Wafer holder for semiconductor manufacturing device and semiconductor manufacturing device in which it is installed

Abstract

Wafer holder for semiconductor manufacturing and semiconductor manufacturing device in which the holder is installed, the wafer holder having a wafer-carrying surface whose wafer-retaining face has an enhanced isothermal rating. In the wafer holder having a wafer-carrying surface, multiple nubs having a flat portion are formed on the wafer-carrying surface; and by making the surface area of the flats on the nubs 70 mm 2 or less per nub, distribution in obverse-surface temperature of a wafer set in place on the wafer holder can be brought within ±1.0%. If moreover the per-nub flat surface area is 30 mm 2 or less, the temperature can be brought within ±0.5%. In addition, the total surface area of the flats on the nubs preferably is 40% or less of the wafer surface area, inasmuch as the incidence of trouble when de-chucking the wafers can be kept under control.

What is claimed is:  
     
         1 . A wafer holder for semiconductor manufacturing device, the wafer holder having a surface for carrying wafers and comprising multiple nubs formed on the wafer-carrying surface, said nubs each having a flat portion whose surface area is 70 mm 2  or less per nub.  
     
     
         2 . A wafer holder for semiconductor manufacturing device as set forth in  claim 1 , the total surface area of the flat portions of said multiple nubs is 40% or less of the surface area of wafers that the wafer holder carries.  
     
     
         3 . Semiconductor manufacturing device wherein the wafer holder set forth in  claim 1  is installed.  
     
     
         4 . Semiconductor manufacturing device wherein the wafer holder set forth in  claim 2  is installed.  
     
     
         5 . A wafer holder for semiconductor manufacturing device, the wafer holder having a surface for carrying wafers and comprising multiple nubs formed on the wafer-carrying surface and each having a flat portion, the total surface area of the flat portions of said multiple nubs being 40% or less of the surface area of wafers that the wafer holder carries.  
     
     
         6 . Semiconductor manufacturing device wherein the wafer holder set forth in  claim 5  is installed.