Apparatus for plating treatment

Abstract

A plating processing device is so arranged that at least a part of a portion touching plating liquid is made of a material whose change rate of surface roughness in response to a removing agent is lower than resin when the material and the resin are measured in the same conditions. For example, a storage tank ( 1 ), a plating processing tank ( 2 ), a buffer tank ( 3 ), and a pipe ( 9 ) are made of hard glass and quartz glass. With this, it is possible to prevent a plating material from being deposited as foreign body on wall surfaces of the plating processing tank, etc.

1 . A plating processing device which plates a plating target object by supplying plating liquid containing a plating material and causing said plating target object to touch said plating liquid, and, if the plating material is deposited on an undesired position, removes the plating material from the undesired position using a removing agent, wherein: 
 at least a part of a portion touching said plating liquid is made of a material whose change rate of surface roughness in response to the removing agent is lower than resin when said material and the resin are measured in same conditions.    
     
     
         2 . The plating processing device as set forth in  claim 1 , comprising: 
 a plating processing tank for causing said plating target object to touch said plating liquid,    wall surfaces of said plating processing tank being made of a material whose change rate of surface roughness in response to the removing agent is lower than resin when said material and the resin are measured in same conditions.    
     
     
         3 . The plating processing device as set forth in claim  1 , comprising: 
 a plating processing tank for causing said plating target object to touch said plating liquid; and    a plating processing tank pipe for conveying said plating liquid to said plating processing tank,    wall surfaces of said plating processing tank pipe being made of a material whose change rate of surface roughness in response to the removing agent is lower than resin when said material and the resin are measured in same conditions.    
     
     
         4 . The plating processing device as set forth in  claim 1 , comprising: 
 a plating processing tank for causing said plating target object to touch said plating liquid; and    a storage tank for storing said plating liquid which is to be supplied to said plating processing tank,    wall surfaces of said storage tank being made of a material whose change rate of surface roughness in response to the removing agent is lower than resin when said material and the resin are measured in same conditions.    
     
     
         5 . The plating processing device as set forth in  claim 4 , further comprising: 
 a heating tank for containing said storage tank so as to heat said plating liquid in said storage tank using heat conduction.    
     
     
         6 . The plating processing device as set forth in  claim 1 , further comprising: 
 a plating processing tank for causing said plating target object to touch said plating liquid;    a plating processing tank pipe for conveying said plating liquid to said plating processing tank; and    an ultrasonic flowmeter provided at a portion of said plating processing tank pipe,    wall surfaces of said portion of said plating processing tank pipe being made of a material whose change rate of surface roughness in response to the removing agent is lower than resin when said material and the resin are measured in same conditions.    
     
     
         7 . The plating processing device as set forth in  claim 1 , wherein: 
 said material whose change rate of surface roughness in response to the removing agent is lower than resin when said material and the resin are measured in same conditions is glass.    
     
     
         8 . The plating processing device as set forth in  claim 7 , wherein: 
 said glass is hard glass.    
     
     
         9 . The plating processing device as set forth in  claim 7 , wherein: 
 said glass is quartz glass.