Scanning probe microscopy probe and method for scanning probe contact printing

Abstract

A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.

1 - 43 . (Cancelled).  
     
     
         44 . A method for contact printing comprising: 
 positioning a scanning probe microscopy probe having a tip near a substrate, wherein ink is transferred from the tip to the substrate, and wherein the tip comprises a polymer; and forming the probe by forming a structural layer on a substrate, wherein the substrate forms a cavity, and a sacrificial layer is located between the substrate and the structural layer.    
     
     
         45 . The method of  claim 44  further comprising selectively removing the sacrificial layer.  
     
     
         46 . The method of  claim 44  further comprising releasing the structural layer from the substrate.  
     
     
         47 . The method of  claim 44 , wherein the cavity forms a pyramid.  
     
     
         48 . The method of  claim 44 , wherein the structural layer includes a tip layer in the cavity and a beam layer on the tip layer.  
     
     
         49 . The method of  claim 48 , wherein the tip layer comprises an elastomer.  
     
     
         50 . A method for contact printing comprising: 
 patterning a first ink on a flat surface of a scanning probe microscopy probe to form an ink pattern on the flat surface; and    positioning the flat surface near a first substrate, wherein the ink pattern is transferred from the flat surface to the first substrate, and    wherein the flat surface comprises a polymer.    
     
     
         51 . A method for contact printing comprising: 
 patterning a first ink on a flat surface of a scanning probe microscopy probe to form an ink pattern on the flat surface;    positioning the flat surface near a first substrate, wherein the ink pattern is transferred from the flat surface to the first substrate;    patterning a second ink on the flat surface; and    forming the probe by forming a structural layer on a substrate, the structural layer having a tip layer and a beam layer, wherein the substrate forms a cavity, the tip layer is in the cavity, the beam layer is on the tip layer, and a sacrificial layer is located between the substrate and the tip layer; and by patterning the structural layer.