Method of manufacturing MOS transistor having short channel

Abstract

The MOS transistor of the present invention is manufactured by a conventional complementary MOS transistor technology. In the manufacturing method of the MOS transistor having nanometer dimensions, a gate having dimensions at a nanometer scale can be formed through control of the width of spacers instead of with a specific lithography technology. The doped spacers are used for forming source/drain extension regions having an ultra-shallow junction, thereby avoiding damage on the substrate caused by ion implantation. In addition, a dopant is diffused from the doped space into a semiconductor substrate through annealing to form the source/drain extension regions having an ultra-shallow junction.

What is claimed is:  
     
         1 . A method for manufacturing a MOS (metal oxide semiconductor) transistor, comprising: 
 (a) forming shallow trench isolation regions, used for separation from other elements, on either side of a semiconductor substrate comprised of silicon, and implanting impurities to form source/drain regions being in contact with each shallow trench isolation region and extending towards a center;    (b) depositing a first oxide layer on a whole surface, etching a defined region of the center in a predetermined depth inside the semiconductor substrate, and forming spacers on a sidewall of each source/drain region;    (c) further etching the semiconductor substrate between the spacers to form a gate insulating layer;    (d) performing annealing on the whole resultant material, and implanting impurities from the spacers into the semiconductor substrate to form source/drain extension regions beneath each spacer, the source/drain extension regions being a shallow junction to the source/drain regions;    (e) depositing a polysilicon layer between the spacers to form a gate electrode; and    (f) depositing a second oxide layer on the whole surface, etching a region to be source and drain electrodes, and forming source and drain electrodes in the etched region through metallation.    
     
     
         2 . A method for manufacturing a MOS (metal oxide semiconductor) transistor, comprising: 
 (a) forming shallow trench isolation regions, used for separation from other elements, on either side of a semiconductor substrate comprised of silicon, and implanting impurities to form source/drain regions being in contact with each shallow trench isolation region and extending towards a center;    (b) depositing a first oxide layer on a whole surface, etching a defined region of the center as deep as the source/drain regions, and forming first spacers on a sidewall of each source/drain region;    (c) etching a space between the first spacers in a predetermined depth inside the semiconductor substrate, and depositing a doped oxide layer to form second spacers on a sidewall of the first spacers;    (d) further etching the semiconductor substrate between the second spacers to form a gate insulating layer;    (e) performing annealing on the whole resultant material, and implanting impurities from the second spacers into the semiconductor substrate to form source/drain extension regions beneath each second spacer, the source/drain extension regions being a shallow junction to the source/drain regions;    (f) depositing a polysilicon layer between the second spacers to form a gate electrode; and    (g) depositing a second oxide layer on the whole surface, etching a region to be source and drain electrodes, and forming source and drain electrodes in the etched region through metallation.    
     
     
         3 . The method as claimed in  claim 1 , wherein the spacers or the second spacers are formed as deep as or deeper than the source/drain regions.  
     
     
         4 . The method as claimed in  claim 2 , wherein the spacers or the second spacers are formed as deep as or deeper than the source/drain regions.  
     
     
         5 . The method as claimed in  claim 1  further comprising: generating a source/drain extension region in shallow junction by using diffusion of ions or plasma doping other than the impurity-implanted spacers.  
     
     
         6 . The method as claimed in  claim 2  further comprising: generating a source/drain extension region in shallow junction by using diffusion of ions or plasma doping other than the impurity-implanted spacers.  
     
     
         7 . The method as claimed in  claim 1 , wherein (e) comprises: 
 after deposition of the polysilicon layer, performing an etch-back process so as to make the top surface of the polysilicon layer deeper than the abutting spacers.    
     
     
         8 . The method as claimed in  claim 2 , wherein (f) comprises: 
 after deposition of the polysilicon layer, performing an etch-back process so as to make the top surface of the polysilicon layer deeper than the abutting spacers.    
     
     
         9 . The method as claimed in  claim 1 , wherein (b) comprises: 
 controlling the thickness of the spacers so as to control the distance between the spacers at a nanometer scale.    
     
     
         10 . The method as claimed in  claim 2 , wherein (b) comprises: 
 controlling the thickness of the spacers so as to control the distance between the spacers at a nanometer scale.    
     
     
         11 . The method as claimed in  claim 1 , wherein the thickness of the spacers or the second spacers is determined by a deposition thickness of the first oxide layer and an etching rate.  
     
     
         12 . The method as claimed in  claim 2 , wherein the thickness of the spacers or the second spacers is determined by a deposition thickness of the first oxide layer and an etching rate.