Nondestructive analysis method and nondestructive analysis device and specific object by the method/device

Abstract

Novel nondestructive analysis method and nondestructive analysis device capable of providing a high-contrast image within an object easily and in one go by setting, when an object ( 2 ) is irradiated with homogenous, parallel X-rays ( 1 ) to beam a refraction X-ray ( 3 ) from the object ( 2 ) onto a transmitting crystal analysis element ( 4 a ), and the refraction X-ray ( 3 ) is separated spectrally into a front-direction refraction X-ray ( 41 a ) and a refraction-direction refraction X-ray ( 42 a ) by the dynamic refracting action of the transmitting crystal analysis element ( 4 a ), the thickness of the transmitting crystal analysis element ( 4 a ) to such one that, when no object is present, the intensity of either one of the front-direction refraction X-ray ( 41 a ) and the refraction-direction refraction X-ray ( 42 a ) is almost zero in comparison with the intensity of the other at the intensity of an X-ray little affected by a directly beamed X-ray.

1 - 23 . (Cancelled)  
     
     
         24 . A nondestructive analysis method for irradiating an object with monochromatic parallel X-rays, making X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the thickness of the transmission-type analyzer crystal is initially set to such a thickness that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others with respect to the monochromatic parallel X-rays in use; and either one or both of an X-ray dark-field image and an X-ray bright-field image are provided when the X-rays from the object are made incident on this transmission-type analyzer crystal.  
     
     
         25 . A nondestructive analysis method for irradiating an object with monochromatic parallel X-rays, making X-rays from the object incident on a reflection-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the reflection-type analyzer crystal, characterized in that: the thickness of the reflection-type analyzer crystal is initially set to such a thickness that the X-rays from the object satisfy a diffraction condition and are transmitted by a dynamical diffraction action of the reflection-type analyzer crystal; and the reflection-type analyzer crystal reflects the monochromatic parallel X-rays in use with a reduction in X-ray intensity and transmits the X-rays from the object, so that an X-ray dark-field image is provided.  
     
     
         26 . A nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the thickness of the transmission-type analyzer crystal is initially set to such a thickness that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others with respect to the monochromatic parallel X-rays in use; and either one or both of an X-ray dark-field image and an X-ray bright-field image are provided when the X-rays from the object are made incident on the transmission-type analyzer crystal.  
     
     
         27 . A nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the thickness of the transmission-type analyzer crystal is initially set to such a thickness that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others with respect to the monochromatic parallel X-rays in use; and either ones or both of the X-rays along the forward diffraction direction and the X-rays along the diffraction direction are obtained when the X-rays from the object are made incident on the transmission-type analyzer crystal.  
     
     
         28 . A nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the transmission-type analyzer crystal is initially shaped so that it periodically exhibit such thicknesses that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others with respect to the monochromatic parallel X-rays in use; a slit plate is arranged on an output side of the transmission-type analyzer crystal; when the X-rays from the object are made incident on the transmission-type analyzer crystal, the transmission-type analyzer crystal and the slit plate are moved or the object is moved to obtain a plurality of slit-like images; and the images are synthesized into either one or both of an X-ray dark-field image and an X-ray bright-field image.  
     
     
         29 . A nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making X-rays from the object incident on a reflection-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the reflection-type analyzer crystal, characterized in that: the thickness of the reflection-type analyzer crystal is initially set to such a thickness that the X-rays from the object satisfy a diffraction condition and are transmitted by a dynamical diffraction action of the reflection-type analyzer crystal; and the reflection-type analyzer crystal reflects the monochromatic parallel X-rays in use with a reduction in X-ray intensity and transmits the X-rays from the object, so that an X-ray dark-field image is provided.  
     
     
         30 . A nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making X-rays from the object incident on a reflection-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the reflection-type analyzer crystal, characterized in that: the thickness of the reflection-type analyzer crystal is initially set to such a thickness that the X-rays from the object satisfy a diffraction condition and are transmitted by a dynamical diffraction action of the reflection-type analyzer crystal; and the reflection-type analyzer crystal reflects the monochromatic parallel X-rays in use with a reduction in X-ray intensity and transmits the X-rays from the object, so that an image of the X-rays is provided.  
     
     
         31 . A nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making X-rays from the object incident on an analyzer crystal, and obtaining an image inside the object by X-rays emitted from the analyzer crystal, characterized in that: the analyzer crystal is usable as both transmission-type and reflection-type analyzer crystal, being configured to satisfy both a thickness condition that either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the analyzer crystal have an intensity of nearly zero as compared to the intensity of the others with respect to the monochromatic parallel X-rays in use, and a thickness condition that the X-rays from the object satisfy a diffraction condition and are transmitted by the dynamical diffraction action of the analyzer crystal; in the case of the transmission-type analyzer crystal, either one or both of an X-ray dark-field image and an X-ray bright-field image from the transmission-type analyzer crystal are provided; and in the case of the reflection-type analyzer crystal, an X-ray dark-field image transmitted through the reflection-type analyzer crystal is provided.  
     
     
         32 . The nondestructive analysis device according to any one of claims  29 - 31 , characterized in that the reflection-type analyzer crystal is an asymmetric analyzer crystal.  
     
     
         33 . The nondestructive analysis device according to any one of claims  26 ,  28 ,  29  and  31 , characterized by comprising: an X-ray detecting device for detecting either one or both of the X-ray dark-field image and the X-ray bright-field image; and image processing equipment for creating an image by using detecting data from the X-ray detecting device.  
     
     
         34 . The nondestructive analysis device according to  claim 33 , characterized in that the X-ray detecting device is a two-dimensional detector or a line sensor one-dimensional detector.  
     
     
         35 . The nondestructive analysis device according to  claim 33 , characterized in that the image processing equipment is capable of creating either one or both of X-ray dark-field tomography and X-ray bright-field tomography, or either one or both of X-ray dark-field stereography and X-ray bright-field stereography.  
     
     
         36 . The nondestructive analysis device according to any one of claims  26 - 31 , characterized by comprising means for monochromating and parallelizing X-rays from an X-ray source.  
     
     
         37 . The nondestructive analysis device according to  claim 36 , characterized in that the means for monochromating and parallelizing the X-rays, or a pre crystal device, is a symmetric or asymmetric monochromator.  
     
     
         38 . The nondestructive analysis device according to  claim 36 , characterized in that atomic lattice planes of the pre crystal device, or the means for monochromating and parallelizing the X-rays, and atomic lattice planes of the transmission-type analyzer crystal or reflection-type analyzer crystal are parallel with each other.  
     
     
         39 . The nondestructive analysis device according to any one of claims  26 - 28  and  31 , characterized in that the X-rays from the object are made incident on the transmission-type analyzer crystal through one or a plurality of asymmetric monochromators.  
     
     
         40 . The nondestructive analysis device according to any one of claims  29 - 31 , characterized in that the X-rays from the object are made incident on the reflection-type analyzer crystal through one or a plurality of asymmetric monochromators.  
     
     
         41 . The nondestructive analysis device according to any one of claims  26 ,  28  and  31 , characterized in that either one or both of the X-ray dark-field image and the X-ray bright-field image obtained from the transmission-type analyzer crystal are output through one or a plurality of asymmetric monochromators.  
     
     
         42 . The nondestructive analysis device according to  claim 29  or  31 , characterized in that the X-ray dark-field image obtained from the reflection-type analyzer crystal is output through one or a plurality of asymmetric monochromators.  
     
     
         43 . A nondestructive analysis device for irradiating an object with monochromatic parallel X-rays or electromagnetic waves or corpuscular beams, making X-rays or electromagnetic waves or corpuscular beams from the object incident on an analyzer crystal, and obtaining an image inside the object by X-rays or electromagnetic waves or corpuscular beams emitted from the analyzer crystal, characterized by the comprising means: 
 to make the X-rays or the electromagnetic waves or the corpuscular beams from the X-ray or the electromagnetic wave or the corpuscular beam source monochromated and parallelized by pre crystal device;    to use a transmission-type analyzer crystal as an analyzer crystal in order to analyze the X-rays or the electromagnetic waves or the corpuscular beams from the object;    to make the atomic lattice planes of the pre crystal device and the atomic lattice planes of the analyzer crystal approximately parallel in order to utilize the angular-analysis capability of the analyzer crystal;    to make, based on the dynamical diffraction action the X-rays or the electromagnetic wave or the corpuscular beams divided into the X-rays or the electromagnetic waves or the corpuscular beams along the forward diffraction direction and the X-rays or the electromagnetic waves or the corpuscular beams along the diffraction direction, by fixing the thickness of the analyzer at a value;    to obtain, using the X-rays or the electromagnetic waves or the corpuscular beams from the object, a dark-field image or a bright-field image along the forward diffraction direction and a bright-field image or a dark-field image along the diffraction direction;    and the X-ray X-rays or the electromagnetic wave or the corpuscular beam detecting device to detect the dark-field image and or the bright-field image.    
     
     
         44 . A nondestructive analysis device for irradiating an object with monochromatic parallel X-rays or electromagnetic waves or corpuscular beams, making X-rays or electromagnetic waves or corpuscular beams from the object incident on an analyzer crystal, and obtaining an image inside the object by X-rays or electromagnetic waves or corpuscular beams emitted from the analyzer crystal, characterized by the comprising means: 
 to make the X-rays or the electromagnetic waves or the corpuscular beams from the X-ray or the electromagnetic wave or the corpuscular beam source monochromated and parallelized by pre crystal device;    to use a reflection type analyzer crystal as an analyzer crystal in order to analyze the X-rays or the electromagnetic waves or the corpuscular beams from the object;    to make the atomic lattice planes of the pre crystal device and the atomic lattice planes of the analyzer crystal approximately parallel in order to utilize the angular-analysis capability of the analyzer crystal;    the X-rays or the electromagnetic waves or the corpuscular beams satisfy the diffraction condition and are transmitted by the dynamical diffraction action of the analyzer crystal;    the angle between the monochromatic parallel the X-rays or the electromagnetic waves or the corpuscular beams and the analyzer crystal and the thickness of the analyzer crystal are given settings at which it possible to obtain the dark-field image that is created from the transmission the X-rays or the electromagnetic waves or the corpuscular beams from the analyzer crystal;    to obtain, using the X-rays or the electromagnetic waves or the corpuscular beams from the object, a dark-field image from the analyzer crystal;    and the X-ray or electromagnetic wave or the corpuscular beam detecting device to detect the dark-field image.