Electrode semiconductor workpiece holder and processing methods

Abstract

A semiconductor workpiece holder for use in processing a semiconductor workpiece includes a workpiece support operatively mounted to support a workpiece in position for processing. A finger assembly is operatively mounted upon the workpiece support and includes a finger tip. The finger assembly is movable between an engaged position in which the finger tip is engaged against the workpiece, and a disengaged position in which the finger tip is moved away from the workpiece. Preferably, at least one electrode forms part of the finger assembly and includes an electrode contact for contacting a surface of said workpiece. At least one protective sheath covers at least some of the electrode contact. According to one aspect of the invention, a sheathed electrode having a sheathed electrode tip is positioned against a semiconductor workpiece surface in a manner engaging the workpiece surface with said sheathed electrode tip. A seal is formed about the periphery of the electrode tip, and with the electrode tip engaging the workpiece, a desired electrical contact is made to the workpiece. Thereafter, the workpiece is exposed to desired semiconductor processing conditions.

1 . A workpiece holder for use in processing a workpiece comprising: 
 a workpiece support;    at least one finger assembly mounted upon said workpiece support; said at least one finger assembly including at least one contact for contacting the workpiece;    at least one finger actuator operable with said at least one finger assembly for moving said finger assembly between an engaged position wherein said finger assembly is in contact with the workpiece and a disengaged position wherein said finger assembly is disengaged from the workpiece, said at least one finger actuator having means for moving the at least one finger assembly in an axial movement toward and from the workpiece along a longitudinal axis, and means to rotate the at least one finger assembly in a rotational movement about said longitudinal axis;    at least one electrode forming a part of said at least one finger assembly, said at least one electrode having an electrode contact for contacting a surface of said workpiece to provide electrical connection therewith, wherein said electrode contact is one of said at least one contact.    
     
     
         2 . The workpiece holder of  claim 1  wherein said at least one finger actuator moves said at least one finger assembly in a reciprocal manner.  
     
     
         3 . The workpiece holder of  claim 1  and further comprising at least one protective sheath covering at least a portion of the at least one finger assembly to protect the finger assembly from contact with a fluid.  
     
     
         4 . The workpiece holder of  claim 1  and further comprising at least one protective sheath covering at least a portion of the at least one finger assembly to protect the finger assembly from contact with a plating fluid, said at least one protective sheath being made from a dielectric material.  
     
     
         5 . The workpiece holder of  claim 4  wherein said at least one protective sheath includes a rim portion for engaging said workpiece and forming a seal therebetween.  
     
     
         6 . The workpiece holder of  claim 4  wherein said electrode contact is maintained in a generally retracted position within said at least one protective sheath when said at least one finger assembly is in said disengaged position; said electrode contact being moved out of said retracted position when said at least one finger assembly is moved into said engaged position.  
     
     
         7 . The workpiece holder of  claim 4  wherein said at least one protective sheath includes a yieldable terminal end adjacent said electrode contact for engaging said workpiece and effectively sealing said electrode contact therewithin when said at least one finger assembly is moved to said engaged position; wherein said electrode contact is maintained in a generally retracted position within said at least one protective sheath when said at least one finger assembly is in said disengaged position; said electrode contact being moved out of said retracted position when said finger assembly is moved into said engaged position.