Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof thereof

Abstract

The present invention is a cooling plate including a groove, which becomes a passage of a coolant, inside a body, wherein one or more fins are provided inside the groove, wherein the groove is covered with a lid having width larger than the groove, wherein the lid is joined to the body by friction stir welding, and wherein a weld bead formed by the joining is outside the passage, and the weld bead formed by the joining is formed within the body and further, is characterized by a manufacturing method of a cooling plate that has a first groove, which becomes a passage of a coolant, and a second groove, which has width larger than the first groove and receives a lid on the first groove, inside a body, receives the lid on the second groove, and is joined to the body, the manufacturing method of a cooling plate wherein, while the lid and the body are joined together by the friction stir welding owing to insertion of a rotation tool having a shoulder and a pin, the joining is performed so that a weld bead formed by the joining may become out of the passage, and furthermore, is characterized in that a target for sputtering is joined to the cooling plate.

What is claimed is:  
     
         1 . A cooling plate comprising at least one groove, which becomes a passage of a coolant, inside a body thereof, wherein said at least one groove is covered by a lid having a width larger than said at least one groove, said lid is joined to the body by friction stir welding along a periphery of said at least one groove, and a weld bead formed by joining said lid to the body is outside said at least one groove.  
     
     
         2 . The cooling plate according to  claim 1 , wherein said at least one groove comprises a plurality of grooves which are closed passages for coolant and are independent from each other.  
     
     
         3 . The cooling plate according to  claim 1 , wherein said weld bead terminates beyond the periphery of said at least one groove.  
     
     
         4 . The cooling plate according to  claim 1 , further comprising at least one second groove having a width larger than said at least one groove and wherein said lid is fitted in said at least one second groove so as to cover said at least one groove and the joining of said lid to said body by friction stir welding is effected along a periphery of said at least one second groove.  
     
     
         5 . The cooling plate according to  claim 1 , wherein a projection is provided in a vicinity of a joining portion between said lid and said body and said friction stir welding is effected at said projection.