Lid unit for thin plate supporting container

Abstract

The present invention is directed to firmly fix a lid unit to a container body, facilitate cleaning and drying of components, and suppress rotation of semiconductor wafers caused by shake. The invention provides a lid unit for a manufacturing line for closing a container body of a thin plate supporting container. A simple attaching/detaching mechanism is provided with: a locking member which is projected and retained by the container body side; a feeding member which is connected to the locking member to make the locking member project/retract; a tip-side cam for pressing a tip side of the locking member to one side when the locking member is projected by the feeding member; a base-end lower cam for pressing a base-end side of the locking member to the other side; and a base-end upper cam and a cam pressing projection for pressing the base-end side to the other side in a manner similar to the base-end lower cam. The simple attaching/detaching mechanism is detachably attached and can be disassembled into components. Supporting ribs for supporting a connecting and supporting plate and a supporting projection bar formed so that its ends are thin and its center portion is thick are also provided.

What is claimed is:  
     
         1 . A lid unit for a thin plate supporting container for closing a container body of a thin plate supporting container in which a plurality of thin plates are housed and which is carried, comprising 
 a simple attaching/detaching mechanism which can be easily attached/detached to/from the container body,    the simple attaching/detaching mechanism comprising:    a locking member which is projected and retained by the container body side;    a feeding member which is connected to the locking member to make the locking member project/retract;    a tip-side cam for pressing a tip side of the locking member to one side when the locking member is projected by the feeding member; and    a base-end-side cam for pressing a base-end side of the locking member to the other side when the locking member is projected.    
     
     
         2 . The lid unit for a thin plate supporting container according to  claim 1 , wherein the tip-side cam has an oblique surface for pushing the tip side of the locking member to the one side.  
     
     
         3 . The lid unit for a thin plate supporting container according to  claim 1 , wherein the base-end-side cam has an oblique surface for pushing the base-end side of the locking member to the other side.  
     
     
         4 . The lid unit for a thin plate supporting container according to  claim 1 , wherein a fulcrum portion of swing of the locking member is provided on the tip side of the locking member.  
     
     
         5 . The lid unit for a thin plate supporting container according to  claim 1 , wherein the simple attaching/detaching mechanism is detachably attached and can be disassembled to component parts.  
     
     
         6 . A lid unit for a thin plate supporting container for closing a container body of a thin plate supporting container in which a plurality of thin plates are housed and which is carried, comprising 
 a thin plate presser for supporting thin plates housed in the container body,    wherein the thin plate presser has supporting pieces disposed alternately.    
     
     
         7 . The lid unit for a thin plate supporting container according to  claim 6 , wherein the thin plate presser comprises two contact pieces having supporting pieces disposed alternately and an elastic supporting plate for elastically supporting the contact pieces, 
 the elastic supporting plate is attached between and on both sides of the contact pieces, and the elastic supporting plate between the contact pieces supports the contact pieces in a state where the elastic supporting plate is slightly floated.    
     
     
         8 . A lid unit for a thin plate supporting container for closing a container body of a thin plate supporting container in which a plurality of thin plates are housed and which is carried, comprising 
 a lid unit holder for fixing the lid unit from the outside in a state where the lid unit is attached to the container body.    
     
     
         9 . A lid unit for a thin plate supporting container for closing a container body of a thin plate supporting container in which a plurality of thin plates are housed and which is carried, comprising 
 a thin plate presser for supporting a plurality of thin plates housed in the container body,    wherein the thin plate presser has a plurality of contact pieces which are disposed in parallel and come into contact with the plurality of thin plates, and    the parallel contact pieces are disposed so that the contact piece positioned in a center portion is projected to the thin plate side more than the contact pieces positioned on both sides.    
     
     
         10 . The lid unit for a thin plate supporting container according to  claim 9 , wherein the thin plate presser comprises: 
 a base-end supporting portion fixed to the rear surface of the lid unit; and    a plurality of elastic supporting plates supported by the base-end supporting portion and each supporting one end of each of the contact pieces, and    each of the elastic supporting plates for supporting the contact pieces is formed so that the contact piece positioned in the center portion is projected to the thin plate side more than the contact pieces positioned on both sides.    
     
     
         11 . The lid unit for a thin plate supporting container according to  claim 9 , wherein the thin plate presser comprises: 
 a base-end supporting portion fixed to the rear surface of the lid unit;    a plurality of one-side elastic supporting plates supported by the base-end supporting portion and supporting one end of each of the contact pieces; and    a plurality of other-side elastic supporting plates supporting the other end of each of the contact pieces and in contact with the rear surface of the lid unit, and    any one of the one-side elastic supporting plate and the other-side elastic supporting plate for supporting each of the contact pieces or both are/is formed so that the contact piece positioned in the center portion is projected to the thin plate side more than the contact pieces positioned on both sides.    
     
     
         12 . The lid unit for a thin plate supporting container according to  claim 9 , wherein the thin plate presser comprises: 
 a base-end supporting portion fixed to the rear surface of the lid unit;    a plurality of one-side elastic supporting plates supported by the base-end supporting portion and each supporting one end of each of the contact pieces;    a plurality of other-side elastic supporting plates each supporting the other end of each of the contact pieces and in contact with the rear surface of the lid unit; and    a supporting projection bar provided on the rear surface side of the lid unit and in contact with the other-side elastic supporting plates to thereby support the other-side elastic supporting plates, and    any one of the supporting projection bar and the other-side elastic supporting plate or both are/is formed so that the contact piece positioned in the center portion is projected to the thin plate side more than the contact pieces positioned on both sides.    
     
     
         13 . The lid unit for a thin plate supporting container according to  claim 9 , wherein the contact piece has a V-shaped groove having an inclination of 40° to 44°.  
     
     
         14 . A lid unit for a thin plate supporting container for closing a container body of a thin plate supporting container in which a plurality of thin plates are housed and which is carried, comprising 
 a thin plate presser for supporting thin plates housed in the container body,    the thin plate presser comprising:    two base-end supporting portions fixed to a rear surface of the lid unit;    a plurality of contact pieces which are disposed along the periphery of the thin plate and come into direct contact with the thin plate;    two elastic supporting plates supported by the base-end supporting portions and supporting an outer end of each of contact pieces at both ends among the plurality of contact pieces;    a connecting and supporting plate for connecting and supporting the contact pieces; and    a supporting member for preventing a deviation of the connecting and supporting plate along the rear surface of the lid unit while permitting fluctuations in the direction perpendicular to the rear surface of the lid unit.    
     
     
         15 . The lid unit for a thin plate supporting container according to  claim 14 , wherein the supporting member has supporting ribs for supporting each of the connecting and supporting plates so as not to be deviated along the rear surface of the lid unit.  
     
     
         16 . The lid unit for a thin plate supporting container according to  claim 14 , 
 wherein the supporting member has a fitting projection which is fit in a fitting hole formed in the connecting and supporting plate, thereby preventing a deviation along the rear surface of the lid unit of the connecting and supporting plate while permitting fluctuations in a direction perpendicular to the rear surface of the lid unit.    
     
     
         17 . The lid unit for a thin plate supporting container according to  claim 14 , 
 wherein elastic force for supporting the contact piece by the connecting and supporting plate is stronger than elastic force for supporting the contact piece by the elastic supporting plate.