to said thinned silicon substrate such that said silicon substrate and said peelable resin layer are separated; and    g) individualizing said semiconductor devices by dicing said semiconductor devices.    
     
     
         7 - 8 . (Canceled)  
     
     
         9 . The method of manufacturing the semiconductor device as claimed in  claim 5 , wherein said step d) is a step of sealing said plurality of semiconductor chips in a single step using molds and said resin sealing is carried out with an elastic sheet being provided along one of said molds at the backside of said semiconductor chip such that a distance between said wiring substrate and a surface of the sealing resin is less than a distance between said wiring substrate and the backside of said semiconductor chip.  
     
     
         10 . The method of manufacturing the semiconductor device as claimed in  claim 6 , wherein said step d) is a step of sealing said plurality of semiconductor chips in a single step using molds and said resin sealing is carried out with an elastic sheet being provided along one of said molds at the backside of said semiconductor chip such that a distance between said wiring substrate and a surface of the sealing resin is less than a distance between said wiring substrate and the backside of said semiconductor chip.  
     
     
         11 . (Canceled)  
     
     
         12 . A method of manufacturing the semiconductor device using a wiring substrate, comprising the steps of: 
 a) forming a peelable resin layer on a silicon substrate, said peelable resin layer having a lower adhesiveness to a wiring substrate and being easily peelable from the wiring substrate;    b) forming the wiring substrate on said peelable resin layer;    c) mounting a plurality of semiconductor chips on said wiring substrate;    d) forming semiconductor devices by filling insulating resin between said plurality of semiconductor chips and said wiring substrate;    e) adhering a frame-like member on said silicon substrate such that said frame-like member surrounds each of said plurality of semiconductor chips, said frame-like member being made of a material having a higher rigidity than that of said wiring substrate;    f) thinning said silicon substrate by a grinding process;    g) peeling said semiconductor devices with said peelable resin layer being attached to said thinned silicon substrate such that said wiring substrate and said peelable resin layer are separated; and    g) individualizing said semiconductor devices by dicing said semiconductor devices.    
     
     
         13 . (Canceled)  
     
     
         14 . The method of manufacturing the semiconductor device as claimed in  claim 12 , wherein after the adhering of said frame-like members, resin is filled between said frame-lime members and said semiconductor chips.  
     
     
         15 . A semiconductor device comprising: 
 a thin-film multilayer substrate;    at least one semiconductor chip mounted on said thin-film multilayer substrate;    a package substrate whereto said thin-film multilayer substrate is connected; and    external connection terminals provided on said package substrate,    wherein said thin-film multilayer substrate is fixed to said package substrate.    
     
     
         16 . The semiconductor device as claimed in  claim 15 , wherein a heat radiation member is attached to the back side of said semiconductor chip.  
     
     
         17 . A method of manufacturing a semiconductor device, comprising the steps of: 
 a) forming a metal thin-film layer on a silicon substrate;    b) forming a thin-film multilayer substrate by forming conductive layers and insulating layers in multiple levels on said metal thin-film layer;    c) attaching a supporting member on said thin-film multilayer substrate by means of an adhesive member;    d) removing said silicon substrate and said metal thin-film layer;    e) individualizing said thin-film multilayer substrate together with said supporting member;    f) mounting said thin-film multilayer substrate on a package substrate and fixing said thin-film multilayer substrate on said package substrate;    g) reducing adhesiveness of said adhesive member and peeling said supporting member and said adhesive member from said thin-film multilayer substrate; and    h) mounting at least one semiconductor chip on said thin-film multilayer substrate.    
     
     
         18 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein said adhesive member is provided with a thermal foam adhesive material on a surface that is in contact with said thin-film multilayer substrate, and, said step of peeling said adhesive member includes the step of heating said adhesive member to a temperature that is greater than or equal to a foaming-start temperature of said thermal foam adhesive material.  
     
     
         19 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein said adhesive member is provided with a UV curing type adhesive material on a surface that is in contact with said thin-film multilayer substrate, and, said step of peeling said adhesive member includes the step of irradiating an ultraviolet radiation on said adhesive member.  
     
     
         20 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein said supporting member is attached to said thin-film multilayer substrate by means of said adhesive member from the step of removing said silicon substrate from said thin-film multilayer substrate through the step of fixing and mounting said thin-film multilayer substrate on said package substrate.  
     
     
         21 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein in said step e), said thin-film multilayer substrate, said adhesive member and said supporting member are cut at the same time.  
     
     
         22 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein before said step d), only said thin-film multilayer substrate is cut and individualized while said thin-film multilayer substrate is fixed on said silicon substrate.  
     
     
         23 . A semiconductor device comprising: 
 a thin-film multilayer substrate;    at least one semiconductor chip mounted on said thin-film multilayer substrate;    a package substrate whereto said thin-film multilayer substrate is connected; and    external connection terminals provided on said package substrate,    wherein said semiconductor chip is sealed on said thin-film multilayer substrate by means of a sealing resin such that the back surface of said semiconductor chip is exposed from said sealing resin, and    said thin-film multilayer substrate is fixed to said package substrate.    
     
     
         24 . The semiconductor device as claimed in  claim 23 , wherein a heat dissipation member is attached to the back surface of said semiconductor chip.  
     
     
         25 . A method of manufacturing a semiconductor device, comprising the steps of: 
 a) forming a metal thin-film layer on a silicon substrate;    b) forming a thin-film multilayer substrate by forming conductive layers and insulating layers in multiple levels on said metal thin-film layer;    c) mounting at least one semiconductor chip on said thin-film multilayer substrate;    d) resin sealing said semiconductor chip on said thin-film multilayer substrate;    e) removing said silicon substrate and said metal thin-film layer;    f) individualizing said thin-film multilayer substrate; and    g) mounting said individualized thin-film multilayer substrate on a package substrate and fixing said thin-film multilayer substrate on said package substrate.    
     
     
         26 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein said step d) includes spin-etching using hydrofluoric-nitric acid.  
     
     
         27 . The method of manufacturing the semiconductor device as claimed in  claim 25 , wherein said step e) includes spin-etching using hydrofluoric-nitric acid.  
     
     
         28 . The method of manufacturing the semiconductor device as claimed in  claim 26 , wherein said step e) includes a step of neutralizing hydrofluoric-nitric acid using a neutralizing agent after said spin-etching using hydrofluoric-nitric acid.  
     
     
         29 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein one of said insulating layers that is in contact with said metal thin-film layer is made of a material that has a greater flexibility as compared to the remaining insulating layers.  
     
     
         30 . The method of manufacturing the semiconductor device as claimed in  claim 25 , wherein one of said insulating layers that is in contact with said metal thin-film layer is made of a material that has a greater flexibility as compared to the remaining insulating layers.  
     
     
         31 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein said steps a) and b) include forming said metal thin-film layer and said thin-film multilayer substrate on said silicon substrate such that said metal thin-film layer and said thin-film multilayer substrate are in a pre-individualized state.  
     
     
         32 . The method of manufacturing the semiconductor device as claimed in  claim 25 , wherein said steps a) and b) include forming said metal thin-film layer and said thin-film multilayer substrate on said silicon substrate such that said metal thin-film layer and said thin-film multilayer substrate are in a pre-individualized state.  
     
     
         33 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein, after said step d), a laser beam is irradiated on said exposed insulating layer to form openings through said insulating layer such that said conductive layer is exposed in said openings.  
     
     
         34 . The method of manufacturing the semiconductor device as claimed in  claim 25 , wherein, after said step d), a laser beam is irradiated on said exposed insulating layer to form openings through said insulating layer such that said conductive layer is exposed in said openings.  
     
     
         35 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein, before removing said silicon substrate from said thin-film multilayer substrate, a test is implemented on said thin-film multilayer substrate.  
     
     
         36 . The method of manufacturing the semiconductor device as claimed in  claim 25 , wherein, before removing said silicon substrate from said thin-film multilayer substrate, a test is implemented on said thin-film multilayer substrate.  
     
     
         37 . The method of manufacturing the semiconductor device as claimed in  claim 36 , wherein, conductive parts are formed that penetrate through said thin-film multilayer substrate and extend from said metal thin-film layer to the surface of said thin-film multilayer substrate, and a test is implemented on said thin-film multilayer substrate using said conductive parts and said conductive layers of said thin-film multilayer substrate.  
     
     
         38 . The method of manufacturing the semiconductor device as claimed in  claim 36 , wherein, 
 a test is implemented by forming a test wiring layer on the surface of said thin-film multilayer substrate while said thin-film multilayer substrate is fixed on said silicon substrate, and said test wiring layer is removed after the test.    
     
     
         39 . The method of manufacturing the semiconductor device as claimed in  claim 17 , wherein, a test is implemented on said thin-film multilayer substrate while said thin-film multilayer is fixed on said supporting member.