Anodized substrate support

Abstract

A substrate support and method for fabricating the same are provided. In one embodiment of the invention, a substrate support includes an electrically conductive body having a substrate support surface that is covered by an electrically insulative coating. At least a portion of the coating centered on the substrate support surface has a surface finish of between about 80 to about 200 micro-inches. In another embodiment, a substrate support includes an anodized aluminum body having a surface finish on the portion of the body adapted to support a substrate thereon of between about 80 to about 200 micro-inches.

What is claimed is:  
     
         1 . A substrate support comprising: 
 an electrically conductive body having a substrate support surface;    an electrically insulative coating disposed on the body; and    at least a portion of the coating disposed over a center of the substrate supporting surface having a surface finish between about 80 to about 200 micro-inches.    
     
     
         2 . The substrate support of  claim 1 , wherein the body is at least partially fabricated from aluminum body and the coating is an anodization layer.  
     
     
         3 . The substrate support of  claim 2 , wherein the anodized coating has a thickness of about 0.3 to about 2.16 mils.  
     
     
         4 . The substrate support of  claim 1 , wherein the substrate support surface has a surface finish between about 88 to about 230 micro-inches.  
     
     
         5 . The substrate support of  claim 4 , wherein the substrate support surface is bead blasted.  
     
     
         6 . The substrate support of  claim 1 , wherein the coating disposed on the substrate support surface further comprises: 
 a strip circumscribing the portion of the coating centered on the substrate support surface and having a surface finish less than about 130 micro-inches.    
     
     
         7 . The substrate support of  claim 1 , wherein the substrate support surface further comprises: 
 a center region having a surface finish between about 88 to about 230 micro-inches; and    a perimeter region circumscribing the center region and having a surface finish less than about 130 micro-inches.    
     
     
         8 . A substrate support comprising: 
 an electrically conductive body having a substrate support surface; and    an electrically insulative coating disposed on the substrate support surface treated after deposition to a surface finish between about 80 to about 200 micro-inches.    
     
     
         9 . The substrate support of  claim 8 , wherein the body is aluminum and the coating is an anodization layer.  
     
     
         10 . A substrate support comprising: 
 an aluminum body having a substrate support surface treated to a surface finish of about 88 to about 230 micro-inches; and    an anodized coating disposed on the treated substrate support surface.    
     
     
         11 . The substrate support of  claim 10 , wherein the substrate support surface is treated by at least one of at least one of bead blasting, abrasive blasting, grinding, embossing, sanding, texturing or etching.  
     
     
         12 . The substrate support of  claim 10 , wherein the substrate support surface is blasted with aluminum oxide media having an average diameter of about 125 to about 375 microns.  
     
     
         13 . A substrate support fabricated by a process comprising: 
 providing an conductive body suitable for supporting a large area substrate; and    coating the substrate support surface, wherein the coating has a surface roughness between about 80 to about 200 micro-inches.    
     
     
         14 . The substrate support of  claim 13 , wherein the coating step further comprises: 
 anodizing of body comprised of aluminum.    
     
     
         15 . The substrate support of  claim 13 , wherein the step of coating on the substrate support surface further comprises: 
 treating the coating to yield the surface roughness between about 80 to about 200 micro-inches.    
     
     
         16 . The substrate support of  15 , wherein the step of treating the coating further comprises: 
 at least one of bead blasting, abrasive blasting, grinding, embossing, sanding, texturing or etching the anodized coating.    
     
     
         17 . The substrate support of  claim 13  further comprising: 
 treating the substrate support surface before coating to yield a surface finish of about 88 to about 230 micro-inches on the body.  
 
     
     
         18 . The substrate support of  claim 17 , wherein the step of treating the substrate support surface further comprises: 
 at least one of bead blasting, abrasive blasting, grinding, embossing, sanding, texturing or etching the substrate support surface.    
     
     
         19 . The substrate support of  claim 17 , wherein the step of treating the substrate support surface further comprises: 
 bead blasting the substrate support surface.    
     
     
         20 . The substrate support of  claim 19 , wherein the step of bead blasting the substrate support surface further comprises: 
 impacting the substrate support surface with beads having an average diameter of about 125 to about 375 microns.    
     
     
         21 . The substrate support of  claim 19 , wherein the step of bead blasting the substrate support surface further comprises: 
 impacting the substrate support surface with aluminum oxide beads having an average diameter of about 250 micron.    
     
     
         22 . The substrate support of  claim 13  further comprising: 
 encapsulating a heating element in the aluminum body.  
 
     
     
         23 . The substrate support of  claim 13  further comprising: 
 disposing a heating element in the conductive body, wherein the conductive body comprises one or more aluminum members.  
 
     
     
         24 . The substrate support of  claim 13  further comprising: 
 coupling a heating element to an aluminum surface of the body opposite the support surface.  
 
     
     
         25 . A substrate support fabricated by the process comprising: 
 treating an aluminum substrate support surface adapted to support a large area substrate to obtain a surface finish of about 88 to about 230 micro-inches; and    anodizing the substrate support surface to a thickness of about 0.3 to about 2.16 mils, wherein the surface finish of the anodized coating disposed at least over the center portion of the substrate support surface has a surface finish of between about 80 to about 200 micro-inches.