High-voltage transistor with multi-layer conduction region

Abstract

A high voltage insulated gate field-effect transistor includes an insulated gate field-effect device structure having a source and a drain, the drain being formed with an extended well region having one or more buried layers of opposite conduction type sandwiched therein. The one or more buried layers create an associated plurality of parallel JFET conduction channels in the extended portion of the well region. The parallel JFET conduction channels provide the HVFET with a low on-state resistance.

1 - 102  (canceled).  
     
     
         103 . A high voltage field-effect transistor (HVFET) comprising: 
 a substrate of a first conductivity type;    a first region of a second conductivity type disposed in the substrate;    a source region of the second conductivity type disposed in the substrate spaced-apart from the first region, a channel region being formed between the source region and the first region;    a drain region of the second conductivity type disposed in the first region;    a buried region of the first conductivity type disposed within the first region, a first conduction channel being formed in an upper region above the buried region and a second conduction channel being formed in a lower region below the buried region, the buried region being spaced-apart from the drain region; and    an insulated gate formed over the channel region,    wherein said upper region is a part of said first region and extends from said buried region to a top edge of said first region; and    wherein said buried region has a lateral width and a vertical thickness; and said lateral width is substantially greater than said vertical thickness.    
     
     
         104 . The HVFET according to  claim 103  further comprising: 
 a second region of the first conductivity type disposed in the substrate, the source region being disposed in the second region.  
 
     
     
         105 . The HVFET according to  claim 104  further comprising: 
 a third region of the first conductivity type disposed in the second region adjacent to the source region.  
 
     
     
         106 . The HVFET according to  claim 103  wherein the buried region is connected to the substrate.  
     
     
         107 . The HVFET according to  claim 103  further comprising: 
 a second buried region of the first conductivity type disposed within the substrate beneath the source region.  
 
     
     
         108 . The HVFET according to  claim 107  wherein the second buried region extends under the channel region.  
     
     
         109 . The HVFET according to  claim 103  wherein the first and second conductivity types are p-type and n-type, respectively.